JPWO2021136771A5 - - Google Patents
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- JPWO2021136771A5 JPWO2021136771A5 JP2022539408A JP2022539408A JPWO2021136771A5 JP WO2021136771 A5 JPWO2021136771 A5 JP WO2021136771A5 JP 2022539408 A JP2022539408 A JP 2022539408A JP 2022539408 A JP2022539408 A JP 2022539408A JP WO2021136771 A5 JPWO2021136771 A5 JP WO2021136771A5
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- 238000000333 X-ray scattering Methods 0.000 claims description 59
- 230000003287 optical effect Effects 0.000 claims description 38
- 238000011144 upstream manufacturing Methods 0.000 claims description 28
- 238000003780 insertion Methods 0.000 claims description 7
- 230000037431 insertion Effects 0.000 claims description 7
- 230000007246 mechanism Effects 0.000 claims description 4
- 230000008602 contraction Effects 0.000 claims description 3
- 239000000523 sample Substances 0.000 description 116
- 238000000235 small-angle X-ray scattering Methods 0.000 description 46
- 238000004736 wide-angle X-ray diffraction Methods 0.000 description 37
- 238000005259 measurement Methods 0.000 description 32
- 238000003384 imaging method Methods 0.000 description 22
- 238000012512 characterization method Methods 0.000 description 9
- 238000002491 ultra-small angle X-ray scattering Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000011161 development Methods 0.000 description 4
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- 238000000034 method Methods 0.000 description 4
- 239000002086 nanomaterial Substances 0.000 description 4
- 238000013519 translation Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000001341 grazing-angle X-ray diffraction Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 238000009304 pastoral farming Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000007779 soft material Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000004279 X-ray Guinier Methods 0.000 description 1
- 238000005162 X-ray Laue diffraction Methods 0.000 description 1
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- 238000001654 grazing-incidence X-ray scattering Methods 0.000 description 1
- 238000012625 in-situ measurement Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
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- 238000012423 maintenance Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
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- 239000011733 molybdenum Substances 0.000 description 1
- 239000002114 nanocomposite Substances 0.000 description 1
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- 229920000642 polymer Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000000634 powder X-ray diffraction Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP19290126.2A EP3845891B1 (de) | 2019-12-30 | 2019-12-30 | Röntgenstrahlstreuungsvorrichtung |
| EP19290126.2 | 2019-12-30 | ||
| EP20197189.2A EP3845892B1 (de) | 2019-12-30 | 2020-09-21 | Röntgenstrahlstreuungsvorrichtung |
| EP20197189.2 | 2020-09-21 | ||
| PCT/EP2020/087964 WO2021136771A1 (en) | 2019-12-30 | 2020-12-29 | X-ray scattering apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023512424A JP2023512424A (ja) | 2023-03-27 |
| JPWO2021136771A5 true JPWO2021136771A5 (de) | 2023-12-20 |
Family
ID=69467290
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022539408A Pending JP2023512424A (ja) | 2019-12-30 | 2020-12-29 | Ｘ線散乱装置 |
| JP2022539650A Pending JP2023512899A (ja) | 2019-12-30 | 2020-12-29 | Ｘ線散乱装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022539650A Pending JP2023512899A (ja) | 2019-12-30 | 2020-12-29 | Ｘ線散乱装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US11835474B2 (de) |
| EP (2) | EP3845891B1 (de) |
| JP (2) | JP2023512424A (de) |
| CN (2) | CN114222916A (de) |
| WO (2) | WO2021136774A1 (de) |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5245648A (en) | 1991-04-05 | 1993-09-14 | The United States Of America As Represented By The United States Department Of Energy | X-ray tomographic image magnification process, system and apparatus therefor |
| JP3271426B2 (ja) * | 1994-05-09 | 2002-04-02 | 石川島播磨重工業株式会社 | 放射光ビームライン装置 |
| JP3697246B2 (ja) | 2003-03-26 | 2005-09-21 | 株式会社リガク | Ｘ線回折装置 |
| US7120228B2 (en) * | 2004-09-21 | 2006-10-10 | Jordan Valley Applied Radiation Ltd. | Combined X-ray reflectometer and diffractometer |
| GB0500536D0 (en) * | 2005-01-12 | 2005-02-16 | Koninkl Philips Electronics Nv | Coherent scatter computer tomography material identification |
| US9778213B2 (en) * | 2013-08-19 | 2017-10-03 | Kla-Tencor Corporation | Metrology tool with combined XRF and SAXS capabilities |
| FR3023001A1 (fr) * | 2014-06-30 | 2016-01-01 | Commissariat Energie Atomique | Procede d'analyse d'un objet en deux temps utilisant un rayonnement en transmission puis un spectre en diffusion. |
| GB201421837D0 (en) * | 2014-12-09 | 2015-01-21 | Reishig Peter | A method of generating a fingerprint for a gemstone using X-ray imaging |
| DE102015226101A1 (de) * | 2015-12-18 | 2017-06-22 | Bruker Axs Gmbh | Röntgenoptik-Baugruppe mit Umschaltsystem für drei Strahlpfade und zugehöriges Röntgendiffraktometer |
| EP3246695B1 (de) * | 2016-05-20 | 2020-12-16 | Xenocs SAS | Röntgenstrahlstreuungsvorrichtung |
| EP3541285B1 (de) * | 2016-11-16 | 2020-06-24 | Koninklijke Philips N.V. | Vorrichtung zur erzeugung von mehrfachenergiedaten aus phasenkontrastbildgebungsdaten |
| US10707051B2 (en) * | 2018-05-14 | 2020-07-07 | Gatan, Inc. | Cathodoluminescence optical hub |
-
2019
- 2019-12-30 EP EP19290126.2A patent/EP3845891B1/de active Active
-
2020
- 2020-09-21 EP EP20197189.2A patent/EP3845892B1/de active Active
- 2020-12-29 US US17/783,183 patent/US11835474B2/en active Active
- 2020-12-29 CN CN202080057746.XA patent/CN114222916A/zh active Pending
- 2020-12-29 WO PCT/EP2020/087969 patent/WO2021136774A1/en active Application Filing
- 2020-12-29 JP JP2022539408A patent/JP2023512424A/ja active Pending
- 2020-12-29 WO PCT/EP2020/087964 patent/WO2021136771A1/en active Application Filing
- 2020-12-29 US US17/621,005 patent/US11796485B2/en active Active
- 2020-12-29 JP JP2022539650A patent/JP2023512899A/ja active Pending
- 2020-12-29 CN CN202080094499.0A patent/CN115053125A/zh active Pending
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