JPWO2023210667A1 - - Google Patents
Info
- Publication number
- JPWO2023210667A1 JPWO2023210667A1 JP2023547097A JP2023547097A JPWO2023210667A1 JP WO2023210667 A1 JPWO2023210667 A1 JP WO2023210667A1 JP 2023547097 A JP2023547097 A JP 2023547097A JP 2023547097 A JP2023547097 A JP 2023547097A JP WO2023210667 A1 JPWO2023210667 A1 JP WO2023210667A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
- G03F1/24—Reflection masks; Preparation thereof
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
- G03F1/48—Protective coatings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2023172548A JP7517570B2 (ja) | 2022-04-28 | 2023-10-04 | 反射型マスクブランク |
JP2024106141A JP2024120111A (ja) | 2022-04-28 | 2024-07-01 | 反射型マスクブランク、反射型マスク、反射型マスクの製造方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022074386 | 2022-04-28 | ||
JP2022074386 | 2022-04-28 | ||
PCT/JP2023/016365 WO2023210667A1 (ja) | 2022-04-28 | 2023-04-25 | 反射型マスクブランク、反射型マスクブランクの製造方法、反射型マスク、反射型マスクの製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023172548A Division JP7517570B2 (ja) | 2022-04-28 | 2023-10-04 | 反射型マスクブランク |
Publications (2)
Publication Number | Publication Date |
---|---|
JP7367901B1 JP7367901B1 (ja) | 2023-10-24 |
JPWO2023210667A1 true JPWO2023210667A1 (ja) | 2023-11-02 |
Family
ID=88418449
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023547097A Active JP7367901B1 (ja) | 2022-04-28 | 2023-04-25 | 反射型マスクブランク、反射型マスクブランクの製造方法、反射型マスク、反射型マスクの製造方法 |
JP2023172548A Active JP7517570B2 (ja) | 2022-04-28 | 2023-10-04 | 反射型マスクブランク |
JP2024106141A Pending JP2024120111A (ja) | 2022-04-28 | 2024-07-01 | 反射型マスクブランク、反射型マスク、反射型マスクの製造方法 |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023172548A Active JP7517570B2 (ja) | 2022-04-28 | 2023-10-04 | 反射型マスクブランク |
JP2024106141A Pending JP2024120111A (ja) | 2022-04-28 | 2024-07-01 | 反射型マスクブランク、反射型マスク、反射型マスクの製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US12032280B2 (ja) |
JP (3) | JP7367901B1 (ja) |
KR (2) | KR20240096806A (ja) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU5597000A (en) | 1999-06-07 | 2000-12-28 | Regents Of The University Of California, The | Coatings on reflective mask substrates |
JP6441012B2 (ja) * | 2014-09-30 | 2018-12-19 | Hoya株式会社 | 反射型マスクブランク、反射型マスク及びその製造方法、並びに半導体装置の製造方法 |
US11550215B2 (en) | 2018-05-25 | 2023-01-10 | Hoya Corporation | Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device |
JP6929340B2 (ja) * | 2019-11-21 | 2021-09-01 | Hoya株式会社 | 反射型マスクブランクおよび反射型マスク、並びに半導体装置の製造方法 |
JP6929983B1 (ja) * | 2020-03-10 | 2021-09-01 | Hoya株式会社 | 反射型マスクブランクおよび反射型マスク、並びに半導体デバイスの製造方法 |
KR20230058395A (ko) * | 2020-09-04 | 2023-05-03 | 에이지씨 가부시키가이샤 | 반사형 마스크, 반사형 마스크 블랭크 및 반사형 마스크의 제조 방법 |
-
2023
- 2023-04-25 JP JP2023547097A patent/JP7367901B1/ja active Active
- 2023-04-25 KR KR1020247019036A patent/KR20240096806A/ko unknown
- 2023-04-25 KR KR1020237041135A patent/KR102674790B1/ko active IP Right Grant
- 2023-10-04 JP JP2023172548A patent/JP7517570B2/ja active Active
- 2023-12-19 US US18/544,970 patent/US12032280B2/en active Active
-
2024
- 2024-07-01 JP JP2024106141A patent/JP2024120111A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2023168532A (ja) | 2023-11-24 |
KR20240096806A (ko) | 2024-06-26 |
JP7517570B2 (ja) | 2024-07-17 |
JP7367901B1 (ja) | 2023-10-24 |
KR20230167154A (ko) | 2023-12-07 |
KR102674790B1 (ko) | 2024-06-14 |
US20240160097A1 (en) | 2024-05-16 |
JP2024120111A (ja) | 2024-09-03 |
US12032280B2 (en) | 2024-07-09 |
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