JPWO2023167161A1 - - Google Patents

Info

Publication number
JPWO2023167161A1
JPWO2023167161A1 JP2024504684A JP2024504684A JPWO2023167161A1 JP WO2023167161 A1 JPWO2023167161 A1 JP WO2023167161A1 JP 2024504684 A JP2024504684 A JP 2024504684A JP 2024504684 A JP2024504684 A JP 2024504684A JP WO2023167161 A1 JPWO2023167161 A1 JP WO2023167161A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024504684A
Other languages
Japanese (ja)
Other versions
JPWO2023167161A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023167161A1 publication Critical patent/JPWO2023167161A1/ja
Publication of JPWO2023167161A5 publication Critical patent/JPWO2023167161A5/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/60Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
    • H10D89/601Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
    • H10D89/611Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using diodes as protective elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/02Manufacture or treatment characterised by using material-based technologies
    • H10D84/03Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
JP2024504684A 2022-03-01 2023-02-28 Pending JPWO2023167161A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022030840 2022-03-01
PCT/JP2023/007193 WO2023167161A1 (ja) 2022-03-01 2023-02-28 半導体装置

Publications (2)

Publication Number Publication Date
JPWO2023167161A1 true JPWO2023167161A1 (https=) 2023-09-07
JPWO2023167161A5 JPWO2023167161A5 (https=) 2024-11-06

Family

ID=87883711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024504684A Pending JPWO2023167161A1 (https=) 2022-03-01 2023-02-28

Country Status (5)

Country Link
US (1) US20240395796A1 (https=)
JP (1) JPWO2023167161A1 (https=)
CN (1) CN118749135A (https=)
DE (1) DE112023001175T5 (https=)
WO (1) WO2023167161A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240429227A1 (en) * 2023-06-23 2024-12-26 Globalfoundries U.S. Inc. Structures for an electrostatic discharge protection device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6610508B2 (ja) * 2016-11-09 2019-11-27 株式会社デンソー 半導体装置
CN114556560B (zh) * 2019-11-29 2026-01-23 罗姆股份有限公司 半导体器件

Also Published As

Publication number Publication date
WO2023167161A1 (ja) 2023-09-07
US20240395796A1 (en) 2024-11-28
DE112023001175T5 (de) 2024-12-19
CN118749135A (zh) 2024-10-08

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Legal Events

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