JPWO2022172608A1 - - Google Patents

Info

Publication number
JPWO2022172608A1
JPWO2022172608A1 JP2022581224A JP2022581224A JPWO2022172608A1 JP WO2022172608 A1 JPWO2022172608 A1 JP WO2022172608A1 JP 2022581224 A JP2022581224 A JP 2022581224A JP 2022581224 A JP2022581224 A JP 2022581224A JP WO2022172608 A1 JPWO2022172608 A1 JP WO2022172608A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022581224A
Other languages
Japanese (ja)
Other versions
JPWO2022172608A5 (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022172608A1 publication Critical patent/JPWO2022172608A1/ja
Publication of JPWO2022172608A5 publication Critical patent/JPWO2022172608A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
JP2022581224A 2021-02-12 2021-12-21 Pending JPWO2022172608A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021021026 2021-02-12
PCT/JP2021/047355 WO2022172608A1 (ja) 2021-02-12 2021-12-21 光学装置

Publications (2)

Publication Number Publication Date
JPWO2022172608A1 true JPWO2022172608A1 (zh) 2022-08-18
JPWO2022172608A5 JPWO2022172608A5 (zh) 2023-09-01

Family

ID=82838678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022581224A Pending JPWO2022172608A1 (zh) 2021-02-12 2021-12-21

Country Status (3)

Country Link
JP (1) JPWO2022172608A1 (zh)
CN (1) CN116802481A (zh)
WO (1) WO2022172608A1 (zh)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6052186A (en) * 1997-11-05 2000-04-18 Excel Precision, Inc. Dual laser system for extended heterodyne interferometry
JP2009092387A (ja) * 2007-10-03 2009-04-30 Nagasaki Univ 変位計測方法及び変位計測装置
WO2010146950A1 (ja) * 2009-06-15 2010-12-23 国立大学法人岡山大学 光点位置検出装置
JP2012127897A (ja) * 2010-12-17 2012-07-05 Hitachi Ltd 内部欠陥検査方法及びその装置
US9307159B2 (en) * 2014-03-04 2016-04-05 Panasonic Intellectual Property Management Co., Ltd. Polarization image processing apparatus
WO2015143415A1 (en) * 2014-03-21 2015-09-24 Hypermed Imaging, Inc. Compact light sensor
JP2019203867A (ja) * 2018-05-25 2019-11-28 株式会社キーエンス 共焦点変位計
WO2019230356A1 (ja) * 2018-05-31 2019-12-05 パナソニックＩｐマネジメント株式会社 学習装置、検査装置、学習方法および検査方法
JP7159017B2 (ja) * 2018-11-22 2022-10-24 Dmg森精機株式会社 変位検出装置

Also Published As

Publication number Publication date
WO2022172608A1 (ja) 2022-08-18
CN116802481A (zh) 2023-09-22

Similar Documents

Publication Publication Date Title
BR112023005462A2 (zh)
BR112021014123A2 (zh)
BR112022009896A2 (zh)
BR112022024743A2 (zh)
BR102021018859A2 (zh)
BR102021015500A2 (zh)
BR102021007058A2 (zh)
BR102020022030A2 (zh)
JPWO2022172608A1 (zh)
BR102021020147A2 (zh)
BR102021018926A2 (zh)
BR102021018167A2 (zh)
BR102021017576A2 (zh)
BR102021016837A2 (zh)
BR102021016551A2 (zh)
BR102021016375A2 (zh)
BR102021016200A2 (zh)
BR102021016176A2 (zh)
BR102021015566A2 (zh)
BR102021015450A8 (zh)
BR102021015220A2 (zh)
BR102021015247A2 (zh)
BR102021014044A2 (zh)
BR102021014056A2 (zh)
BR102021013929A2 (zh)

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230614

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230614

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240507