JPWO2024180577A1 - - Google Patents
Info
- Publication number
- JPWO2024180577A1 JPWO2024180577A1 JP2025503213A JP2025503213A JPWO2024180577A1 JP WO2024180577 A1 JPWO2024180577 A1 JP WO2024180577A1 JP 2025503213 A JP2025503213 A JP 2025503213A JP 2025503213 A JP2025503213 A JP 2025503213A JP WO2024180577 A1 JPWO2024180577 A1 JP WO2024180577A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/006908 WO2024180577A1 (ja) | 2023-02-27 | 2023-02-27 | 複合ビーム装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2024180577A1 true JPWO2024180577A1 (https=) | 2024-09-06 |
Family
ID=92589263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025503213A Pending JPWO2024180577A1 (https=) | 2023-02-27 | 2023-02-27 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2024180577A1 (https=) |
| WO (1) | WO2024180577A1 (https=) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5127148B2 (ja) * | 2006-03-16 | 2013-01-23 | 株式会社日立ハイテクノロジーズ | イオンビーム加工装置 |
| JP2013182684A (ja) * | 2012-02-29 | 2013-09-12 | Toshiba Corp | 試料加工装置および試料加工方法 |
| US9767984B2 (en) * | 2014-09-30 | 2017-09-19 | Fei Company | Chicane blanker assemblies for charged particle beam systems and methods of using the same |
| JP7031859B2 (ja) * | 2018-02-20 | 2022-03-08 | 株式会社日立ハイテクサイエンス | 荷電粒子ビーム装置、試料加工観察方法 |
-
2023
- 2023-02-27 JP JP2025503213A patent/JPWO2024180577A1/ja active Pending
- 2023-02-27 WO PCT/JP2023/006908 patent/WO2024180577A1/ja not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024180577A1 (ja) | 2024-09-06 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20250801 |