JPWO2023053840A1 - - Google Patents

Info

Publication number
JPWO2023053840A1
JPWO2023053840A1 JP2023550489A JP2023550489A JPWO2023053840A1 JP WO2023053840 A1 JPWO2023053840 A1 JP WO2023053840A1 JP 2023550489 A JP2023550489 A JP 2023550489A JP 2023550489 A JP2023550489 A JP 2023550489A JP WO2023053840 A1 JPWO2023053840 A1 JP WO2023053840A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2023550489A
Other languages
Japanese (ja)
Other versions
JPWO2023053840A5 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023053840A1 publication Critical patent/JPWO2023053840A1/ja
Publication of JPWO2023053840A5 publication Critical patent/JPWO2023053840A5/ja
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP2023550489A 2021-09-28 2022-09-01 Abandoned JPWO2023053840A1 (cg-RX-API-DMAC7.html)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021158222 2021-09-28
PCT/JP2022/033041 WO2023053840A1 (ja) 2021-09-28 2022-09-01 光走査装置

Publications (2)

Publication Number Publication Date
JPWO2023053840A1 true JPWO2023053840A1 (cg-RX-API-DMAC7.html) 2023-04-06
JPWO2023053840A5 JPWO2023053840A5 (cg-RX-API-DMAC7.html) 2024-06-17

Family

ID=85780630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023550489A Abandoned JPWO2023053840A1 (cg-RX-API-DMAC7.html) 2021-09-28 2022-09-01

Country Status (5)

Country Link
US (1) US20240219710A1 (cg-RX-API-DMAC7.html)
EP (1) EP4411451A4 (cg-RX-API-DMAC7.html)
JP (1) JPWO2023053840A1 (cg-RX-API-DMAC7.html)
CN (1) CN118020011A (cg-RX-API-DMAC7.html)
WO (1) WO2023053840A1 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7481099B2 (ja) * 2019-09-11 2024-05-10 浜松ホトニクス株式会社 光走査システムの製造方法、光走査装置の製造方法及びデータ取得方法

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133519A (ja) * 1982-12-10 1984-07-31 トムソン―セーエスエフ 線状物体の表面域を環状に加熱する装置
JPH08288120A (ja) * 1995-02-14 1996-11-01 Toshiba Corp 静磁界発生磁石及びｍｒｉシステム
JP2002148536A (ja) * 2000-11-09 2002-05-22 Olympus Optical Co Ltd アクチュエータおよびその駆動方法
JP2008116678A (ja) * 2006-11-02 2008-05-22 Sony Corp 表示装置及び表示方法
JP2011112744A (ja) * 2009-11-25 2011-06-09 Ricoh Co Ltd ビームピッチ調整方法、光走査装置および画像形成装置
JP2012118125A (ja) * 2010-11-29 2012-06-21 Ricoh Co Ltd 光走査装置及びその駆動方法。
US20120236379A1 (en) * 2010-08-23 2012-09-20 Lighttime, Llc Ladar using mems scanning
JP2013179085A (ja) * 2008-01-30 2013-09-09 Seiko Epson Corp リフレクタ、光源装置及びプロジェクタ
JP2015141372A (ja) * 2014-01-30 2015-08-03 株式会社ミツトヨ 照射装置、照射方法、測定装置、及び測定方法
JP2017173622A (ja) * 2016-03-24 2017-09-28 パイオニア株式会社 揺動体装置の制御装置
JP2019020698A (ja) * 2017-07-21 2019-02-07 浜松ホトニクス株式会社 アクチュエータ装置
JP2019074375A (ja) * 2017-10-13 2019-05-16 株式会社リコー 距離測定装置、移動体、距離測定方法およびプログラム
WO2019176204A1 (ja) * 2018-03-13 2019-09-19 三菱電機株式会社 光走査装置およびその制御方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03288120A (ja) * 1990-04-04 1991-12-18 Ricoh Co Ltd 走査光学装置
US7295726B1 (en) * 2003-12-02 2007-11-13 Adriatic Research Institute Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same
DE102011004477A1 (de) 2011-02-21 2012-09-13 Carl Zeiss Ag Scanspiegelvorrichtung
US9213142B2 (en) * 2013-11-21 2015-12-15 Huawei Technologies Co., Ltd. Device and method for micro-electro-mechanical-system photonic switch
DE102019204165A1 (de) * 2019-03-26 2020-10-15 Carl Zeiss Smt Gmbh Optische anordnung und lithographieanlage

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133519A (ja) * 1982-12-10 1984-07-31 トムソン―セーエスエフ 線状物体の表面域を環状に加熱する装置
JPH08288120A (ja) * 1995-02-14 1996-11-01 Toshiba Corp 静磁界発生磁石及びｍｒｉシステム
JP2002148536A (ja) * 2000-11-09 2002-05-22 Olympus Optical Co Ltd アクチュエータおよびその駆動方法
JP2008116678A (ja) * 2006-11-02 2008-05-22 Sony Corp 表示装置及び表示方法
JP2013179085A (ja) * 2008-01-30 2013-09-09 Seiko Epson Corp リフレクタ、光源装置及びプロジェクタ
JP2011112744A (ja) * 2009-11-25 2011-06-09 Ricoh Co Ltd ビームピッチ調整方法、光走査装置および画像形成装置
US20120236379A1 (en) * 2010-08-23 2012-09-20 Lighttime, Llc Ladar using mems scanning
JP2012118125A (ja) * 2010-11-29 2012-06-21 Ricoh Co Ltd 光走査装置及びその駆動方法。
JP2015141372A (ja) * 2014-01-30 2015-08-03 株式会社ミツトヨ 照射装置、照射方法、測定装置、及び測定方法
JP2017173622A (ja) * 2016-03-24 2017-09-28 パイオニア株式会社 揺動体装置の制御装置
JP2019020698A (ja) * 2017-07-21 2019-02-07 浜松ホトニクス株式会社 アクチュエータ装置
JP2019074375A (ja) * 2017-10-13 2019-05-16 株式会社リコー 距離測定装置、移動体、距離測定方法およびプログラム
WO2019176204A1 (ja) * 2018-03-13 2019-09-19 三菱電機株式会社 光走査装置およびその制御方法

Also Published As

Publication number Publication date
US20240219710A1 (en) 2024-07-04
WO2023053840A1 (ja) 2023-04-06
CN118020011A (zh) 2024-05-10
EP4411451A4 (en) 2025-01-08
EP4411451A1 (en) 2024-08-07

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