JPWO2021125010A1 - - Google Patents
Info
- Publication number
- JPWO2021125010A1 JPWO2021125010A1 JP2021565514A JP2021565514A JPWO2021125010A1 JP WO2021125010 A1 JPWO2021125010 A1 JP WO2021125010A1 JP 2021565514 A JP2021565514 A JP 2021565514A JP 2021565514 A JP2021565514 A JP 2021565514A JP WO2021125010 A1 JPWO2021125010 A1 JP WO2021125010A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019226381 | 2019-12-16 | ||
| JP2019226381 | 2019-12-16 | ||
| PCT/JP2020/045834 WO2021125010A1 (ja) | 2019-12-16 | 2020-12-09 | 立体像観察方法及びこれに用いる試料グリッド |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021125010A1 true JPWO2021125010A1 (de) | 2021-06-24 |
| JPWO2021125010A5 JPWO2021125010A5 (de) | 2022-07-14 |
| JP7304098B2 JP7304098B2 (ja) | 2023-07-06 |
Family
ID=76477509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021565514A Active JP7304098B2 (ja) | 2019-12-16 | 2020-12-09 | 立体像観察方法及びこれに用いる試料グリッド |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7304098B2 (de) |
| WO (1) | WO2021125010A1 (de) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006184202A (ja) * | 2004-12-28 | 2006-07-13 | Nissan Arc Ltd | 立体観察装置及び立体観察方法 |
| JP2006244742A (ja) * | 2005-03-01 | 2006-09-14 | Seiko Epson Corp | 電子顕微鏡試料支持用マイクログリッド及び電子顕微鏡試料の作製方法 |
| JP2011023349A (ja) * | 2009-07-13 | 2011-02-03 | Fei Co | 試料の検査方法 |
| JP2011129443A (ja) * | 2009-12-21 | 2011-06-30 | Jeol Ltd | グリッドを用いた試料ホルダ |
| JP2011228283A (ja) * | 2010-04-14 | 2011-11-10 | Beijing Funate Innovation Technology Co Ltd | 透過型電子顕微鏡グリッドの製造方法 |
| WO2017179145A1 (ja) * | 2016-04-13 | 2017-10-19 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置および試料ホルダ |
-
2020
- 2020-12-09 JP JP2021565514A patent/JP7304098B2/ja active Active
- 2020-12-09 WO PCT/JP2020/045834 patent/WO2021125010A1/ja active Application Filing
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006184202A (ja) * | 2004-12-28 | 2006-07-13 | Nissan Arc Ltd | 立体観察装置及び立体観察方法 |
| JP2006244742A (ja) * | 2005-03-01 | 2006-09-14 | Seiko Epson Corp | 電子顕微鏡試料支持用マイクログリッド及び電子顕微鏡試料の作製方法 |
| JP2011023349A (ja) * | 2009-07-13 | 2011-02-03 | Fei Co | 試料の検査方法 |
| JP2011129443A (ja) * | 2009-12-21 | 2011-06-30 | Jeol Ltd | グリッドを用いた試料ホルダ |
| JP2011228283A (ja) * | 2010-04-14 | 2011-11-10 | Beijing Funate Innovation Technology Co Ltd | 透過型電子顕微鏡グリッドの製造方法 |
| WO2017179145A1 (ja) * | 2016-04-13 | 2017-10-19 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置および試料ホルダ |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7304098B2 (ja) | 2023-07-06 |
| WO2021125010A1 (ja) | 2021-06-24 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220425 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220516 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230613 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230619 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 7304098 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |