JPWO2021071854A5 - - Google Patents
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- JPWO2021071854A5 JPWO2021071854A5 JP2022520973A JP2022520973A JPWO2021071854A5 JP WO2021071854 A5 JPWO2021071854 A5 JP WO2021071854A5 JP 2022520973 A JP2022520973 A JP 2022520973A JP 2022520973 A JP2022520973 A JP 2022520973A JP WO2021071854 A5 JPWO2021071854 A5 JP WO2021071854A5
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201962911346P | 2019-10-06 | 2019-10-06 | |
| US62/911,346 | 2019-10-06 | ||
| PCT/US2020/054431 WO2021071854A1 (en) | 2019-10-06 | 2020-10-06 | Anomalous equipment trace detection and classification |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023501062A JP2023501062A (ja) | 2023-01-18 |
| JPWO2021071854A5 true JPWO2021071854A5 (enrdf_load_stackoverflow) | 2023-10-16 |
| JP7470784B2 JP7470784B2 (ja) | 2024-04-18 |
Family
ID=75274106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022520973A Active JP7470784B2 (ja) | 2019-10-06 | 2020-10-06 | 異常機器トレース検出および分類 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11609812B2 (enrdf_load_stackoverflow) |
| JP (1) | JP7470784B2 (enrdf_load_stackoverflow) |
| KR (1) | KR102627062B1 (enrdf_load_stackoverflow) |
| CN (1) | CN114600087A (enrdf_load_stackoverflow) |
| TW (1) | TWI841793B (enrdf_load_stackoverflow) |
| WO (1) | WO2021071854A1 (enrdf_load_stackoverflow) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11176019B2 (en) * | 2020-04-01 | 2021-11-16 | International Business Machines Corporation | Automated breakpoint creation |
| CA3216539A1 (en) * | 2021-04-14 | 2022-10-20 | Amgen Inc. | Automated outlier removal for multivariate modeling |
| CN113516174B (zh) * | 2021-06-03 | 2022-04-19 | 清华大学 | 调用链异常检测方法、计算机设备以及可读存储介质 |
| CN113807441B (zh) * | 2021-09-17 | 2023-10-27 | 长鑫存储技术有限公司 | 半导体结构制备中的异常传感器监测方法及其装置 |
| CN114519225B (zh) * | 2022-01-20 | 2024-08-30 | 南水北调中线干线工程建设管理局 | 一种鲁棒的暗渠结构应力异常识别方法及系统 |
| US11961030B2 (en) | 2022-01-27 | 2024-04-16 | Applied Materials, Inc. | Diagnostic tool to tool matching methods for manufacturing equipment |
| US12298748B2 (en) | 2022-01-27 | 2025-05-13 | Applied Materials, Inc. | Diagnostic tool to tool matching and full-trace drill-down analysis methods for manufacturing equipment |
| US12189380B2 (en) | 2022-01-27 | 2025-01-07 | Applied Materials, Inc. | Diagnostic tool to tool matching and comparative drill-down analysis methods for manufacturing equipment |
| KR102705022B1 (ko) * | 2022-11-28 | 2024-09-09 | (주)위세아이텍 | 빅데이터 플랫폼의 지속학습을 이용한 유지보수 장치 및 방법 |
| KR102723094B1 (ko) * | 2023-05-11 | 2024-10-31 | (주)빅아이 | 제품 검사장치 |
| US20250061557A1 (en) * | 2023-08-16 | 2025-02-20 | Applied Materials, Inc. | Method for image-based sensor trace analysis |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7395457B2 (en) * | 2005-06-10 | 2008-07-01 | Nec Laboratories America, Inc. | System and method for detecting faults in a system |
| JP4723466B2 (ja) | 2006-12-19 | 2011-07-13 | 三菱電機株式会社 | データ処理装置及びデータ処理方法及びプログラム |
| JP5119022B2 (ja) | 2008-03-26 | 2013-01-16 | 東京瓦斯株式会社 | 可変的予測モデル構築方法、及び、可変的予測モデル構築システム |
| US9880842B2 (en) * | 2013-03-15 | 2018-01-30 | Intel Corporation | Using control flow data structures to direct and track instruction execution |
| US9652354B2 (en) * | 2014-03-18 | 2017-05-16 | Microsoft Technology Licensing, Llc. | Unsupervised anomaly detection for arbitrary time series |
| US10430719B2 (en) | 2014-11-25 | 2019-10-01 | Stream Mosaic, Inc. | Process control techniques for semiconductor manufacturing processes |
| US11580375B2 (en) * | 2015-12-31 | 2023-02-14 | Kla-Tencor Corp. | Accelerated training of a machine learning based model for semiconductor applications |
| US10595788B2 (en) * | 2016-05-31 | 2020-03-24 | Stmicroelectronics S.R.L. | Method for the detecting electrocardiogram anomalies and corresponding system |
| US20180032905A1 (en) * | 2016-07-29 | 2018-02-01 | Appdynamics Llc | Adaptive Anomaly Grouping |
| US11023577B2 (en) | 2016-08-04 | 2021-06-01 | Adobe Inc. | Anomaly detection for time series data having arbitrary seasonality |
| KR102408426B1 (ko) * | 2016-10-12 | 2022-06-10 | 삼성에스디에스 주식회사 | 설비 노화 지수를 이용한 이상 감지 방법 및 장치 |
| KR101970619B1 (ko) * | 2017-06-28 | 2019-04-22 | 한국과학기술연구원 | 비정상 상황 검출 방법 및 이를 수행하기 위한 시스템 |
| US10656204B2 (en) | 2017-09-21 | 2020-05-19 | Pdf Solutions, Inc. | Failure detection for wire bonding in semiconductors |
| KR20190040825A (ko) * | 2017-10-11 | 2019-04-19 | 주식회사 씨세론 | 데이터 처리 방법 및 장치 |
| MY205464A (en) * | 2018-01-23 | 2024-10-22 | Yunex Gmbh | System, device and method for detecting abnormal traffic events in a geographical location |
| US11029359B2 (en) * | 2018-03-09 | 2021-06-08 | Pdf Solutions, Inc. | Failure detection and classsification using sensor data and/or measurement data |
| US10789158B2 (en) * | 2018-03-21 | 2020-09-29 | Sap Se | Adaptive monitoring of applications |
| CN108829933B (zh) * | 2018-05-22 | 2023-04-07 | 北京天泽智云科技有限公司 | 一种半导体制造设备的预测性维护与健康管理的方法 |
| US11232368B2 (en) * | 2019-02-20 | 2022-01-25 | Accenture Global Solutions Limited | System for predicting equipment failure events and optimizing manufacturing operations |
-
2020
- 2020-10-06 TW TW109134582A patent/TWI841793B/zh active
- 2020-10-06 US US17/064,422 patent/US11609812B2/en active Active
- 2020-10-06 JP JP2022520973A patent/JP7470784B2/ja active Active
- 2020-10-06 KR KR1020227014543A patent/KR102627062B1/ko active Active
- 2020-10-06 WO PCT/US2020/054431 patent/WO2021071854A1/en active Application Filing
- 2020-10-06 CN CN202080075571.5A patent/CN114600087A/zh active Pending
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