JPWO2022102096A1 - - Google Patents

Info

Publication number
JPWO2022102096A1
JPWO2022102096A1 JP2021544638A JP2021544638A JPWO2022102096A1 JP WO2022102096 A1 JPWO2022102096 A1 JP WO2022102096A1 JP 2021544638 A JP2021544638 A JP 2021544638A JP 2021544638 A JP2021544638 A JP 2021544638A JP WO2022102096 A1 JPWO2022102096 A1 JP WO2022102096A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021544638A
Other versions
JP6942908B1 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of JP6942908B1 publication Critical patent/JP6942908B1/ja
Publication of JPWO2022102096A1 publication Critical patent/JPWO2022102096A1/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/78—Means for handling the parts to be joined, e.g. for making containers or hollow articles, e.g. means for handling sheets, plates, web-like materials, tubular articles, hollow articles or elements to be joined therewith; Means for discharging the joined articles from the joining apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2021544638A 2020-11-13 2020-11-13 ワーク粘着チャック装置及びワーク貼り合わせ機 Active JP6942908B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/042490 WO2022102096A1 (ja) 2020-11-13 2020-11-13 ワーク粘着チャック装置及びワーク貼り合わせ機

Publications (2)

Publication Number Publication Date
JP6942908B1 JP6942908B1 (ja) 2021-09-29
JPWO2022102096A1 true JPWO2022102096A1 (ja) 2022-05-19

Family

ID=77847088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021544638A Active JP6942908B1 (ja) 2020-11-13 2020-11-13 ワーク粘着チャック装置及びワーク貼り合わせ機

Country Status (5)

Country Link
JP (1) JP6942908B1 (ja)
KR (1) KR102592800B1 (ja)
CN (1) CN115552322B (ja)
TW (1) TWI766810B (ja)
WO (1) WO2022102096A1 (ja)

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7351300B2 (en) * 2001-08-22 2008-04-01 Semiconductor Energy Laboratory Co., Ltd. Peeling method and method of manufacturing semiconductor device
JP2006276669A (ja) * 2005-03-30 2006-10-12 Shin-Etsu Engineering Co Ltd 粘着チャック装置及びそれを備えた基板貼り合わせ機
JP4125776B1 (ja) * 2007-01-31 2008-07-30 信越エンジニアリング株式会社 粘着チャック装置
US20090273796A1 (en) * 2008-04-30 2009-11-05 Kodak Graphic Communications Canada Company Peeling imaged media from a substrate
JP2010126342A (ja) 2008-12-01 2010-06-10 Advanced Display Process Engineering Co Ltd 基板チャック及びこれを有する基板合着装置
KR101066603B1 (ko) * 2009-01-20 2011-09-22 에이피시스템 주식회사 기판 지지 유닛 및 이를 구비하는 기판 접합 장치
JP4785995B1 (ja) * 2011-02-28 2011-10-05 信越エンジニアリング株式会社 ワーク粘着チャック装置及びワーク貼り合わせ機
JP5395313B1 (ja) * 2012-12-25 2014-01-22 信越エンジニアリング株式会社 アクチュエータ及び粘着チャック装置
WO2014109018A1 (ja) * 2013-01-09 2014-07-17 信越エンジニアリング株式会社 ワーク粘着チャック装置及びワーク貼り合わせ機
JP6080647B2 (ja) * 2013-03-28 2017-02-15 株式会社Ｓｃｒｅｅｎホールディングス 剥離装置
JP5422767B1 (ja) * 2013-05-09 2014-02-19 信越エンジニアリング株式会社 貼り合わせ分離方法及び分離装置
JP6268483B2 (ja) * 2014-06-03 2018-01-31 旭硝子株式会社 積層体の剥離装置及び剥離方法並びに電子デバイスの製造方法
JP5837247B1 (ja) * 2015-03-31 2015-12-24 株式会社日立製作所 基板組立装置とそれを用いた基板組立方法
JP7320932B2 (ja) * 2017-11-10 2023-08-04 芝浦メカトロニクス株式会社 成膜装置及び部品剥離装置
JP7146457B2 (ja) * 2018-05-31 2022-10-04 日東電工株式会社 粘着テープ剥離方法および粘着テープ剥離装置

Also Published As

Publication number Publication date
JP6942908B1 (ja) 2021-09-29
TWI766810B (zh) 2022-06-01
KR102592800B1 (ko) 2023-10-20
TW202218965A (zh) 2022-05-16
CN115552322B (zh) 2024-05-31
KR20220139412A (ko) 2022-10-14
CN115552322A (zh) 2022-12-30
WO2022102096A1 (ja) 2022-05-19

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