JPWO2021181511A1 - - Google Patents

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Publication number
JPWO2021181511A1
JPWO2021181511A1 JP2020552927A JP2020552927A JPWO2021181511A1 JP WO2021181511 A1 JPWO2021181511 A1 JP WO2021181511A1 JP 2020552927 A JP2020552927 A JP 2020552927A JP 2020552927 A JP2020552927 A JP 2020552927A JP WO2021181511 A1 JPWO2021181511 A1 JP WO2021181511A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2020552927A
Other languages
Japanese (ja)
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JP6808114B1 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of JP6808114B1 publication Critical patent/JP6808114B1/ja
Publication of JPWO2021181511A1 publication Critical patent/JPWO2021181511A1/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/1307Stabilisation of the phase
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/08004Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13Stabilisation of laser output parameters, e.g. frequency or amplitude
JP2020552927A 2020-03-10 2020-03-10 波長変換レーザ装置および波長変換レーザ加工機 Active JP6808114B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/010211 WO2021181511A1 (ja) 2020-03-10 2020-03-10 波長変換レーザ装置および波長変換レーザ加工機

Publications (2)

Publication Number Publication Date
JP6808114B1 JP6808114B1 (ja) 2021-01-06
JPWO2021181511A1 true JPWO2021181511A1 (zh) 2021-09-16

Family

ID=73992852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020552927A Active JP6808114B1 (ja) 2020-03-10 2020-03-10 波長変換レーザ装置および波長変換レーザ加工機

Country Status (5)

Country Link
JP (1) JP6808114B1 (zh)
KR (1) KR102528248B1 (zh)
CN (1) CN115210973B (zh)
TW (1) TWI761081B (zh)
WO (1) WO2021181511A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7214056B1 (ja) * 2022-04-21 2023-01-27 三菱電機株式会社 レーザ装置およびレーザ加工機
CN115609162B (zh) * 2022-12-19 2023-03-07 扬州艾镭激光设备有限公司 一种自动调高式激光打标机
JP7459410B1 (ja) 2023-10-24 2024-04-01 三菱電機株式会社 レーザ装置およびレーザ加工装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2685923B2 (ja) * 1989-10-04 1997-12-08 株式会社東芝 レーザ共振器
JP3234052B2 (ja) * 1993-06-30 2001-12-04 株式会社東芝 レーザ波長変換装置
WO2005022705A2 (en) * 1997-03-21 2005-03-10 Imra America, Inc. High energy optical fiber amplifier for picosecond-nanosecond pulses for advanced material processing applications
JP2001144356A (ja) * 1999-11-11 2001-05-25 Ushio Sogo Gijutsu Kenkyusho:Kk 高調波レーザ光の発生方法およびレーザ装置
JP2001350166A (ja) * 2000-06-09 2001-12-21 Ishikawajima Harima Heavy Ind Co Ltd 不可視波長領域レーザ光の光軸位置調整方法
JP3452057B2 (ja) * 2001-12-21 2003-09-29 株式会社ニコン レーザ光の高調波発生装置、及びそれを用いた露光装置、並びにレーザ光の高調波発生方法、及びそれを用いた露光方法、それを用いたデバイス製造方法
TWI221102B (en) * 2002-08-30 2004-09-21 Sumitomo Heavy Industries Laser material processing method and processing device
CN101461105A (zh) * 2006-05-31 2009-06-17 彩覇阳光株式会社 激光脉冲发生装置和方法以及激光加工装置和方法
DE102011011734B4 (de) * 2011-02-10 2014-12-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung, Anordnung und Verfahren zur Interferenzstrukturierung von flächigen Proben
DE102012207220A1 (de) * 2012-04-30 2013-10-31 Robert Bosch Gmbh Verfahren zur Bearbeitung eines Werkstücks mit Laserstrahlung
JP2014072506A (ja) * 2012-10-02 2014-04-21 Canon Inc レーザー装置および光音響装置
JP6132426B2 (ja) 2013-03-04 2017-05-24 サイバーレーザー株式会社 レーザー装置
JP6609097B2 (ja) * 2014-10-24 2019-11-20 株式会社ミツトヨ 光共振器
JP6571943B2 (ja) * 2015-02-06 2019-09-04 スペクトロニクス株式会社 レーザ光源装置及びレーザパルス光生成方法
WO2018203483A1 (ja) * 2017-05-01 2018-11-08 スペクトロニクス株式会社 レーザ光源装置及びレーザパルス光生成方法
CN110050229B (zh) * 2017-05-17 2020-06-09 三菱电机株式会社 波长转换装置
JP2019051529A (ja) * 2017-09-13 2019-04-04 東芝メモリ株式会社 半導体製造装置
WO2020012771A1 (ja) * 2018-07-09 2020-01-16 株式会社ブイ・テクノロジー レーザ加工装置、レーザ加工方法及び成膜マスクの製造方法
US10866486B2 (en) * 2018-08-02 2020-12-15 Qioptiq Photonics Gmbh & Co. Kg Non-linear optical device with a broadened gain bandwidth

Also Published As

Publication number Publication date
CN115210973B (zh) 2023-08-01
KR102528248B1 (ko) 2023-05-03
TW202135966A (zh) 2021-10-01
JP6808114B1 (ja) 2021-01-06
TWI761081B (zh) 2022-04-11
CN115210973A (zh) 2022-10-18
KR20220124296A (ko) 2022-09-13
WO2021181511A1 (ja) 2021-09-16

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