JPWO2021079420A1 - - Google Patents
Info
- Publication number
- JPWO2021079420A1 JPWO2021079420A1 JP2021553194A JP2021553194A JPWO2021079420A1 JP WO2021079420 A1 JPWO2021079420 A1 JP WO2021079420A1 JP 2021553194 A JP2021553194 A JP 2021553194A JP 2021553194 A JP2021553194 A JP 2021553194A JP WO2021079420 A1 JPWO2021079420 A1 JP WO2021079420A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/4645—Radiofrequency discharges
- H05H1/466—Radiofrequency discharges using capacitive coupling means, e.g. electrodes
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2019/041419 WO2021079420A1 (ja) | 2019-10-22 | 2019-10-22 | プラズマ発生装置、およびプラズマ処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2021079420A1 true JPWO2021079420A1 (US08063081-20111122-C00044.png) | 2021-04-29 |
| JP7133724B2 JP7133724B2 (ja) | 2022-09-08 |
Family
ID=75619936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021553194A Active JP7133724B2 (ja) | 2019-10-22 | 2019-10-22 | プラズマ発生装置、およびプラズマ処理方法 |
Country Status (4)
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS3621622Y1 (US08063081-20111122-C00044.png) * | 1959-02-03 | 1961-08-21 | ||
| JP2005302681A (ja) * | 2003-05-14 | 2005-10-27 | Sekisui Chem Co Ltd | プラズマ処理装置 |
| JP2015144078A (ja) * | 2014-01-31 | 2015-08-06 | 富士機械製造株式会社 | 大気圧プラズマ発生装置 |
| WO2016194138A1 (ja) * | 2015-06-02 | 2016-12-08 | 富士機械製造株式会社 | プラズマ発生装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE29911974U1 (de) | 1999-07-09 | 2000-11-23 | Agrodyn Hochspannungstechnik GmbH, 33803 Steinhagen | Plasmadüse |
| EP3197245B1 (en) * | 2014-09-16 | 2020-12-16 | FUJI Corporation | Plasma gas jetting device |
| WO2017056185A1 (ja) * | 2015-09-29 | 2017-04-06 | 富士機械製造株式会社 | プラズマ発生装置 |
| EP3432691B1 (en) * | 2016-03-14 | 2020-06-24 | Fuji Corporation | Plasma generator |
| DE102016125699A1 (de) * | 2016-12-23 | 2018-06-28 | Plasmatreat Gmbh | Düsenanordnung, Vorrichtung zur Erzeugung eines atmosphärischen Plasmastrahls, Verwendung derselben, Verfahren zur Plasmabehandlung eines Stoffs oder einer Kunststofffolie, plasmabehandelter Vliesstoff und Verwendung desselben |
| CN111480393B (zh) * | 2018-01-30 | 2023-03-21 | 株式会社富士 | 等离子体处理机 |
-
2019
- 2019-10-22 WO PCT/JP2019/041419 patent/WO2021079420A1/ja unknown
- 2019-10-22 CN CN201980101498.1A patent/CN114586473A/zh active Pending
- 2019-10-22 EP EP19950060.4A patent/EP4050973A4/en active Pending
- 2019-10-22 JP JP2021553194A patent/JP7133724B2/ja active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS3621622Y1 (US08063081-20111122-C00044.png) * | 1959-02-03 | 1961-08-21 | ||
| JP2005302681A (ja) * | 2003-05-14 | 2005-10-27 | Sekisui Chem Co Ltd | プラズマ処理装置 |
| JP2015144078A (ja) * | 2014-01-31 | 2015-08-06 | 富士機械製造株式会社 | 大気圧プラズマ発生装置 |
| WO2016194138A1 (ja) * | 2015-06-02 | 2016-12-08 | 富士機械製造株式会社 | プラズマ発生装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114586473A (zh) | 2022-06-03 |
| EP4050973A1 (en) | 2022-08-31 |
| EP4050973A4 (en) | 2022-11-09 |
| JP7133724B2 (ja) | 2022-09-08 |
| WO2021079420A1 (ja) | 2021-04-29 |
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