JPWO2023234153A1 - - Google Patents
Info
- Publication number
- JPWO2023234153A1 JPWO2023234153A1 JP2024524786A JP2024524786A JPWO2023234153A1 JP WO2023234153 A1 JPWO2023234153 A1 JP WO2023234153A1 JP 2024524786 A JP2024524786 A JP 2024524786A JP 2024524786 A JP2024524786 A JP 2024524786A JP WO2023234153 A1 JPWO2023234153 A1 JP WO2023234153A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
- G01N23/2252—Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/17—Circuit arrangements not adapted to a particular type of detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/24—Measuring radiation intensity with semiconductor detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T7/00—Details of radiation-measuring instruments
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022088954 | 2022-05-31 | ||
| PCT/JP2023/019416 WO2023234153A1 (ja) | 2022-05-31 | 2023-05-25 | 放射線検出装置、制御方法及びコンピュータプログラム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023234153A1 true JPWO2023234153A1 (https=) | 2023-12-07 |
| JPWO2023234153A5 JPWO2023234153A5 (https=) | 2025-02-12 |
Family
ID=89024887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024524786A Pending JPWO2023234153A1 (https=) | 2022-05-31 | 2023-05-25 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2023234153A1 (https=) |
| WO (1) | WO2023234153A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025126801A1 (ja) * | 2023-12-14 | 2025-06-19 | 株式会社堀場製作所 | 放射線検出装置、制御方法及びコンピュータプログラム |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6025985U (ja) * | 1983-07-27 | 1985-02-21 | 日本電子株式会社 | エネルギ−分散型ｘ線検出装置 |
| JPS6191548A (ja) * | 1984-10-12 | 1986-05-09 | Hitachi Ltd | 放射性金属酸化物の濃度分析方法 |
| GB8718531D0 (en) * | 1987-08-05 | 1987-09-09 | Link Analytical Ltd | X-ray detectors |
| JPH0869772A (ja) * | 1994-08-30 | 1996-03-12 | Nikon Corp | 走査型電子顕微鏡 |
| JP3887066B2 (ja) * | 1997-05-10 | 2007-02-28 | 株式会社堀場製作所 | エネルギー分散型半導体ｘ線検出器 |
| JP7008519B2 (ja) * | 2018-01-30 | 2022-01-25 | 日本電子株式会社 | 荷電粒子線装置 |
-
2023
- 2023-05-25 JP JP2024524786A patent/JPWO2023234153A1/ja active Pending
- 2023-05-25 WO PCT/JP2023/019416 patent/WO2023234153A1/ja not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO2023234153A1 (ja) | 2023-12-07 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20241010 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20260302 |