JPWO2024185143A1 - - Google Patents
Info
- Publication number
- JPWO2024185143A1 JPWO2024185143A1 JP2025505045A JP2025505045A JPWO2024185143A1 JP WO2024185143 A1 JPWO2024185143 A1 JP WO2024185143A1 JP 2025505045 A JP2025505045 A JP 2025505045A JP 2025505045 A JP2025505045 A JP 2025505045A JP WO2024185143 A1 JPWO2024185143 A1 JP WO2024185143A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
- H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
- H01J37/222—Image processing arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/009147 WO2024185143A1 (ja) | 2023-03-09 | 2023-03-09 | 荷電粒子線装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2024185143A1 true JPWO2024185143A1 (https=) | 2024-09-12 |
Family
ID=92674586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025505045A Pending JPWO2024185143A1 (https=) | 2023-03-09 | 2023-03-09 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPWO2024185143A1 (https=) |
| KR (1) | KR20250129060A (https=) |
| TW (1) | TWI905659B (https=) |
| WO (1) | WO2024185143A1 (https=) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8692214B2 (en) * | 2009-08-12 | 2014-04-08 | Hermes Microvision, Inc. | Charged particle beam inspection method |
| US11393657B2 (en) | 2018-09-11 | 2022-07-19 | Hitachi High-Tech Corporation | Electron beam device |
| JP7105368B2 (ja) * | 2019-03-27 | 2022-07-22 | 株式会社日立ハイテク | 荷電粒子線装置 |
| US11749495B2 (en) * | 2021-10-05 | 2023-09-05 | KLA Corp. | Bandpass charged particle energy filtering detector for charged particle tools |
-
2023
- 2023-03-09 JP JP2025505045A patent/JPWO2024185143A1/ja active Pending
- 2023-03-09 KR KR1020257024936A patent/KR20250129060A/ko active Pending
- 2023-03-09 WO PCT/JP2023/009147 patent/WO2024185143A1/ja not_active Ceased
-
2024
- 2024-02-15 TW TW113105216A patent/TWI905659B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024185143A1 (ja) | 2024-09-12 |
| TW202437310A (zh) | 2024-09-16 |
| TWI905659B (zh) | 2025-11-21 |
| KR20250129060A (ko) | 2025-08-28 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20250722 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20260423 |