JPWO2022239692A1 - - Google Patents

Info

Publication number
JPWO2022239692A1
JPWO2022239692A1 JP2023520987A JP2023520987A JPWO2022239692A1 JP WO2022239692 A1 JPWO2022239692 A1 JP WO2022239692A1 JP 2023520987 A JP2023520987 A JP 2023520987A JP 2023520987 A JP2023520987 A JP 2023520987A JP WO2022239692 A1 JPWO2022239692 A1 JP WO2022239692A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023520987A
Other languages
Japanese (ja)
Other versions
JPWO2022239692A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022239692A1 publication Critical patent/JPWO2022239692A1/ja
Publication of JPWO2022239692A5 publication Critical patent/JPWO2022239692A5/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00Testing or calibrating of apparatus or devices covered by the preceding groups

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
JP2023520987A 2021-05-13 2022-05-02 Pending JPWO2022239692A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021081427 2021-05-13
PCT/JP2022/019490 WO2022239692A1 (ja) 2021-05-13 2022-05-02 加速度センサ

Publications (2)

Publication Number Publication Date
JPWO2022239692A1 true JPWO2022239692A1 (https=) 2022-11-17
JPWO2022239692A5 JPWO2022239692A5 (https=) 2024-02-16

Family

ID=84028308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023520987A Pending JPWO2022239692A1 (https=) 2021-05-13 2022-05-02

Country Status (3)

Country Link
US (1) US20240061011A1 (https=)
JP (1) JPWO2022239692A1 (https=)
WO (1) WO2022239692A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20250264495A1 (en) * 2024-02-15 2025-08-21 Texas Instruments Incorporated Capacitive sensing system

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05281256A (ja) * 1992-03-31 1993-10-29 Hitachi Ltd 容量式センサ
US20090241634A1 (en) * 2008-03-28 2009-10-01 Cenk Acar Micromachined accelerometer and method with continuous self-testing
JP2011095104A (ja) * 2009-10-29 2011-05-12 Hitachi Automotive Systems Ltd 静電容量式センサ
JP2018159630A (ja) * 2017-03-23 2018-10-11 セイコーエプソン株式会社 センサー素子制御装置、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法
WO2021245993A1 (ja) * 2020-06-04 2021-12-09 パナソニックIpマネジメント株式会社 慣性力検出回路、慣性力センサ及び慣性力検出方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4032681B2 (ja) * 2001-08-27 2008-01-16 株式会社デンソー 同期検波方法及び装置並びにセンサ信号検出装置
US7287429B2 (en) * 2004-03-25 2007-10-30 Denso Corporation Capacitive acceleration sensor system
JP4534741B2 (ja) * 2004-12-10 2010-09-01 株式会社デンソー ジャイロセンサ
JP4765708B2 (ja) * 2006-03-23 2011-09-07 株式会社デンソー 容量式物理量センサ
JP4899781B2 (ja) * 2006-10-23 2012-03-21 株式会社デンソー 容量式力学量検出装置
JP6531279B2 (ja) * 2013-10-09 2019-06-19 パナソニックIpマネジメント株式会社 加速度センサ
JP6311871B2 (ja) * 2014-04-17 2018-04-18 セイコーエプソン株式会社 物理量検出用回路、物理量検出装置、物理量計測システム、電子機器、移動体及び物理量計測データ生成方法
GB2527595A (en) * 2014-06-27 2015-12-30 Atlantic Inertial Systems Ltd Accelerometers
WO2016060994A1 (en) * 2014-10-16 2016-04-21 Tula Technology, Inc. Engine error detection system
WO2016132447A1 (ja) * 2015-02-17 2016-08-25 株式会社日立製作所 加速度センサ
JP6475332B2 (ja) * 2015-07-10 2019-02-27 株式会社日立製作所 慣性センサ
US10725068B2 (en) * 2015-12-15 2020-07-28 Invensense, Inc. Identification and compensation of MEMS accelerometer errors
JP7075849B2 (ja) * 2018-08-29 2022-05-26 株式会社日立製作所 Mems静電容量型加速度センサ
EP3862757B1 (en) * 2020-02-07 2024-03-27 Atlantic Inertial Systems Limited Methods for closed loop operation of capacitive accelerometers and such capacitive accelerometers
US11307218B2 (en) * 2020-05-22 2022-04-19 Invensense, Inc. Real-time isolation of self-test and linear acceleration signals

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05281256A (ja) * 1992-03-31 1993-10-29 Hitachi Ltd 容量式センサ
US20090241634A1 (en) * 2008-03-28 2009-10-01 Cenk Acar Micromachined accelerometer and method with continuous self-testing
JP2011095104A (ja) * 2009-10-29 2011-05-12 Hitachi Automotive Systems Ltd 静電容量式センサ
JP2018159630A (ja) * 2017-03-23 2018-10-11 セイコーエプソン株式会社 センサー素子制御装置、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法
WO2021245993A1 (ja) * 2020-06-04 2021-12-09 パナソニックIpマネジメント株式会社 慣性力検出回路、慣性力センサ及び慣性力検出方法

Also Published As

Publication number Publication date
US20240061011A1 (en) 2024-02-22
WO2022239692A1 (ja) 2022-11-17

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