JPWO2024111129A1 - - Google Patents

Info

Publication number
JPWO2024111129A1
JPWO2024111129A1 JP2024559834A JP2024559834A JPWO2024111129A1 JP WO2024111129 A1 JPWO2024111129 A1 JP WO2024111129A1 JP 2024559834 A JP2024559834 A JP 2024559834A JP 2024559834 A JP2024559834 A JP 2024559834A JP WO2024111129 A1 JPWO2024111129 A1 JP WO2024111129A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024559834A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2024111129A1 publication Critical patent/JPWO2024111129A1/ja
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00Processes of polymerisation
    • C08F2/46Polymerisation initiated by wave energy or particle radiation
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/037Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyamides or polyimides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Materials For Photolithography (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
JP2024559834A 2022-11-25 2022-11-25 Pending JPWO2024111129A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/043634 WO2024111129A1 (ja) 2022-11-25 2022-11-25 ポリイミド前駆体の製造方法、ポリイミド前駆体、感光性樹脂組成物、硬化物、パターン硬化物の製造方法、及び電子部品

Publications (1)

Publication Number Publication Date
JPWO2024111129A1 true JPWO2024111129A1 (https=) 2024-05-30

Family

ID=91196005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024559834A Pending JPWO2024111129A1 (https=) 2022-11-25 2022-11-25

Country Status (3)

Country Link
JP (1) JPWO2024111129A1 (https=)
TW (1) TW202424056A (https=)
WO (1) WO2024111129A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026042732A1 (ja) * 2024-08-23 2026-02-26 Jsr株式会社 レジスト下層膜形成用組成物、半導体基板の製造方法及び窒素含有化合物の製造方法
CN121432805B (zh) * 2025-12-30 2026-04-10 浙江奥首材料科技有限公司 高粘附性的负性光敏树脂组合物及制法与应用

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61254547A (ja) * 1985-04-26 1986-11-12 イ−・アイ・デユポン・ド・ネモア−ス・アンド・コンパニ− 光重合可能な芳香族ポリアミツク酸誘導体の合成方法
JP2005148611A (ja) * 2003-11-19 2005-06-09 Hitachi Chemical Dupont Microsystems Ltd 感光性樹脂組成物及びそれを用いたパターンの製造方法、電子部品
JP2010077192A (ja) * 2008-09-24 2010-04-08 Fujifilm Corp 樹脂組成物、該樹脂組成物を用いた硬化物、フレキシブル銅張り積層板及びフレキシブルプリント基板
JP2010260996A (ja) * 2009-05-11 2010-11-18 Fujifilm Corp テトラカルボン酸二無水物、及び重合体
WO2019193647A1 (ja) * 2018-04-03 2019-10-10 日立化成デュポンマイクロシステムズ株式会社 ポリイミド前駆体の製造方法、感光性樹脂組成物の製造方法、パターン硬化物の製造方法、層間絶縁膜、カバーコート層又は表面保護膜の製造方法、及び電子部品の製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61254547A (ja) * 1985-04-26 1986-11-12 イ−・アイ・デユポン・ド・ネモア−ス・アンド・コンパニ− 光重合可能な芳香族ポリアミツク酸誘導体の合成方法
JP2005148611A (ja) * 2003-11-19 2005-06-09 Hitachi Chemical Dupont Microsystems Ltd 感光性樹脂組成物及びそれを用いたパターンの製造方法、電子部品
JP2010077192A (ja) * 2008-09-24 2010-04-08 Fujifilm Corp 樹脂組成物、該樹脂組成物を用いた硬化物、フレキシブル銅張り積層板及びフレキシブルプリント基板
JP2010260996A (ja) * 2009-05-11 2010-11-18 Fujifilm Corp テトラカルボン酸二無水物、及び重合体
WO2019193647A1 (ja) * 2018-04-03 2019-10-10 日立化成デュポンマイクロシステムズ株式会社 ポリイミド前駆体の製造方法、感光性樹脂組成物の製造方法、パターン硬化物の製造方法、層間絶縁膜、カバーコート層又は表面保護膜の製造方法、及び電子部品の製造方法

Also Published As

Publication number Publication date
TW202424056A (zh) 2024-06-16
WO2024111129A1 (ja) 2024-05-30

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