JPWO2024134744A1 - - Google Patents
Info
- Publication number
- JPWO2024134744A1 JPWO2024134744A1 JP2024565423A JP2024565423A JPWO2024134744A1 JP WO2024134744 A1 JPWO2024134744 A1 JP WO2024134744A1 JP 2024565423 A JP2024565423 A JP 2024565423A JP 2024565423 A JP2024565423 A JP 2024565423A JP WO2024134744 A1 JPWO2024134744 A1 JP WO2024134744A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/32—Polishing; Etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/208—Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2022/046768 WO2024134744A1 (ja) | 2022-12-20 | 2022-12-20 | ビーム装置、ラメラ抽出装置、ラメラ観察システムおよびラメラ作製方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2024134744A1 true JPWO2024134744A1 (https=) | 2024-06-27 |
Family
ID=91588151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024565423A Pending JPWO2024134744A1 (https=) | 2022-12-20 | 2022-12-20 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPWO2024134744A1 (https=) |
| KR (1) | KR20250108652A (https=) |
| TW (1) | TWI891170B (https=) |
| WO (1) | WO2024134744A1 (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002148159A (ja) * | 2000-11-06 | 2002-05-22 | Hitachi Ltd | 試料作製方法および試料作製装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4037023B2 (ja) | 1999-11-18 | 2008-01-23 | エスアイアイ・ナノテクノロジー株式会社 | 透過電子顕微鏡用試料の切り込み加工方法及び作成方法 |
| EP2492950B1 (en) * | 2011-02-25 | 2018-04-11 | FEI Company | Method for rapid switching between a high current mode and a low current mode in a charged particle beam system |
| DE102012010708B4 (de) * | 2012-05-30 | 2021-12-23 | Carl Zeiss Microscopy Gmbh | Kombiniertes bearbeitungssystem zur bearbeitung mittels laser und fokussierten ionenstrahlen |
| TWI686837B (zh) * | 2012-12-31 | 2020-03-01 | 美商Fei公司 | 用於具有一帶電粒子束之傾斜或偏斜研磨操作之基準設計 |
| JP6541161B2 (ja) * | 2017-11-17 | 2019-07-10 | 株式会社日立ハイテクサイエンス | 荷電粒子ビーム装置 |
| JP7389817B2 (ja) * | 2019-11-20 | 2023-11-30 | 株式会社日立ハイテク | ラメラの作製方法、解析システムおよび試料の解析方法 |
-
2022
- 2022-12-20 JP JP2024565423A patent/JPWO2024134744A1/ja active Pending
- 2022-12-20 KR KR1020257018638A patent/KR20250108652A/ko active Pending
- 2022-12-20 WO PCT/JP2022/046768 patent/WO2024134744A1/ja not_active Ceased
-
2023
- 2023-12-18 TW TW112149267A patent/TWI891170B/zh active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002148159A (ja) * | 2000-11-06 | 2002-05-22 | Hitachi Ltd | 試料作製方法および試料作製装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202441563A (zh) | 2024-10-16 |
| WO2024134744A1 (ja) | 2024-06-27 |
| KR20250108652A (ko) | 2025-07-15 |
| TWI891170B (zh) | 2025-07-21 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20250606 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20260217 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20260327 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20260414 |