JPWO2022113814A5 - - Google Patents
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- JPWO2022113814A5 JPWO2022113814A5 JP2022565246A JP2022565246A JPWO2022113814A5 JP WO2022113814 A5 JPWO2022113814 A5 JP WO2022113814A5 JP 2022565246 A JP2022565246 A JP 2022565246A JP 2022565246 A JP2022565246 A JP 2022565246A JP WO2022113814 A5 JPWO2022113814 A5 JP WO2022113814A5
- Authority
- JP
- Japan
- Prior art keywords
- mol
- less
- alicyclic structure
- structural unit
- fluorine content
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025175364A JP2026010128A (ja) | 2020-11-27 | 2025-10-17 | オニウム塩化合物 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020197128 | 2020-11-27 | ||
| JP2020197128 | 2020-11-27 | ||
| PCT/JP2021/042017 WO2022113814A1 (ja) | 2020-11-27 | 2021-11-16 | 感放射線性樹脂組成物、パターン形成方法及びオニウム塩化合物 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025175364A Division JP2026010128A (ja) | 2020-11-27 | 2025-10-17 | オニウム塩化合物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2022113814A1 JPWO2022113814A1 (https=) | 2022-06-02 |
| JPWO2022113814A5 true JPWO2022113814A5 (https=) | 2024-08-13 |
| JP7783563B2 JP7783563B2 (ja) | 2025-12-10 |
Family
ID=81755988
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022565246A Active JP7783563B2 (ja) | 2020-11-27 | 2021-11-16 | 感放射線性樹脂組成物、パターン形成方法及びオニウム塩化合物 |
| JP2025175364A Pending JP2026010128A (ja) | 2020-11-27 | 2025-10-17 | オニウム塩化合物 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025175364A Pending JP2026010128A (ja) | 2020-11-27 | 2025-10-17 | オニウム塩化合物 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20230400765A1 (https=) |
| JP (2) | JP7783563B2 (https=) |
| KR (1) | KR20230112612A (https=) |
| TW (1) | TW202222780A (https=) |
| WO (1) | WO2022113814A1 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7058711B1 (ja) * | 2020-12-16 | 2022-04-22 | 東京応化工業株式会社 | レジスト組成物及びレジストパターン形成方法 |
| CN119768738A (zh) * | 2022-11-30 | 2025-04-04 | Jsr株式会社 | 感放射线性树脂组合物、图案形成方法及感放射线性酸产生剂 |
| JP2024151446A (ja) * | 2023-04-12 | 2024-10-25 | 信越化学工業株式会社 | オニウム塩、レジスト組成物、及びパターン形成方法 |
| JP2024162626A (ja) * | 2023-05-11 | 2024-11-21 | 信越化学工業株式会社 | 化学増幅ポジ型レジスト組成物及びレジストパターン形成方法 |
| JP2024162628A (ja) * | 2023-05-11 | 2024-11-21 | 信越化学工業株式会社 | 化学増幅ネガ型レジスト組成物及びレジストパターン形成方法 |
| JP2025027210A (ja) * | 2023-08-14 | 2025-02-27 | 信越化学工業株式会社 | オニウム塩、化学増幅レジスト組成物及びパターン形成方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5525968U (https=) | 1978-08-08 | 1980-02-20 | ||
| JP5903840B2 (ja) | 2010-12-06 | 2016-04-13 | 住友化学株式会社 | 塩及びレジスト組成物 |
| JP5821543B2 (ja) * | 2010-12-06 | 2015-11-24 | 住友化学株式会社 | 塩及びレジスト組成物 |
| KR101960596B1 (ko) | 2016-06-28 | 2019-07-15 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 레지스트 재료 및 패턴 형성 방법 |
| JP6645464B2 (ja) | 2017-03-17 | 2020-02-14 | 信越化学工業株式会社 | レジスト材料及びパターン形成方法 |
| JP6927176B2 (ja) | 2017-10-16 | 2021-08-25 | 信越化学工業株式会社 | レジスト材料及びパターン形成方法 |
-
2021
- 2021-11-02 TW TW110140814A patent/TW202222780A/zh unknown
- 2021-11-16 WO PCT/JP2021/042017 patent/WO2022113814A1/ja not_active Ceased
- 2021-11-16 JP JP2022565246A patent/JP7783563B2/ja active Active
- 2021-11-16 KR KR1020237014588A patent/KR20230112612A/ko active Pending
-
2023
- 2023-05-18 US US18/198,971 patent/US20230400765A1/en active Pending
-
2025
- 2025-10-17 JP JP2025175364A patent/JP2026010128A/ja active Pending
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