JPS5012959A - - Google Patents
Info
- Publication number
- JPS5012959A JPS5012959A JP48041281A JP4128173A JPS5012959A JP S5012959 A JPS5012959 A JP S5012959A JP 48041281 A JP48041281 A JP 48041281A JP 4128173 A JP4128173 A JP 4128173A JP S5012959 A JPS5012959 A JP S5012959A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06308—Thermionic sources
- H01J2237/06316—Schottky emission
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48041281A JPS5012959A (https=) | 1973-04-13 | 1973-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48041281A JPS5012959A (https=) | 1973-04-13 | 1973-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5012959A true JPS5012959A (https=) | 1975-02-10 |
Family
ID=12604050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48041281A Pending JPS5012959A (https=) | 1973-04-13 | 1973-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5012959A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2023067681A1 (https=) * | 2021-10-19 | 2023-04-27 |
-
1973
- 1973-04-13 JP JP48041281A patent/JPS5012959A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2023067681A1 (https=) * | 2021-10-19 | 2023-04-27 | ||
| WO2023067681A1 (ja) * | 2021-10-19 | 2023-04-27 | 株式会社日立ハイテク | 荷電粒子線装置 |
| US12469665B2 (en) | 2021-10-19 | 2025-11-11 | Hitachi High-Tech Corporation | Charged particle beam device |