JPWO2021210128A1 - - Google Patents

Info

Publication number
JPWO2021210128A1
JPWO2021210128A1 JP2022514948A JP2022514948A JPWO2021210128A1 JP WO2021210128 A1 JPWO2021210128 A1 JP WO2021210128A1 JP 2022514948 A JP2022514948 A JP 2022514948A JP 2022514948 A JP2022514948 A JP 2022514948A JP WO2021210128 A1 JPWO2021210128 A1 JP WO2021210128A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022514948A
Other versions
JP7332792B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021210128A1 publication Critical patent/JPWO2021210128A1/ja
Application granted granted Critical
Publication of JP7332792B2 publication Critical patent/JP7332792B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/521—Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/60—Analysis of geometric attributes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Geometry (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2022514948A 2020-04-16 2020-04-16 測定装置、検査装置、表面実装機 Active JP7332792B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/016720 WO2021210128A1 (ja) 2020-04-16 2020-04-16 測定装置、検査装置、表面実装機

Publications (2)

Publication Number Publication Date
JPWO2021210128A1 true JPWO2021210128A1 (ja) 2021-10-21
JP7332792B2 JP7332792B2 (ja) 2023-08-23

Family

ID=78083576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022514948A Active JP7332792B2 (ja) 2020-04-16 2020-04-16 測定装置、検査装置、表面実装機

Country Status (6)

Country Link
US (1) US12031810B2 (ja)
JP (1) JP7332792B2 (ja)
KR (1) KR20220106839A (ja)
CN (1) CN114930119B (ja)
DE (1) DE112020005971T5 (ja)
WO (1) WO2021210128A1 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005249684A (ja) * 2004-03-05 2005-09-15 Ym Systems Kk ３次元形状測定装置、３次元形状測定方法および３次元形状測定プログラム
JP2010281665A (ja) * 2009-06-04 2010-12-16 Yamaha Motor Co Ltd 位相シフト画像撮像装置、部品移載装置および位相シフト画像撮像方法
JP2020038074A (ja) * 2018-09-03 2020-03-12 セイコーエプソン株式会社 三次元計測装置、ロボットおよびロボットシステム

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4744610B2 (ja) * 2009-01-20 2011-08-10 シーケーディ株式会社 三次元計測装置
TWI426296B (zh) * 2009-06-19 2014-02-11 Ind Tech Res Inst 利用光學偏極特性之三維顯微共焦量測系統與方法
JP5709009B2 (ja) * 2011-11-17 2015-04-30 Ckd株式会社 三次元計測装置
JP5780659B2 (ja) * 2013-06-13 2015-09-16 ヤマハ発動機株式会社 ３次元形状測定装置
KR101465996B1 (ko) * 2014-05-14 2014-11-27 주식회사 미르기술 선택적 큰 주기를 이용한 고속 3차원 형상 측정 방법
JP5957575B1 (ja) * 2015-06-12 2016-07-27 Ckd株式会社 三次元計測装置
KR101766468B1 (ko) * 2015-09-02 2017-08-09 주식회사 미르기술 트리플 주파수 패턴을 이용한 3차원 형상 측정 방법
JP2017125707A (ja) * 2016-01-12 2017-07-20 キヤノン株式会社 計測方法および計測装置
JP6673266B2 (ja) 2017-03-08 2020-03-25 オムロン株式会社 相互反射検出装置、相互反射検出方法、およびプログラム
JP6894280B2 (ja) * 2017-04-10 2021-06-30 株式会社サキコーポレーション 検査方法及び検査装置
CN110514143B (zh) * 2019-08-09 2021-05-07 南京理工大学 一种基于反射镜的条纹投影系统标定方法
TWI724594B (zh) * 2019-10-29 2021-04-11 鑑微科技股份有限公司 三維形貌測量裝置
US20230273015A1 (en) * 2020-02-21 2023-08-31 Hamamatsu Photonics K.K. Three-dimensional measurement device, light source device, and light receiving and emitting module

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005249684A (ja) * 2004-03-05 2005-09-15 Ym Systems Kk ３次元形状測定装置、３次元形状測定方法および３次元形状測定プログラム
JP2010281665A (ja) * 2009-06-04 2010-12-16 Yamaha Motor Co Ltd 位相シフト画像撮像装置、部品移載装置および位相シフト画像撮像方法
JP2020038074A (ja) * 2018-09-03 2020-03-12 セイコーエプソン株式会社 三次元計測装置、ロボットおよびロボットシステム

Also Published As

Publication number Publication date
US12031810B2 (en) 2024-07-09
KR20220106839A (ko) 2022-07-29
US20230080582A1 (en) 2023-03-16
WO2021210128A1 (ja) 2021-10-21
DE112020005971T5 (de) 2022-09-15
JP7332792B2 (ja) 2023-08-23
CN114930119B (zh) 2024-07-12
CN114930119A (zh) 2022-08-19

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