JPWO2023008532A1 - - Google Patents

Info

Publication number
JPWO2023008532A1
JPWO2023008532A1 JP2023538624A JP2023538624A JPWO2023008532A1 JP WO2023008532 A1 JPWO2023008532 A1 JP WO2023008532A1 JP 2023538624 A JP2023538624 A JP 2023538624A JP 2023538624 A JP2023538624 A JP 2023538624A JP WO2023008532 A1 JPWO2023008532 A1 JP WO2023008532A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023538624A
Other versions
JPWO2023008532A5 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023008532A1 publication Critical patent/JPWO2023008532A1/ja
Publication of JPWO2023008532A5 publication Critical patent/JPWO2023008532A5/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/064—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with boron
    • C01B21/0648—After-treatment, e.g. grinding, purification
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/10—Particle morphology extending in one dimension, e.g. needle-like
    • C01P2004/13—Nanotubes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Inorganic Chemistry (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP2023538624A 2021-07-30 2022-07-28 Pending JPWO2023008532A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021124967 2021-07-30
PCT/JP2022/029162 WO2023008532A1 (ja) 2021-07-30 2022-07-28 ペリクル膜、ペリクル、ペリクル付き露光原版、露光方法、半導体の製造方法及び液晶表示板の製造方法

Publications (2)

Publication Number Publication Date
JPWO2023008532A1 true JPWO2023008532A1 (ja) 2023-02-02
JPWO2023008532A5 JPWO2023008532A5 (ja) 2024-04-09

Family

ID=85086857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023538624A Pending JPWO2023008532A1 (ja) 2021-07-30 2022-07-28

Country Status (5)

Country Link
JP (1) JPWO2023008532A1 (ja)
KR (1) KR20240036598A (ja)
CN (1) CN117751325A (ja)
TW (1) TW202307556A (ja)
WO (1) WO2023008532A1 (ja)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5394808B2 (ja) 2009-04-22 2014-01-22 信越化学工業株式会社 リソグラフィ用ペリクルおよびその製造方法
JP6478283B2 (ja) * 2015-12-24 2019-03-06 信越化学工業株式会社 Ｅｕｖ露光用ペリクル
CN116594258A (zh) * 2016-07-05 2023-08-15 三井化学株式会社 防护膜及其组件和组件框体、组件制造方法、曝光原版、曝光装置、半导体装置的制造方法
EP3404486B1 (en) 2017-05-15 2021-07-14 IMEC vzw A method for forming a pellicle
CN110809736B (zh) * 2017-06-15 2023-10-24 Asml荷兰有限公司 表膜和表膜组件
CA3066290A1 (en) 2017-07-05 2019-01-10 National Research Council Of Canada Methods for preparing superhydrophobic nano-microscale patterned films
JP2021076620A (ja) 2018-03-14 2021-05-20 株式会社カネカ 炭素質膜を含むペリクル及び炭素質膜を含むペリクルの製造方法
US20200272047A1 (en) * 2019-02-22 2020-08-27 Applied Materials, Inc. Method of forming cnt-bnnt nanocomposite pellicle
KR102463517B1 (ko) * 2019-10-22 2022-11-09 주식회사 에스앤에스텍 질화붕소 나노튜브를 사용하는 극자외선 리소그래피용 펠리클 및 이의 제조방법

Also Published As

Publication number Publication date
KR20240036598A (ko) 2024-03-20
CN117751325A (zh) 2024-03-22
TW202307556A (zh) 2023-02-16
WO2023008532A1 (ja) 2023-02-02

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Legal Events

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A621 Written request for application examination

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Effective date: 20240110

A521 Request for written amendment filed

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Effective date: 20240326