JPWO2021049489A1 - - Google Patents

Info

Publication number
JPWO2021049489A1
JPWO2021049489A1 JP2021545549A JP2021545549A JPWO2021049489A1 JP WO2021049489 A1 JPWO2021049489 A1 JP WO2021049489A1 JP 2021545549 A JP2021545549 A JP 2021545549A JP 2021545549 A JP2021545549 A JP 2021545549A JP WO2021049489 A1 JPWO2021049489 A1 JP WO2021049489A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021545549A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021049489A1 publication Critical patent/JPWO2021049489A1/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07D—HETEROCYCLIC COMPOUNDS
    • C07D209/00—Heterocyclic compounds containing five-membered rings, condensed with other rings, with one nitrogen atom as the only ring hetero atom
    • C07D209/02—Heterocyclic compounds containing five-membered rings, condensed with other rings, with one nitrogen atom as the only ring hetero atom condensed with one carbocyclic ring
    • C07D209/04—Indoles; Hydrogenated indoles
    • C07D209/10—Indoles; Hydrogenated indoles with substituted hydrocarbon radicals attached to carbon atoms of the hetero ring
    • C07D209/14—Radicals substituted by nitrogen atoms, not forming part of a nitro radical
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07D—HETEROCYCLIC COMPOUNDS
    • C07D405/00—Heterocyclic compounds containing both one or more hetero rings having oxygen atoms as the only ring hetero atoms, and one or more rings having nitrogen as the only ring hetero atom
    • C07D405/02—Heterocyclic compounds containing both one or more hetero rings having oxygen atoms as the only ring hetero atoms, and one or more rings having nitrogen as the only ring hetero atom containing two hetero rings
    • C07D405/10—Heterocyclic compounds containing both one or more hetero rings having oxygen atoms as the only ring hetero atoms, and one or more rings having nitrogen as the only ring hetero atom containing two hetero rings linked by a carbon chain containing aromatic rings
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Materials For Photolithography (AREA)
JP2021545549A 2019-09-10 2020-09-08 Pending JPWO2021049489A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019164900 2019-09-10
PCT/JP2020/033955 WO2021049489A1 (ja) 2019-09-10 2020-09-08 化合物、酸発生剤、組成物、硬化物及びパターン、並びに硬化物及びパターンの製造方法

Publications (1)

Publication Number Publication Date
JPWO2021049489A1 true JPWO2021049489A1 (zh) 2021-03-18

Family

ID=74866154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021545549A Pending JPWO2021049489A1 (zh) 2019-09-10 2020-09-08

Country Status (5)

Country Link
JP (1) JPWO2021049489A1 (zh)
KR (1) KR20220061910A (zh)
CN (1) CN113727971A (zh)
TW (1) TW202116731A (zh)
WO (1) WO2021049489A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022224835A1 (ja) * 2021-04-22 2022-10-27 株式会社Adeka 化合物、酸発生剤、組成物、硬化物、硬化物の製造方法、パターン及びパターンの製造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1751269A (zh) * 2003-02-19 2006-03-22 西巴特殊化学品控股有限公司 卤代肟衍生物和其作为潜在的酸的用途
WO2004074242A2 (en) * 2003-02-19 2004-09-02 Ciba Specialty Chemicals Holding Inc. Halogenated oxime derivatives and the use thereof as latent acids
KR101193824B1 (ko) * 2004-07-20 2012-10-24 시바 홀딩 인크 옥심 유도체 및 잠산으로서의 이의 용도
US8088868B2 (en) * 2006-12-19 2012-01-03 Bridgestone Corporation Polymers functionalized with protected oxime compounds
JP2010164964A (ja) * 2008-12-19 2010-07-29 Fujifilm Corp 感光性組成物、カラーフィルタ、および液晶表示装置
JP5944898B2 (ja) * 2011-07-08 2016-07-05 新日鉄住金化学株式会社 光重合開始剤、感光性組成物及び硬化物
CN103389621B (zh) * 2013-07-26 2016-03-16 常州强力先端电子材料有限公司 一种磺酸肟酯类光产酸剂
WO2015152153A1 (ja) * 2014-04-04 2015-10-08 株式会社Adeka オキシムエステル化合物及び該化合物を含有する光重合開始剤
US10030083B2 (en) * 2014-05-15 2018-07-24 Bridgestone Corporation Polymers functionalized with protected oxime compounds containing a cyano group
JP6605820B2 (ja) 2015-03-11 2019-11-13 株式会社Ａｄｅｋａ オキシムスルホネート化合物、光酸発生剤、レジスト組成物、カチオン重合開始剤、およびカチオン重合性組成物
CN108603094A (zh) 2016-01-26 2018-09-28 株式会社Adeka 热产酸剂及使用其的抗蚀剂组合物
CN107163169B (zh) * 2017-05-25 2018-08-24 同济大学 一类香豆素并咔唑型肟酯类化合物及其制备方法和应用
JP7314055B2 (ja) * 2017-12-13 2023-07-25 株式会社Adeka 化合物、潜在性塩基発生剤、該化合物を含有する感光性樹脂組成物、及び硬化物
CN110806677A (zh) * 2018-08-06 2020-02-18 常州强力先端电子材料有限公司 光致抗蚀剂组合物、其图案形成方法及应用
CN111324009A (zh) * 2018-12-13 2020-06-23 常州强力先端电子材料有限公司 光固化组合物及其应用

Also Published As

Publication number Publication date
KR20220061910A (ko) 2022-05-13
CN113727971A (zh) 2021-11-30
WO2021049489A1 (ja) 2021-03-18
TW202116731A (zh) 2021-05-01

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