JPWO2021261288A1 - - Google Patents

Info

Publication number
JPWO2021261288A1
JPWO2021261288A1 JP2022531764A JP2022531764A JPWO2021261288A1 JP WO2021261288 A1 JPWO2021261288 A1 JP WO2021261288A1 JP 2022531764 A JP2022531764 A JP 2022531764A JP 2022531764 A JP2022531764 A JP 2022531764A JP WO2021261288 A1 JPWO2021261288 A1 JP WO2021261288A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022531764A
Other versions
JPWO2021261288A5 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021261288A1 publication Critical patent/JPWO2021261288A1/ja
Publication of JPWO2021261288A5 publication Critical patent/JPWO2021261288A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0416—Connectors, terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
JP2022531764A 2020-06-22 2021-06-11 Pending JPWO2021261288A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020106767 2020-06-22
PCT/JP2021/022250 WO2021261288A1 (ja) 2020-06-22 2021-06-11 検査装置

Publications (2)

Publication Number Publication Date
JPWO2021261288A1 true JPWO2021261288A1 (ja) 2021-12-30
JPWO2021261288A5 JPWO2021261288A5 (ja) 2023-03-03

Family

ID=79187495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022531764A Pending JPWO2021261288A1 (ja) 2020-06-22 2021-06-11

Country Status (5)

Country Link
US (1) US20230236223A1 (ja)
JP (1) JPWO2021261288A1 (ja)
CN (2) CN113900005A (ja)
TW (1) TW202202859A (ja)
WO (1) WO2021261288A1 (ja)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4921344B2 (ja) * 2007-12-26 2012-04-25 株式会社ヨコオ 検査ソケット
JP2010237133A (ja) * 2009-03-31 2010-10-21 Yokowo Co Ltd 検査ソケットおよびその製法
JP5960383B2 (ja) * 2010-06-01 2016-08-02 スリーエム イノベイティブ プロパティズ カンパニー 接触子ホルダ
JP6157047B2 (ja) * 2011-02-01 2017-07-05 スリーエム イノベイティブ プロパティズ カンパニー Ｉｃデバイス用ソケット
US8912810B2 (en) * 2011-09-09 2014-12-16 Texas Instruments Incorporated Contactor with multi-pin device contacts
KR101534778B1 (ko) * 2014-01-24 2015-07-09 리노공업주식회사 검사장치
JP6436711B2 (ja) * 2014-10-01 2018-12-12 日本発條株式会社 プローブユニット
KR101920822B1 (ko) * 2017-04-21 2019-02-13 리노공업주식회사 프로브 소켓

Also Published As

Publication number Publication date
CN113900005A (zh) 2022-01-07
WO2021261288A1 (ja) 2021-12-30
US20230236223A1 (en) 2023-07-27
TW202202859A (zh) 2022-01-16
CN216646721U (zh) 2022-05-31

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Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230113

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20240515