JPWO2023067681A1 - - Google Patents
Info
- Publication number
- JPWO2023067681A1 JPWO2023067681A1 JP2023554112A JP2023554112A JPWO2023067681A1 JP WO2023067681 A1 JPWO2023067681 A1 JP WO2023067681A1 JP 2023554112 A JP2023554112 A JP 2023554112A JP 2023554112 A JP2023554112 A JP 2023554112A JP WO2023067681 A1 JPWO2023067681 A1 JP WO2023067681A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/04—Means for controlling the discharge
- H01J2237/047—Changing particle velocity
- H01J2237/0473—Changing particle velocity accelerating
- H01J2237/04735—Changing particle velocity accelerating with electrostatic means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06325—Cold-cathode sources
- H01J2237/06341—Field emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2021/038557 WO2023067681A1 (ja) | 2021-10-19 | 2021-10-19 | 荷電粒子線装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023067681A1 true JPWO2023067681A1 (https=) | 2023-04-27 |
| JP7730916B2 JP7730916B2 (ja) | 2025-08-28 |
Family
ID=86058909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023554112A Active JP7730916B2 (ja) | 2021-10-19 | 2021-10-19 | 荷電粒子線装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US12469665B2 (https=) |
| JP (1) | JP7730916B2 (https=) |
| KR (1) | KR102934426B1 (https=) |
| WO (1) | WO2023067681A1 (https=) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5012959A (https=) * | 1973-04-13 | 1975-02-10 | ||
| JPS50100964A (https=) * | 1974-01-07 | 1975-08-11 | ||
| JPS57165944A (en) * | 1981-04-06 | 1982-10-13 | Jeol Ltd | Dallying method for emitter |
| JP2007073521A (ja) * | 2005-09-05 | 2007-03-22 | Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | 荷電粒子ビーム照射デバイス及び荷電粒子ビーム照射デバイスを動作させるための方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6166910B2 (ja) | 2013-02-26 | 2017-07-19 | 株式会社ニューフレアテクノロジー | カソードの動作温度調整方法、及び描画装置 |
| EP2779204A1 (en) * | 2013-03-15 | 2014-09-17 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Electron gun arrangement |
| JP6463361B2 (ja) | 2013-09-08 | 2019-01-30 | コディアック サイエンシーズ インコーポレイテッドＫｏｄｉａｋ Ｓｃｉｅｎｃｅｓ Ｉｎｃ． | 第ｖｉｉｉ因子両性イオンポリマーコンジュゲート |
| JP7068117B2 (ja) * | 2018-09-18 | 2022-05-16 | 株式会社日立ハイテク | 荷電粒子線装置 |
| EP3716313A1 (en) * | 2019-03-28 | 2020-09-30 | ASML Netherlands B.V. | Aperture array with integrated current measurement |
| JP7666536B2 (ja) | 2023-02-07 | 2025-04-22 | 株式会社セガ | プログラム及び情報処理装置 |
| JP2025012959A (ja) | 2023-07-14 | 2025-01-24 | 前澤給装工業株式会社 | 止水栓操作ハンドル |
-
2021
- 2021-10-19 WO PCT/JP2021/038557 patent/WO2023067681A1/ja not_active Ceased
- 2021-10-19 KR KR1020247008071A patent/KR102934426B1/ko active Active
- 2021-10-19 JP JP2023554112A patent/JP7730916B2/ja active Active
- 2021-10-19 US US18/691,071 patent/US12469665B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5012959A (https=) * | 1973-04-13 | 1975-02-10 | ||
| JPS50100964A (https=) * | 1974-01-07 | 1975-08-11 | ||
| JPS57165944A (en) * | 1981-04-06 | 1982-10-13 | Jeol Ltd | Dallying method for emitter |
| JP2007073521A (ja) * | 2005-09-05 | 2007-03-22 | Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | 荷電粒子ビーム照射デバイス及び荷電粒子ビーム照射デバイスを動作させるための方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US12469665B2 (en) | 2025-11-11 |
| US20240379318A1 (en) | 2024-11-14 |
| KR102934426B1 (ko) | 2026-03-06 |
| JP7730916B2 (ja) | 2025-08-28 |
| WO2023067681A1 (ja) | 2023-04-27 |
| KR20240043795A (ko) | 2024-04-03 |
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