JPWO2021220508A1 - - Google Patents

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Publication number
JPWO2021220508A1
JPWO2021220508A1 JP2022518575A JP2022518575A JPWO2021220508A1 JP WO2021220508 A1 JPWO2021220508 A1 JP WO2021220508A1 JP 2022518575 A JP2022518575 A JP 2022518575A JP 2022518575 A JP2022518575 A JP 2022518575A JP WO2021220508 A1 JPWO2021220508 A1 JP WO2021220508A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022518575A
Other versions
JP7387880B2 (ja
JPWO2021220508A5 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021220508A1 publication Critical patent/JPWO2021220508A1/ja
Publication of JPWO2021220508A5 publication Critical patent/JPWO2021220508A5/ja
Application granted granted Critical
Publication of JP7387880B2 publication Critical patent/JP7387880B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3005—Observing the objects or the point of impact on the object
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/286—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising
    • G01N2001/2873—Cutting or cleaving
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2007—Holding mechanisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/208—Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3174—Etching microareas
    • H01J2237/31745—Etching microareas for preparing specimen to be viewed in microscopes or analyzed in microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31749—Focused ion beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
JP2022518575A 2020-05-01 2020-05-01 ピンセット、搬送装置および試料片の搬送方法 Active JP7387880B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/018422 WO2021220508A1 (ja) 2020-05-01 2020-05-01 ピンセット、搬送装置および試料片の搬送方法

Publications (3)

Publication Number Publication Date
JPWO2021220508A1 true JPWO2021220508A1 (ja) 2021-11-04
JPWO2021220508A5 JPWO2021220508A5 (ja) 2023-02-24
JP7387880B2 JP7387880B2 (ja) 2023-11-28

Family

ID=78373529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022518575A Active JP7387880B2 (ja) 2020-05-01 2020-05-01 ピンセット、搬送装置および試料片の搬送方法

Country Status (5)

Country Link
US (1) US20230268156A1 (ja)
JP (1) JP7387880B2 (ja)
KR (1) KR20220158808A (ja)
TW (1) TWI771948B (ja)
WO (1) WO2021220508A1 (ja)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003311435A (ja) * 2002-04-22 2003-11-05 Hitachi High-Technologies Corp イオンビームによる穴埋め方法、イオンビーム加工・観察装置、及び電子部品の製造方法
JP2006120391A (ja) * 2004-10-20 2006-05-11 Sii Nanotechnology Inc Ｍｅｍｓで作製する常閉型微小サンプルホルダ
JP2007506981A (ja) * 2003-09-23 2007-03-22 ザイベックス コーポレーション Ｆｉｂで調製した試料を把持する素子を使用した顕微鏡検査のための方法、システム、および装置
JP2009133833A (ja) * 2007-11-06 2009-06-18 Sii Nanotechnology Inc 透過電子顕微鏡用試料作製方法及び透過電子顕微鏡用試料片
JP2009210330A (ja) * 2008-03-03 2009-09-17 Hitachi High-Technologies Corp 微細試料ハンドリング装置
JP2010190808A (ja) * 2009-02-20 2010-09-02 Sii Nanotechnology Inc 集束イオンビーム装置、及びそれを用いた試料の加工方法
CN205514976U (zh) * 2016-01-27 2016-08-31 首都医科大学附属北京口腔医院 一种口腔正畸科用多功能镊子
CN206399720U (zh) * 2017-01-11 2017-08-11 三峡大学 一种用于超小尺寸易碎试样的打磨夹持工具
CN206548598U (zh) * 2016-10-28 2017-10-13 胡晓予 一种便于夹持组织的电凝镊

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3547143B2 (ja) 1997-07-22 2004-07-28 株式会社日立製作所 試料作製方法
US7849515B2 (en) * 2004-11-22 2010-12-07 National University Corporation Kagawa University Nanotweezer and scanning probe microscope equipped with nanotweezer
JP5135516B2 (ja) 2008-03-10 2013-02-06 エスアイアイ・ナノテクノロジー株式会社 薄片試料作製方法
JP2009216534A (ja) 2008-03-11 2009-09-24 Jeol Ltd 薄膜試料作製方法
CN202592239U (zh) * 2012-05-28 2012-12-12 上海华力微电子有限公司 一种夹取碳膜铜网的专用镊子
US9040908B2 (en) * 2013-06-28 2015-05-26 Fei Company Plan view sample preparation
JP2017094412A (ja) * 2015-11-19 2017-06-01 日東電工株式会社 部品把持具

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003311435A (ja) * 2002-04-22 2003-11-05 Hitachi High-Technologies Corp イオンビームによる穴埋め方法、イオンビーム加工・観察装置、及び電子部品の製造方法
JP2007506981A (ja) * 2003-09-23 2007-03-22 ザイベックス コーポレーション Ｆｉｂで調製した試料を把持する素子を使用した顕微鏡検査のための方法、システム、および装置
JP2006120391A (ja) * 2004-10-20 2006-05-11 Sii Nanotechnology Inc Ｍｅｍｓで作製する常閉型微小サンプルホルダ
JP2009133833A (ja) * 2007-11-06 2009-06-18 Sii Nanotechnology Inc 透過電子顕微鏡用試料作製方法及び透過電子顕微鏡用試料片
JP2009210330A (ja) * 2008-03-03 2009-09-17 Hitachi High-Technologies Corp 微細試料ハンドリング装置
JP2010190808A (ja) * 2009-02-20 2010-09-02 Sii Nanotechnology Inc 集束イオンビーム装置、及びそれを用いた試料の加工方法
CN205514976U (zh) * 2016-01-27 2016-08-31 首都医科大学附属北京口腔医院 一种口腔正畸科用多功能镊子
CN206548598U (zh) * 2016-10-28 2017-10-13 胡晓予 一种便于夹持组织的电凝镊
CN206399720U (zh) * 2017-01-11 2017-08-11 三峡大学 一种用于超小尺寸易碎试样的打磨夹持工具

Also Published As

Publication number Publication date
KR20220158808A (ko) 2022-12-01
WO2021220508A1 (ja) 2021-11-04
US20230268156A1 (en) 2023-08-24
TWI771948B (zh) 2022-07-21
JP7387880B2 (ja) 2023-11-28
TW202142917A (zh) 2021-11-16

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