JPWO2022092060A1 - - Google Patents

Info

Publication number
JPWO2022092060A1
JPWO2022092060A1 JP2022559143A JP2022559143A JPWO2022092060A1 JP WO2022092060 A1 JPWO2022092060 A1 JP WO2022092060A1 JP 2022559143 A JP2022559143 A JP 2022559143A JP 2022559143 A JP2022559143 A JP 2022559143A JP WO2022092060 A1 JPWO2022092060 A1 JP WO2022092060A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022559143A
Other languages
Japanese (ja)
Other versions
JPWO2022092060A5 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022092060A1 publication Critical patent/JPWO2022092060A1/ja
Publication of JPWO2022092060A5 publication Critical patent/JPWO2022092060A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Lenses (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2022559143A 2020-11-02 2021-10-26 Pending JPWO2022092060A1 (enrdf_load_stackoverflow)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020183795 2020-11-02
PCT/JP2021/039424 WO2022092060A1 (ja) 2020-11-02 2021-10-26 Ｘ線光学装置

Publications (2)

Publication Number Publication Date
JPWO2022092060A1 true JPWO2022092060A1 (enrdf_load_stackoverflow) 2022-05-05
JPWO2022092060A5 JPWO2022092060A5 (enrdf_load_stackoverflow) 2024-10-30

Family

ID=81381490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022559143A Pending JPWO2022092060A1 (enrdf_load_stackoverflow) 2020-11-02 2021-10-26

Country Status (2)

Country Link
JP (1) JPWO2022092060A1 (enrdf_load_stackoverflow)
WO (1) WO2022092060A1 (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5512759A (en) * 1995-06-06 1996-04-30 Sweatt; William C. Condenser for illuminating a ringfield camera with synchrotron emission light
JP2004158786A (ja) * 2002-11-08 2004-06-03 Canon Inc 投影光学系及び露光装置
US20110141446A1 (en) * 2009-11-26 2011-06-16 Carl Zeiss Smt Gmbh Projection objective
WO2017051890A1 (ja) * 2015-09-25 2017-03-30 国立大学法人大阪大学 Ｘ線顕微鏡

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997016833A1 (en) * 1995-10-31 1997-05-09 Regents Of The University Of Colorado Spherical mirror grazing incidence x-ray optics
JPH09500453A (ja) * 1994-05-11 1997-01-14 ザ・リージェンツ・オブ・ザ・ユニバーシティ・オブ・コロラド 球面ミラーかすめ入射ｘ線光学系
JPH08271697A (ja) * 1995-03-28 1996-10-18 Canon Inc Ｘ線顕微鏡用光学装置
FR2788136B1 (fr) * 1998-12-31 2002-06-07 Europ De Systemes Optiques Soc Procede de realisation de surfaces de focalisation de faisceaux, notamment a incidence rasante et dispositif pour sa mise en oeuvre
JP6048867B2 (ja) * 2012-04-17 2016-12-21 国立大学法人大阪大学 Ｘ線光学システム
JP7314068B2 (ja) * 2020-01-24 2023-07-25 キオクシア株式会社 撮像装置、画像生成装置及び撮像方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5512759A (en) * 1995-06-06 1996-04-30 Sweatt; William C. Condenser for illuminating a ringfield camera with synchrotron emission light
JP2004158786A (ja) * 2002-11-08 2004-06-03 Canon Inc 投影光学系及び露光装置
US20110141446A1 (en) * 2009-11-26 2011-06-16 Carl Zeiss Smt Gmbh Projection objective
WO2017051890A1 (ja) * 2015-09-25 2017-03-30 国立大学法人大阪大学 Ｘ線顕微鏡

Also Published As

Publication number Publication date
WO2022092060A1 (ja) 2022-05-05

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