JPWO2021156976A1 - - Google Patents

Info

Publication number
JPWO2021156976A1
JPWO2021156976A1 JP2021575160A JP2021575160A JPWO2021156976A1 JP WO2021156976 A1 JPWO2021156976 A1 JP WO2021156976A1 JP 2021575160 A JP2021575160 A JP 2021575160A JP 2021575160 A JP2021575160 A JP 2021575160A JP WO2021156976 A1 JPWO2021156976 A1 JP WO2021156976A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021575160A
Other versions
JP7329081B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021156976A1 publication Critical patent/JPWO2021156976A1/ja
Application granted granted Critical
Publication of JP7329081B2 publication Critical patent/JP7329081B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/222—Image processing arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/263—Contrast, resolution or power of penetration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24495—Signal processing, e.g. mixing of two or more signals
JP2021575160A 2020-02-05 2020-02-05 計測システム、および荷電粒子線装置のパラメータ設定方法 Active JP7329081B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/004385 WO2021156976A1 (ja) 2020-02-05 2020-02-05 計測システム、および荷電粒子線装置のパラメータ設定方法

Publications (2)

Publication Number Publication Date
JPWO2021156976A1 true JPWO2021156976A1 (ja) 2021-08-12
JP7329081B2 JP7329081B2 (ja) 2023-08-17

Family

ID=77199223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021575160A Active JP7329081B2 (ja) 2020-02-05 2020-02-05 計測システム、および荷電粒子線装置のパラメータ設定方法

Country Status (5)

Country Link
US (1) US20230059414A1 (ja)
JP (1) JP7329081B2 (ja)
KR (1) KR20220119122A (ja)
TW (1) TWI765483B (ja)
WO (1) WO2021156976A1 (ja)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5659172A (en) * 1995-06-21 1997-08-19 Opal Technologies Ltd. Reliable defect detection using multiple perspective scanning electron microscope images
JP2005026192A (ja) * 2003-07-03 2005-01-27 Hitachi High-Technologies Corp 荷電粒子ビーム装置
JP2007329081A (ja) * 2006-06-09 2007-12-20 Hitachi High-Technologies Corp 荷電粒子線装置、及びそれを制御するためのプログラム
JP2013168215A (ja) * 2012-02-14 2013-08-29 Hitachi High-Technologies Corp 荷電粒子線装置
WO2018138875A1 (ja) * 2017-01-27 2018-08-02 株式会社 日立ハイテクノロジーズ 荷電粒子線装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018106832A (ja) * 2016-12-22 2018-07-05 株式会社日立ハイテクサイエンス 荷電粒子ビーム装置、及び制御方法
JP6909487B2 (ja) * 2017-03-28 2021-07-28 株式会社日立ハイテクサイエンス 携帯型情報端末、ビーム照射システム、及びプログラム

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5659172A (en) * 1995-06-21 1997-08-19 Opal Technologies Ltd. Reliable defect detection using multiple perspective scanning electron microscope images
JP2005026192A (ja) * 2003-07-03 2005-01-27 Hitachi High-Technologies Corp 荷電粒子ビーム装置
JP2007329081A (ja) * 2006-06-09 2007-12-20 Hitachi High-Technologies Corp 荷電粒子線装置、及びそれを制御するためのプログラム
JP2013168215A (ja) * 2012-02-14 2013-08-29 Hitachi High-Technologies Corp 荷電粒子線装置
WO2018138875A1 (ja) * 2017-01-27 2018-08-02 株式会社 日立ハイテクノロジーズ 荷電粒子線装置

Also Published As

Publication number Publication date
TWI765483B (zh) 2022-05-21
KR20220119122A (ko) 2022-08-26
US20230059414A1 (en) 2023-02-23
WO2021156976A1 (ja) 2021-08-12
TW202131375A (zh) 2021-08-16
JP7329081B2 (ja) 2023-08-17

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