JPWO2023218809A1 - - Google Patents
Info
- Publication number
- JPWO2023218809A1 JPWO2023218809A1 JP2024520296A JP2024520296A JPWO2023218809A1 JP WO2023218809 A1 JPWO2023218809 A1 JP WO2023218809A1 JP 2024520296 A JP2024520296 A JP 2024520296A JP 2024520296 A JP2024520296 A JP 2024520296A JP WO2023218809 A1 JPWO2023218809 A1 JP WO2023218809A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022078328 | 2022-05-11 | ||
| PCT/JP2023/014085 WO2023218809A1 (ja) | 2022-05-11 | 2023-04-05 | 炭化珪素基板、炭化珪素エピタキシャル基板、炭化珪素基板の製造方法および炭化珪素半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023218809A1 true JPWO2023218809A1 (https=) | 2023-11-16 |
| JPWO2023218809A5 JPWO2023218809A5 (https=) | 2025-01-22 |
Family
ID=88730044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024520296A Pending JPWO2023218809A1 (https=) | 2022-05-11 | 2023-04-05 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2023218809A1 (https=) |
| WO (1) | WO2023218809A1 (https=) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103782370A (zh) * | 2011-09-05 | 2014-05-07 | 旭硝子株式会社 | 研磨剂及研磨方法 |
| JPWO2013088928A1 (ja) * | 2011-12-14 | 2015-04-27 | 旭硝子株式会社 | 洗浄剤、および炭化ケイ素単結晶基板の製造方法 |
| JP6493690B2 (ja) * | 2016-08-31 | 2019-04-03 | 昭和電工株式会社 | ＳｉＣエピタキシャルウェハ及びその製造方法、並びに、ラージピット欠陥検出方法、欠陥識別方法 |
| JP7135531B2 (ja) * | 2018-07-20 | 2022-09-13 | 株式会社デンソー | 炭化珪素半導体装置の製造方法 |
| WO2020235205A1 (ja) * | 2019-05-17 | 2020-11-26 | 住友電気工業株式会社 | 炭化珪素基板 |
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2023
- 2023-04-05 JP JP2024520296A patent/JPWO2023218809A1/ja active Pending
- 2023-04-05 WO PCT/JP2023/014085 patent/WO2023218809A1/ja not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO2023218809A1 (ja) | 2023-11-16 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240919 |
|
| A711 | Notification of change in applicant |
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| A621 | Written request for application examination |
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