JPWO2024116412A1 - - Google Patents
Info
- Publication number
- JPWO2024116412A1 JPWO2024116412A1 JP2023517749A JP2023517749A JPWO2024116412A1 JP WO2024116412 A1 JPWO2024116412 A1 JP WO2024116412A1 JP 2023517749 A JP2023517749 A JP 2023517749A JP 2023517749 A JP2023517749 A JP 2023517749A JP WO2024116412 A1 JPWO2024116412 A1 JP WO2024116412A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2022/044618 WO2024116412A1 (ja) | 2022-12-02 | 2022-12-02 | 半導体製造装置用部材 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2024116412A1 true JPWO2024116412A1 (https=) | 2024-06-06 |
| JP7503708B1 JP7503708B1 (ja) | 2024-06-20 |
| JPWO2024116412A5 JPWO2024116412A5 (https=) | 2024-10-30 |
Family
ID=91323173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023517749A Active JP7503708B1 (ja) | 2022-12-02 | 2022-12-02 | 半導体製造装置用部材 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7503708B1 (https=) |
| WO (1) | WO2024116412A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2026026650A (ja) * | 2024-08-05 | 2026-02-18 | Toto株式会社 | 静電チャック |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100650290B1 (ko) * | 2005-11-23 | 2006-11-27 | (주)넥스트인스트루먼트 | 비접촉 반송플레이트 |
| JP2009224526A (ja) * | 2008-03-17 | 2009-10-01 | Hitachi High-Technologies Corp | プラズマ処理装置用試料載置電極 |
| WO2011043063A1 (ja) * | 2009-10-05 | 2011-04-14 | キヤノンアネルバ株式会社 | 基板冷却装置、スパッタリング装置および電子デバイスの製造方法 |
| KR20120067117A (ko) * | 2010-12-15 | 2012-06-25 | 주식회사 토러스기술연구소 | 비접촉 반송플레이트 |
| JP7269759B2 (ja) * | 2019-03-12 | 2023-05-09 | 新光電気工業株式会社 | 基板固定装置 |
| US20200411355A1 (en) * | 2019-06-28 | 2020-12-31 | Applied Materials, Inc. | Apparatus for reduction or prevention of arcing in a substrate support |
-
2022
- 2022-12-02 JP JP2023517749A patent/JP7503708B1/ja active Active
- 2022-12-02 WO PCT/JP2022/044618 patent/WO2024116412A1/ja not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| JP7503708B1 (ja) | 2024-06-20 |
| WO2024116412A1 (ja) | 2024-06-06 |
Similar Documents
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