CN114600087A - 异常设备迹线检测和分类 - Google Patents

异常设备迹线检测和分类 Download PDF

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Publication number
CN114600087A
CN114600087A CN202080075571.5A CN202080075571A CN114600087A CN 114600087 A CN114600087 A CN 114600087A CN 202080075571 A CN202080075571 A CN 202080075571A CN 114600087 A CN114600087 A CN 114600087A
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China
Prior art keywords
traces
trace
anomalies
modified
feature
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CN202080075571.5A
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English (en)
Chinese (zh)
Inventor
R·伯奇
J·D·大卫
朱青
本田智纪
L·L·郑
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Pdf Decision Co
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Pdf Decision Co
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/079—Root cause analysis, i.e. error or fault diagnosis
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0706—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation the processing taking place on a specific hardware platform or in a specific software environment
    • G06F11/0736—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation the processing taking place on a specific hardware platform or in a specific software environment in functional embedded systems, i.e. in a data processing system designed as a combination of hardware and software dedicated to performing a certain function
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0751—Error or fault detection not based on redundancy
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0766—Error or fault reporting or storing
    • G06F11/0778—Dumping, i.e. gathering error/state information after a fault for later diagnosis
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/21—Design or setup of recognition systems or techniques; Extraction of features in feature space; Blind source separation
    • G06F18/211—Selection of the most significant subset of features
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G06F18/241—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/40—Software arrangements specially adapted for pattern recognition, e.g. user interfaces or toolboxes therefor
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/048—Interaction techniques based on graphical user interfaces [GUI]
    • G06F3/0481—Interaction techniques based on graphical user interfaces [GUI] based on specific properties of the displayed interaction object or a metaphor-based environment, e.g. interaction with desktop elements like windows or icons, or assisted by a cursor's changing behaviour or appearance
    • G06F3/0482—Interaction with lists of selectable items, e.g. menus
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/08—Learning methods
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N7/00—Computing arrangements based on specific mathematical models
    • G06N7/01—Probabilistic graphical models, e.g. probabilistic networks

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Data Mining & Analysis (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Biomedical Technology (AREA)
  • Software Systems (AREA)
  • Health & Medical Sciences (AREA)
  • Evolutionary Computation (AREA)
  • Artificial Intelligence (AREA)
  • Mathematical Physics (AREA)
  • Computing Systems (AREA)
  • Medical Informatics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Evolutionary Biology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Debugging And Monitoring (AREA)
CN202080075571.5A 2019-10-06 2020-10-06 异常设备迹线检测和分类 Pending CN114600087A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962911346P 2019-10-06 2019-10-06
US62/911,346 2019-10-06
PCT/US2020/054431 WO2021071854A1 (en) 2019-10-06 2020-10-06 Anomalous equipment trace detection and classification

Publications (1)

Publication Number Publication Date
CN114600087A true CN114600087A (zh) 2022-06-07

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Application Number Title Priority Date Filing Date
CN202080075571.5A Pending CN114600087A (zh) 2019-10-06 2020-10-06 异常设备迹线检测和分类

Country Status (6)

Country Link
US (1) US11609812B2 (enrdf_load_stackoverflow)
JP (1) JP7470784B2 (enrdf_load_stackoverflow)
KR (1) KR102627062B1 (enrdf_load_stackoverflow)
CN (1) CN114600087A (enrdf_load_stackoverflow)
TW (1) TWI841793B (enrdf_load_stackoverflow)
WO (1) WO2021071854A1 (enrdf_load_stackoverflow)

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CN113516174B (zh) * 2021-06-03 2022-04-19 清华大学 调用链异常检测方法、计算机设备以及可读存储介质
CN113807441B (zh) * 2021-09-17 2023-10-27 长鑫存储技术有限公司 半导体结构制备中的异常传感器监测方法及其装置
CN114519225B (zh) * 2022-01-20 2024-08-30 南水北调中线干线工程建设管理局 一种鲁棒的暗渠结构应力异常识别方法及系统
US11961030B2 (en) 2022-01-27 2024-04-16 Applied Materials, Inc. Diagnostic tool to tool matching methods for manufacturing equipment
US12298748B2 (en) 2022-01-27 2025-05-13 Applied Materials, Inc. Diagnostic tool to tool matching and full-trace drill-down analysis methods for manufacturing equipment
US12189380B2 (en) 2022-01-27 2025-01-07 Applied Materials, Inc. Diagnostic tool to tool matching and comparative drill-down analysis methods for manufacturing equipment
KR102705022B1 (ko) * 2022-11-28 2024-09-09 (주)위세아이텍 빅데이터 플랫폼의 지속학습을 이용한 유지보수 장치 및 방법
KR102723094B1 (ko) * 2023-05-11 2024-10-31 (주)빅아이 제품 검사장치
US20250061557A1 (en) * 2023-08-16 2025-02-20 Applied Materials, Inc. Method for image-based sensor trace analysis

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CN106104496A (zh) * 2014-03-18 2016-11-09 微软技术许可有限责任公司 用于任意时序的不受监督的异常检测
US20170109646A1 (en) * 2014-11-25 2017-04-20 Stream Mosaic, Inc. Process control techniques for semiconductor manufacturing processes
CN107440679A (zh) * 2016-05-31 2017-12-08 意法半导体股份有限公司 用于检测心电图异常的方法及对应系统
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Also Published As

Publication number Publication date
US20210103489A1 (en) 2021-04-08
KR102627062B1 (ko) 2024-01-18
WO2021071854A1 (en) 2021-04-15
JP2023501062A (ja) 2023-01-18
TWI841793B (zh) 2024-05-11
TW202139033A (zh) 2021-10-16
KR20220070302A (ko) 2022-05-30
US11609812B2 (en) 2023-03-21
JP7470784B2 (ja) 2024-04-18

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