JPWO2024024864A1 - - Google Patents

Info

Publication number
JPWO2024024864A1
JPWO2024024864A1 JP2024537208A JP2024537208A JPWO2024024864A1 JP WO2024024864 A1 JPWO2024024864 A1 JP WO2024024864A1 JP 2024537208 A JP2024537208 A JP 2024537208A JP 2024537208 A JP2024537208 A JP 2024537208A JP WO2024024864 A1 JPWO2024024864 A1 JP WO2024024864A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024537208A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2024024864A1 publication Critical patent/JPWO2024024864A1/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/11Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials For Photolithography (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP2024537208A 2022-07-28 2023-07-26 Pending JPWO2024024864A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022120582 2022-07-28
PCT/JP2023/027464 WO2024024864A1 (ja) 2022-07-28 2023-07-26 感光性転写材料及びその製造方法、樹脂パターンの製造方法、並びに、回路配線の製造方法

Publications (1)

Publication Number Publication Date
JPWO2024024864A1 true JPWO2024024864A1 (https=) 2024-02-01

Family

ID=89706580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024537208A Pending JPWO2024024864A1 (https=) 2022-07-28 2023-07-26

Country Status (3)

Country Link
JP (1) JPWO2024024864A1 (https=)
TW (1) TW202413096A (https=)
WO (1) WO2024024864A1 (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017211555A (ja) * 2016-05-26 2017-11-30 日立化成株式会社 ドライフィルム及びレジストパターンの形成方法
JPWO2020261523A1 (https=) * 2019-06-27 2020-12-30
JP7514305B2 (ja) * 2020-05-27 2024-07-10 富士フイルム株式会社 転写フィルム、積層体の製造方法

Also Published As

Publication number Publication date
TW202413096A (zh) 2024-04-01
WO2024024864A1 (ja) 2024-02-01

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