JPWO2021188857A5 - - Google Patents
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- Publication number
- JPWO2021188857A5 JPWO2021188857A5 JP2022555058A JP2022555058A JPWO2021188857A5 JP WO2021188857 A5 JPWO2021188857 A5 JP WO2021188857A5 JP 2022555058 A JP2022555058 A JP 2022555058A JP 2022555058 A JP2022555058 A JP 2022555058A JP WO2021188857 A5 JPWO2021188857 A5 JP WO2021188857A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate processing
- processing system
- conductor
- circuit
- connector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 37
- 239000004020 conductor Substances 0.000 claims description 35
- 239000003990 capacitor Substances 0.000 claims description 23
- 238000005259 measurement Methods 0.000 claims description 13
- 239000003985 ceramic capacitor Substances 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202062991960P | 2020-03-19 | 2020-03-19 | |
| US62/991,960 | 2020-03-19 | ||
| PCT/US2021/023081 WO2021188857A1 (fr) | 2020-03-19 | 2021-03-19 | Circuit de mesure de référence rf pour système d'attaque directe fournissant de l'énergie pour générer un plasma dans un système de traitement de substrat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023518201A JP2023518201A (ja) | 2023-04-28 |
| JPWO2021188857A5 true JPWO2021188857A5 (fr) | 2024-03-19 |
Family
ID=77772203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022555058A Pending JP2023518201A (ja) | 2020-03-19 | 2021-03-19 | 基板処理システムにおいてプラズマを生成するために電力を供給する直接駆動システム用のｒｆ基準測定回路 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20230113683A1 (fr) |
| JP (1) | JP2023518201A (fr) |
| KR (1) | KR20220154804A (fr) |
| CN (1) | CN115298799A (fr) |
| TW (1) | TW202215481A (fr) |
| WO (1) | WO2021188857A1 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20230411119A1 (en) * | 2022-06-17 | 2023-12-21 | Applied Materials, Inc. | Smart dynamic load simulator for rf power delivery control system |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6781317B1 (en) * | 2003-02-24 | 2004-08-24 | Applied Science And Technology, Inc. | Methods and apparatus for calibration and metrology for an integrated RF generator system |
| US20080179948A1 (en) * | 2005-10-31 | 2008-07-31 | Mks Instruments, Inc. | Radio frequency power delivery system |
| US9544987B2 (en) * | 2014-06-30 | 2017-01-10 | Advanced Energy Industries, Inc. | Frequency tuning for pulsed radio frequency plasma processing |
| KR101770720B1 (ko) * | 2015-11-12 | 2017-08-23 | 세메스 주식회사 | 전력 공급 장치, 전압 데이터 캘리브레이션 방법, 및 그를 이용하는 기판 처리 장치 |
| US11120971B2 (en) * | 2017-07-10 | 2021-09-14 | Reno Technologies, Inc. | Diagnostics for impedance matching network |
-
2021
- 2021-03-18 TW TW110109735A patent/TW202215481A/zh unknown
- 2021-03-19 CN CN202180022911.2A patent/CN115298799A/zh active Pending
- 2021-03-19 WO PCT/US2021/023081 patent/WO2021188857A1/fr active Application Filing
- 2021-03-19 KR KR1020227036121A patent/KR20220154804A/ko active Search and Examination
- 2021-03-19 US US17/910,785 patent/US20230113683A1/en active Pending
- 2021-03-19 JP JP2022555058A patent/JP2023518201A/ja active Pending
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