JPWO2021049326A1 - - Google Patents

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Publication number
JPWO2021049326A1
JPWO2021049326A1 JP2021545215A JP2021545215A JPWO2021049326A1 JP WO2021049326 A1 JPWO2021049326 A1 JP WO2021049326A1 JP 2021545215 A JP2021545215 A JP 2021545215A JP 2021545215 A JP2021545215 A JP 2021545215A JP WO2021049326 A1 JPWO2021049326 A1 JP WO2021049326A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021545215A
Other versions
JP7444171B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021049326A1 publication Critical patent/JPWO2021049326A1/ja
Application granted granted Critical
Publication of JP7444171B2 publication Critical patent/JP7444171B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Textile Engineering (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Quality & Reliability (AREA)
  • Signal Processing (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2021545215A 2019-09-13 2020-08-28 表面欠陥判別装置、外観検査装置及びプログラム Active JP7444171B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019167576 2019-09-13
JP2019167576 2019-09-13
PCT/JP2020/032574 WO2021049326A1 (ja) 2019-09-13 2020-08-28 表面欠陥判別装置、外観検査装置及びプログラム

Publications (2)

Publication Number Publication Date
JPWO2021049326A1 true JPWO2021049326A1 (ja) 2021-03-18
JP7444171B2 JP7444171B2 (ja) 2024-03-06

Family

ID=74866162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021545215A Active JP7444171B2 (ja) 2019-09-13 2020-08-28 表面欠陥判別装置、外観検査装置及びプログラム

Country Status (4)

Country Link
JP (1) JP7444171B2 (ja)
KR (1) KR102684368B1 (ja)
CN (1) CN114364973B (ja)
WO (1) WO2021049326A1 (ja)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006194828A (ja) * 2005-01-17 2006-07-27 Mega Trade:Kk 検査装置
EP1742041A1 (de) * 2005-07-04 2007-01-10 Massen Machine Vision Systems GmbH Kostengünstige multi-sensorielle Oberflächeninspektion
JP2012521559A (ja) * 2009-03-24 2012-09-13 オルボテック・リミテッド マルチモード・イメージング
JP2015232477A (ja) * 2014-06-09 2015-12-24 株式会社キーエンス 検査装置、検査方法およびプログラム
US20160103079A1 (en) * 2013-05-23 2016-04-14 Centro Sviluppo Materiali S.P.A. Method for the surface inspection of long products and apparatus suitable for carrying out such a method
JP2017090194A (ja) * 2015-11-09 2017-05-25 大日本印刷株式会社 検査システムおよび検査方法
WO2019150693A1 (ja) * 2018-02-05 2019-08-08 株式会社Ｓｃｒｅｅｎホールディングス 画像取得装置、画像取得方法および検査装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11118450A (ja) 1997-10-14 1999-04-30 Mitsubishi Heavy Ind Ltd 液晶基板の突起欠陥検出装置
JP4190636B2 (ja) * 1998-11-24 2008-12-03 日本エレクトロセンサリデバイス株式会社 表面検査装置
JP2013246059A (ja) 2012-05-25 2013-12-09 Sharp Corp 欠陥検査装置および欠陥検査方法
JP5673621B2 (ja) * 2012-07-18 2015-02-18 オムロン株式会社 欠陥検査方法及び欠陥検査装置
JP6370177B2 (ja) * 2014-09-05 2018-08-08 株式会社Ｓｃｒｅｅｎホールディングス 検査装置および検査方法
EP3315950A4 (en) * 2015-06-25 2018-12-19 JFE Steel Corporation Surface flaw detection device, surface flaw detection method, and manufacturing method for steel material
WO2019103153A1 (ja) * 2017-11-27 2019-05-31 日本製鉄株式会社 形状検査装置及び形状検査方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006194828A (ja) * 2005-01-17 2006-07-27 Mega Trade:Kk 検査装置
EP1742041A1 (de) * 2005-07-04 2007-01-10 Massen Machine Vision Systems GmbH Kostengünstige multi-sensorielle Oberflächeninspektion
JP2012521559A (ja) * 2009-03-24 2012-09-13 オルボテック・リミテッド マルチモード・イメージング
US20160103079A1 (en) * 2013-05-23 2016-04-14 Centro Sviluppo Materiali S.P.A. Method for the surface inspection of long products and apparatus suitable for carrying out such a method
JP2015232477A (ja) * 2014-06-09 2015-12-24 株式会社キーエンス 検査装置、検査方法およびプログラム
JP2017090194A (ja) * 2015-11-09 2017-05-25 大日本印刷株式会社 検査システムおよび検査方法
WO2019150693A1 (ja) * 2018-02-05 2019-08-08 株式会社Ｓｃｒｅｅｎホールディングス 画像取得装置、画像取得方法および検査装置

Also Published As

Publication number Publication date
KR102684368B1 (ko) 2024-07-11
CN114364973B (zh) 2024-01-16
CN114364973A (zh) 2022-04-15
JP7444171B2 (ja) 2024-03-06
KR20220043219A (ko) 2022-04-05
WO2021049326A1 (ja) 2021-03-18

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