JPWO2021044934A1 - - Google Patents
Info
- Publication number
- JPWO2021044934A1 JPWO2021044934A1 JP2021543722A JP2021543722A JPWO2021044934A1 JP WO2021044934 A1 JPWO2021044934 A1 JP WO2021044934A1 JP 2021543722 A JP2021543722 A JP 2021543722A JP 2021543722 A JP2021543722 A JP 2021543722A JP WO2021044934 A1 JPWO2021044934 A1 JP WO2021044934A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/06—Circuits or algorithms therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019162391 | 2019-09-05 | ||
| PCT/JP2020/032335 WO2021044934A1 (ja) | 2019-09-05 | 2020-08-27 | 走査型プローブ顕微鏡及び走査型プローブ顕微鏡の駆動制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2021044934A1 true JPWO2021044934A1 (ko) | 2021-03-11 |
| JPWO2021044934A5 JPWO2021044934A5 (ko) | 2023-05-24 |
Family
ID=74852475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021543722A Pending JPWO2021044934A1 (ko) | 2019-09-05 | 2020-08-27 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2021044934A1 (ko) |
| WO (1) | WO2021044934A1 (ko) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4139811A (en) * | 1976-10-26 | 1979-02-13 | Xerox Corporation | Method and means for increasing the stiffness of limited frequency servo systems |
| JPH0695298B2 (ja) * | 1984-11-29 | 1994-11-24 | 石川島播磨重工業株式会社 | 電気・油圧サーボ制御装置 |
| US6189374B1 (en) * | 1999-03-29 | 2001-02-20 | Nanodevices, Inc. | Active probe for an atomic force microscope and method of use thereof |
| JP2008033567A (ja) * | 2006-07-27 | 2008-02-14 | Osaka Univ | 圧電素子の制御方法、圧電素子の制御装置、アクチュエータ、及び顕微鏡 |
-
2020
- 2020-08-27 JP JP2021543722A patent/JPWO2021044934A1/ja active Pending
- 2020-08-27 WO PCT/JP2020/032335 patent/WO2021044934A1/ja active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021044934A1 (ja) | 2021-03-11 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
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| A521 | Request for written amendment filed |
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| A521 | Request for written amendment filed |
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