JPWO2020252476A5 - - Google Patents
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- Publication number
- JPWO2020252476A5 JPWO2020252476A5 JP2022516755A JP2022516755A JPWO2020252476A5 JP WO2020252476 A5 JPWO2020252476 A5 JP WO2020252476A5 JP 2022516755 A JP2022516755 A JP 2022516755A JP 2022516755 A JP2022516755 A JP 2022516755A JP WO2020252476 A5 JPWO2020252476 A5 JP WO2020252476A5
- Authority
- JP
- Japan
- Prior art keywords
- transport
- cassette
- chamber
- lock chamber
- replaceable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962861543P | 2019-06-14 | 2019-06-14 | |
US62/861,543 | 2019-06-14 | ||
US16/899,151 | 2020-06-11 | ||
US16/899,151 US20200395232A1 (en) | 2019-06-14 | 2020-06-11 | Substrate process apparatus |
PCT/US2020/037788 WO2020252476A2 (en) | 2019-06-14 | 2020-06-15 | Substrate process apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022551815A JP2022551815A (ja) | 2022-12-14 |
JPWO2020252476A5 true JPWO2020252476A5 (zh) | 2023-02-10 |
Family
ID=73745656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022516755A Pending JP2022551815A (ja) | 2019-06-14 | 2020-06-15 | 基板処理装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20200395232A1 (zh) |
EP (1) | EP3984061A4 (zh) |
JP (1) | JP2022551815A (zh) |
TW (1) | TW202114027A (zh) |
WO (1) | WO2020252476A2 (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116888722A (zh) * | 2021-02-22 | 2023-10-13 | 瑞士艾发科技 | 真空处理设备和用于制造真空处理衬底的方法 |
US11794314B2 (en) | 2021-08-30 | 2023-10-24 | Kla Corporation | Quick swap chuck with vacuum holding interchangeable top plate |
CN114823426B (zh) * | 2022-05-26 | 2023-04-14 | 北京北方华创微电子装备有限公司 | 半导体工艺设备 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6949143B1 (en) * | 1999-12-15 | 2005-09-27 | Applied Materials, Inc. | Dual substrate loadlock process equipment |
JP3676983B2 (ja) * | 2000-03-29 | 2005-07-27 | 株式会社日立国際電気 | 半導体製造方法、基板処理方法、及び半導体製造装置 |
US6719517B2 (en) * | 2001-12-04 | 2004-04-13 | Brooks Automation | Substrate processing apparatus with independently configurable integral load locks |
US7959395B2 (en) * | 2002-07-22 | 2011-06-14 | Brooks Automation, Inc. | Substrate processing apparatus |
US7458763B2 (en) * | 2003-11-10 | 2008-12-02 | Blueshift Technologies, Inc. | Mid-entry load lock for semiconductor handling system |
KR20070044310A (ko) * | 2005-10-24 | 2007-04-27 | 삼성전자주식회사 | 반도체 소자 제조 설비 |
KR100702844B1 (ko) * | 2005-11-14 | 2007-04-03 | 삼성전자주식회사 | 로드락 챔버 및 그를 이용한 반도체 제조설비 |
US8398355B2 (en) * | 2006-05-26 | 2013-03-19 | Brooks Automation, Inc. | Linearly distributed semiconductor workpiece processing tool |
KR20100031681A (ko) * | 2007-05-18 | 2010-03-24 | 브룩스 오토메이션 인코퍼레이티드 | 빠른 교환 로봇을 가진 컴팩트 기판 운송 시스템 |
WO2008144670A1 (en) * | 2007-05-18 | 2008-11-27 | Brooks Automation, Inc. | Load lock fast pump vent |
JP6178791B2 (ja) * | 2011-09-02 | 2017-08-09 | ブルックス オートメーション インコーポレイテッド | ロボット移送装置の時間最適軌道 |
JP6582676B2 (ja) * | 2015-07-24 | 2019-10-02 | 東京エレクトロン株式会社 | ロードロック装置、及び基板処理システム |
-
2020
- 2020-06-11 US US16/899,151 patent/US20200395232A1/en active Pending
- 2020-06-12 TW TW109119899A patent/TW202114027A/zh unknown
- 2020-06-15 JP JP2022516755A patent/JP2022551815A/ja active Pending
- 2020-06-15 WO PCT/US2020/037788 patent/WO2020252476A2/en unknown
- 2020-06-15 EP EP20821578.0A patent/EP3984061A4/en active Pending
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