JPWO2023042450A1 - - Google Patents

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Publication number
JPWO2023042450A1
JPWO2023042450A1 JP2023548112A JP2023548112A JPWO2023042450A1 JP WO2023042450 A1 JPWO2023042450 A1 JP WO2023042450A1 JP 2023548112 A JP2023548112 A JP 2023548112A JP 2023548112 A JP2023548112 A JP 2023548112A JP WO2023042450 A1 JPWO2023042450 A1 JP WO2023042450A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023548112A
Other languages
Japanese (ja)
Other versions
JP7834422B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023042450A1 publication Critical patent/JPWO2023042450A1/ja
Application granted granted Critical
Publication of JP7834422B2 publication Critical patent/JP7834422B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/40Formation of materials, e.g. in the shape of layers or pillars of conductive or resistive materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/40Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/01Manufacture or treatment
JP2023548112A 2021-09-14 2022-03-23 半導体装置の製造方法 Active JP7834422B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021149232 2021-09-14
JP2021149232 2021-09-14
PCT/JP2022/013330 WO2023042450A1 (ja) 2021-09-14 2022-03-23 半導体装置の製造方法、半導体装置、及び半導体装置用の配線基板

Publications (2)

Publication Number Publication Date
JPWO2023042450A1 true JPWO2023042450A1 (https=) 2023-03-23
JP7834422B2 JP7834422B2 (ja) 2026-03-24

Family

ID=85601973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023548112A Active JP7834422B2 (ja) 2021-09-14 2022-03-23 半導体装置の製造方法

Country Status (2)

Country Link
JP (1) JP7834422B2 (https=)
WO (1) WO2023042450A1 (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005322858A (ja) * 2004-05-11 2005-11-17 Shinko Electric Ind Co Ltd 半導体装置の製造方法
JP2009246174A (ja) * 2008-03-31 2009-10-22 Sanyo Electric Co Ltd 半導体モジュール、半導体モジュールの製造方法、ならびに携帯機器
JP2009267409A (ja) * 2008-04-24 2009-11-12 Mutual-Pak Technology Co Ltd 集積回路デバイス用のパッケージ構造およびパッケージ方法
JP2010114243A (ja) * 2008-11-06 2010-05-20 Toppan Printing Co Ltd 半導体装置
WO2021111716A1 (ja) * 2019-12-04 2021-06-10 ソニーセミコンダクタソリューションズ株式会社 撮像装置および撮像装置の製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005322858A (ja) * 2004-05-11 2005-11-17 Shinko Electric Ind Co Ltd 半導体装置の製造方法
JP2009246174A (ja) * 2008-03-31 2009-10-22 Sanyo Electric Co Ltd 半導体モジュール、半導体モジュールの製造方法、ならびに携帯機器
JP2009267409A (ja) * 2008-04-24 2009-11-12 Mutual-Pak Technology Co Ltd 集積回路デバイス用のパッケージ構造およびパッケージ方法
JP2010114243A (ja) * 2008-11-06 2010-05-20 Toppan Printing Co Ltd 半導体装置
WO2021111716A1 (ja) * 2019-12-04 2021-06-10 ソニーセミコンダクタソリューションズ株式会社 撮像装置および撮像装置の製造方法

Also Published As

Publication number Publication date
WO2023042450A1 (ja) 2023-03-23
JP7834422B2 (ja) 2026-03-24

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