JPWO2022138050A5 - - Google Patents
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- Publication number
- JPWO2022138050A5 JPWO2022138050A5 JP2022572048A JP2022572048A JPWO2022138050A5 JP WO2022138050 A5 JPWO2022138050 A5 JP WO2022138050A5 JP 2022572048 A JP2022572048 A JP 2022572048A JP 2022572048 A JP2022572048 A JP 2022572048A JP WO2022138050 A5 JPWO2022138050 A5 JP WO2022138050A5
- Authority
- JP
- Japan
- Prior art keywords
- pillars
- detection sensor
- radiation detection
- semiconductor substrate
- sensor according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020214604 | 2020-12-24 | ||
PCT/JP2021/044286 WO2022138050A1 (ja) | 2020-12-24 | 2021-12-02 | 放射線検出センサおよび放射線イメージ検出器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2022138050A1 JPWO2022138050A1 (zh) | 2022-06-30 |
JPWO2022138050A5 true JPWO2022138050A5 (zh) | 2023-11-13 |
Family
ID=82159486
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022572048A Pending JPWO2022138050A1 (zh) | 2020-12-24 | 2021-12-02 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPWO2022138050A1 (zh) |
WO (1) | WO2022138050A1 (zh) |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08247843A (ja) * | 1995-03-09 | 1996-09-27 | Nikon Corp | 焦電型赤外線固体撮像装置およびその製造方法 |
JP2002368231A (ja) * | 2001-06-08 | 2002-12-20 | Sanyo Electric Co Ltd | 半導体装置及びその製造方法 |
AU2003254876A1 (en) * | 2002-08-09 | 2004-03-11 | Hamamatsu Photonics K.K. | Photodiode array, production method therefor, and radiation detector |
US6969897B2 (en) * | 2002-12-10 | 2005-11-29 | Kim Ii John | Optoelectronic devices employing fibers for light collection and emission |
JP2005217188A (ja) * | 2004-01-29 | 2005-08-11 | Hamamatsu Photonics Kk | 半導体光検出装置及び製造方法 |
US7663288B2 (en) * | 2005-08-25 | 2010-02-16 | Cornell Research Foundation, Inc. | Betavoltaic cell |
US7525170B2 (en) * | 2006-10-04 | 2009-04-28 | International Business Machines Corporation | Pillar P-i-n semiconductor diodes |
US9478685B2 (en) * | 2014-06-23 | 2016-10-25 | Zena Technologies, Inc. | Vertical pillar structured infrared detector and fabrication method for the same |
US9645262B2 (en) * | 2014-11-26 | 2017-05-09 | Lawrence Livermore National Security, Llc | Capacitance reduction for pillar structured devices |
-
2021
- 2021-12-02 JP JP2022572048A patent/JPWO2022138050A1/ja active Pending
- 2021-12-02 WO PCT/JP2021/044286 patent/WO2022138050A1/ja active Application Filing
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