JPWO2022138050A5 - - Google Patents

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Publication number
JPWO2022138050A5
JPWO2022138050A5 JP2022572048A JP2022572048A JPWO2022138050A5 JP WO2022138050 A5 JPWO2022138050 A5 JP WO2022138050A5 JP 2022572048 A JP2022572048 A JP 2022572048A JP 2022572048 A JP2022572048 A JP 2022572048A JP WO2022138050 A5 JPWO2022138050 A5 JP WO2022138050A5
Authority
JP
Japan
Prior art keywords
pillars
detection sensor
radiation detection
semiconductor substrate
sensor according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022572048A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2022138050A1 (zh
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2021/044286 external-priority patent/WO2022138050A1/ja
Publication of JPWO2022138050A1 publication Critical patent/JPWO2022138050A1/ja
Publication of JPWO2022138050A5 publication Critical patent/JPWO2022138050A5/ja
Pending legal-status Critical Current

Links

JP2022572048A 2020-12-24 2021-12-02 Pending JPWO2022138050A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020214604 2020-12-24
PCT/JP2021/044286 WO2022138050A1 (ja) 2020-12-24 2021-12-02 放射線検出センサおよび放射線イメージ検出器

Publications (2)

Publication Number Publication Date
JPWO2022138050A1 JPWO2022138050A1 (zh) 2022-06-30
JPWO2022138050A5 true JPWO2022138050A5 (zh) 2023-11-13

Family

ID=82159486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022572048A Pending JPWO2022138050A1 (zh) 2020-12-24 2021-12-02

Country Status (2)

Country Link
JP (1) JPWO2022138050A1 (zh)
WO (1) WO2022138050A1 (zh)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08247843A (ja) * 1995-03-09 1996-09-27 Nikon Corp 焦電型赤外線固体撮像装置およびその製造方法
JP2002368231A (ja) * 2001-06-08 2002-12-20 Sanyo Electric Co Ltd 半導体装置及びその製造方法
AU2003254876A1 (en) * 2002-08-09 2004-03-11 Hamamatsu Photonics K.K. Photodiode array, production method therefor, and radiation detector
US6969897B2 (en) * 2002-12-10 2005-11-29 Kim Ii John Optoelectronic devices employing fibers for light collection and emission
JP2005217188A (ja) * 2004-01-29 2005-08-11 Hamamatsu Photonics Kk 半導体光検出装置及び製造方法
US7663288B2 (en) * 2005-08-25 2010-02-16 Cornell Research Foundation, Inc. Betavoltaic cell
US7525170B2 (en) * 2006-10-04 2009-04-28 International Business Machines Corporation Pillar P-i-n semiconductor diodes
US9478685B2 (en) * 2014-06-23 2016-10-25 Zena Technologies, Inc. Vertical pillar structured infrared detector and fabrication method for the same
US9645262B2 (en) * 2014-11-26 2017-05-09 Lawrence Livermore National Security, Llc Capacitance reduction for pillar structured devices

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