JPWO2023042736A5 - - Google Patents
Download PDFInfo
- Publication number
- JPWO2023042736A5 JPWO2023042736A5 JP2023548436A JP2023548436A JPWO2023042736A5 JP WO2023042736 A5 JPWO2023042736 A5 JP WO2023042736A5 JP 2023548436 A JP2023548436 A JP 2023548436A JP 2023548436 A JP2023548436 A JP 2023548436A JP WO2023042736 A5 JPWO2023042736 A5 JP WO2023042736A5
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- substrate
- sublimation
- steps
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021150186 | 2021-09-15 | ||
| PCT/JP2022/033662 WO2023042736A1 (ja) | 2021-09-15 | 2022-09-08 | 基板の製造方法および昇華乾燥方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023042736A1 JPWO2023042736A1 (cg-RX-API-DMAC7.html) | 2023-03-23 |
| JPWO2023042736A5 true JPWO2023042736A5 (cg-RX-API-DMAC7.html) | 2024-06-05 |
Family
ID=85602156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023548436A Pending JPWO2023042736A1 (cg-RX-API-DMAC7.html) | 2021-09-15 | 2022-09-08 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20240371627A1 (cg-RX-API-DMAC7.html) |
| EP (1) | EP4404243A4 (cg-RX-API-DMAC7.html) |
| JP (1) | JPWO2023042736A1 (cg-RX-API-DMAC7.html) |
| KR (1) | KR20240067920A (cg-RX-API-DMAC7.html) |
| IL (1) | IL311467A (cg-RX-API-DMAC7.html) |
| TW (1) | TW202332994A (cg-RX-API-DMAC7.html) |
| WO (1) | WO2023042736A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2025125474A (ja) * | 2024-02-15 | 2025-08-27 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理方法、基板処理装置及び基板処理液 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5681560B2 (ja) * | 2011-05-17 | 2015-03-11 | 東京エレクトロン株式会社 | 基板乾燥方法及び基板処理装置 |
| JP6022829B2 (ja) * | 2012-07-03 | 2016-11-09 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板乾燥方法および基板乾燥装置 |
| JP6592303B2 (ja) * | 2015-08-14 | 2019-10-16 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板洗浄方法および基板洗浄装置 |
| JP7265879B2 (ja) * | 2019-02-14 | 2023-04-27 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板乾燥方法および基板処理装置 |
| KR102741585B1 (ko) * | 2019-03-19 | 2024-12-12 | 샌트랄 글래스 컴퍼니 리미티드 | 요철 패턴 건조용 조성물, 및 표면에 요철 패턴을 가지는 기판의 제조 방법 |
| JP2021150186A (ja) | 2020-03-19 | 2021-09-27 | 東芝ライテック株式会社 | 推定装置、推定システム、推定方法および推定プログラム |
-
2022
- 2022-09-08 KR KR1020247012086A patent/KR20240067920A/ko active Pending
- 2022-09-08 JP JP2023548436A patent/JPWO2023042736A1/ja active Pending
- 2022-09-08 US US18/685,849 patent/US20240371627A1/en active Pending
- 2022-09-08 IL IL311467A patent/IL311467A/en unknown
- 2022-09-08 WO PCT/JP2022/033662 patent/WO2023042736A1/ja not_active Ceased
- 2022-09-08 EP EP22869883.3A patent/EP4404243A4/en not_active Withdrawn
- 2022-09-14 TW TW111134772A patent/TW202332994A/zh unknown
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2013042094A (ja) | ウェハの洗浄方法 | |
| CN104646633B (zh) | 局部可自由伸缩的单晶叶片用复杂结构陶瓷型芯制备工艺 | |
| RU2753510C1 (ru) | Независимая свободнорасполагающаяся графеновая пленка и способ ее получения | |
| CH618361A5 (cg-RX-API-DMAC7.html) | ||
| JP2013042093A (ja) | ウェハの洗浄方法 | |
| JP2022537633A5 (cg-RX-API-DMAC7.html) | ||
| JPH08208249A (ja) | 溶融シリカガラス製品の製造方法 | |
| KR102741585B1 (ko) | 요철 패턴 건조용 조성물, 및 표면에 요철 패턴을 가지는 기판의 제조 방법 | |
| CN110299283A (zh) | 基板处理方法以及基板处理装置 | |
| CN109928780A (zh) | 一种陶瓷型芯表面惰性涂覆层的制造方法 | |
| JP2010106357A (ja) | 成膜方法及び成膜装置 | |
| CN106542515B (zh) | 一种介孔碳材料的合成方法 | |
| US1876229A (en) | Process of manufacturing hollow molded articles from solutions of filmforming cellulosic materials | |
| CN101954445A (zh) | 一种用于消失模壳型铸造的泡沫模样表面成膜方法 | |
| JP2677094B2 (ja) | 精密鋳造用ワックス模型の処理方法とその処理液及びその鋳型 | |
| Wei-ya et al. | Self-organized formation of hexagonal nanopore arrays in anodic alumina | |
| TW202332994A (zh) | 基板的製造方法及昇華乾燥方法 | |
| JPH10278056A5 (cg-RX-API-DMAC7.html) | ||
| US10814377B2 (en) | Method for casting shell dewaxing | |
| CN115502337B (zh) | 一种铸型除湿除氧的方法、装置及装置的使用方法 | |
| JPH10235664A5 (cg-RX-API-DMAC7.html) | ||
| CN222522334U (zh) | 双光热升华转印纸 | |
| US1235037A (en) | Process of ornamentation. | |
| CN105364001B (zh) | 液态金属冷却定向凝固叶片表面除锡方法 | |
| JP3151380B2 (ja) | グレーズドセラミック基板の製造方法 |