JPWO2023136032A5 - - Google Patents
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- JPWO2023136032A5 JPWO2023136032A5 JP2023573920A JP2023573920A JPWO2023136032A5 JP WO2023136032 A5 JPWO2023136032 A5 JP WO2023136032A5 JP 2023573920 A JP2023573920 A JP 2023573920A JP 2023573920 A JP2023573920 A JP 2023573920A JP WO2023136032 A5 JPWO2023136032 A5 JP WO2023136032A5
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- 230000010365 information processing Effects 0.000 claims description 25
- 230000007547 defect Effects 0.000 claims description 7
- 238000003672 processing method Methods 0.000 claims 1
- 238000007689 inspection Methods 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 3
- 230000011218 segmentation Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000010801 machine learning Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022004406 | 2022-01-14 | ||
| PCT/JP2022/045980 WO2023136032A1 (ja) | 2022-01-14 | 2022-12-14 | 情報処理装置、方法及びプログラム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023136032A1 JPWO2023136032A1 (https=) | 2023-07-20 |
| JPWO2023136032A5 true JPWO2023136032A5 (https=) | 2024-09-26 |
Family
ID=87278935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023573920A Pending JPWO2023136032A1 (https=) | 2022-01-14 | 2022-12-14 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20240362769A1 (https=) |
| EP (1) | EP4465028A4 (https=) |
| JP (1) | JPWO2023136032A1 (https=) |
| CN (1) | CN118541598A (https=) |
| WO (1) | WO2023136032A1 (https=) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4052733B2 (ja) * | 1998-06-11 | 2008-02-27 | 株式会社日立ハイテクノロジーズ | パターン付きウエハの異物検査方法 |
| JP4109799B2 (ja) * | 1999-06-28 | 2008-07-02 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
| JP2002269109A (ja) * | 2001-03-12 | 2002-09-20 | Hitachi Ltd | 薄膜デバイス製造工程管理システムおよび薄膜デバイス製造工程管理方法 |
| JP4728144B2 (ja) * | 2006-02-28 | 2011-07-20 | 株式会社日立ハイテクノロジーズ | 回路パターンの検査装置 |
| JP4910888B2 (ja) * | 2007-05-30 | 2012-04-04 | ブラザー工業株式会社 | 画像処理装置 |
| JP5572293B2 (ja) * | 2008-07-07 | 2014-08-13 | 株式会社日立ハイテクノロジーズ | 欠陥検査方法及び欠陥検査装置 |
| GB2496040B (en) * | 2011-10-24 | 2019-04-03 | Fisher Rosemount Systems Inc | Predicted fault analysis |
| CN112204385A (zh) | 2018-06-29 | 2021-01-08 | 富士胶片株式会社 | 缺陷显示装置及方法 |
| JP7289427B2 (ja) * | 2020-02-28 | 2023-06-12 | 株式会社Pros Cons | プログラム、情報処理方法及び情報処理装置 |
-
2022
- 2022-12-14 WO PCT/JP2022/045980 patent/WO2023136032A1/ja not_active Ceased
- 2022-12-14 CN CN202280088664.0A patent/CN118541598A/zh active Pending
- 2022-12-14 JP JP2023573920A patent/JPWO2023136032A1/ja active Pending
- 2022-12-14 EP EP22920550.5A patent/EP4465028A4/en active Pending
-
2024
- 2024-07-11 US US18/770,085 patent/US20240362769A1/en active Pending
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