JPWO2020252476A5 - - Google Patents

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Publication number
JPWO2020252476A5
JPWO2020252476A5 JP2022516755A JP2022516755A JPWO2020252476A5 JP WO2020252476 A5 JPWO2020252476 A5 JP WO2020252476A5 JP 2022516755 A JP2022516755 A JP 2022516755A JP 2022516755 A JP2022516755 A JP 2022516755A JP WO2020252476 A5 JPWO2020252476 A5 JP WO2020252476A5
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JP
Japan
Prior art keywords
transport
cassette
chamber
lock chamber
replaceable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022516755A
Other languages
English (en)
Japanese (ja)
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JP2022551815A (ja
Publication date
Priority claimed from US16/899,151 external-priority patent/US20200395232A1/en
Application filed filed Critical
Publication of JP2022551815A publication Critical patent/JP2022551815A/ja
Publication of JPWO2020252476A5 publication Critical patent/JPWO2020252476A5/ja
Pending legal-status Critical Current

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JP2022516755A 2019-06-14 2020-06-15 基板処理装置 Pending JP2022551815A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201962861543P 2019-06-14 2019-06-14
US62/861,543 2019-06-14
US16/899,151 2020-06-11
US16/899,151 US20200395232A1 (en) 2019-06-14 2020-06-11 Substrate process apparatus
PCT/US2020/037788 WO2020252476A2 (en) 2019-06-14 2020-06-15 Substrate process apparatus

Publications (2)

Publication Number Publication Date
JP2022551815A JP2022551815A (ja) 2022-12-14
JPWO2020252476A5 true JPWO2020252476A5 (zh) 2023-02-10

Family

ID=73745656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022516755A Pending JP2022551815A (ja) 2019-06-14 2020-06-15 基板処理装置

Country Status (5)

Country Link
US (1) US20200395232A1 (zh)
EP (1) EP3984061A4 (zh)
JP (1) JP2022551815A (zh)
TW (1) TW202114027A (zh)
WO (1) WO2020252476A2 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116888722A (zh) * 2021-02-22 2023-10-13 瑞士艾发科技 真空处理设备和用于制造真空处理衬底的方法
US11794314B2 (en) 2021-08-30 2023-10-24 Kla Corporation Quick swap chuck with vacuum holding interchangeable top plate
CN114823426B (zh) * 2022-05-26 2023-04-14 北京北方华创微电子装备有限公司 半导体工艺设备

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6949143B1 (en) * 1999-12-15 2005-09-27 Applied Materials, Inc. Dual substrate loadlock process equipment
JP3676983B2 (ja) * 2000-03-29 2005-07-27 株式会社日立国際電気 半導体製造方法、基板処理方法、及び半導体製造装置
US6719517B2 (en) * 2001-12-04 2004-04-13 Brooks Automation Substrate processing apparatus with independently configurable integral load locks
US7959395B2 (en) * 2002-07-22 2011-06-14 Brooks Automation, Inc. Substrate processing apparatus
US7458763B2 (en) * 2003-11-10 2008-12-02 Blueshift Technologies, Inc. Mid-entry load lock for semiconductor handling system
KR20070044310A (ko) * 2005-10-24 2007-04-27 삼성전자주식회사 반도체 소자 제조 설비
KR100702844B1 (ko) * 2005-11-14 2007-04-03 삼성전자주식회사 로드락 챔버 및 그를 이용한 반도체 제조설비
US8398355B2 (en) * 2006-05-26 2013-03-19 Brooks Automation, Inc. Linearly distributed semiconductor workpiece processing tool
KR20100031681A (ko) * 2007-05-18 2010-03-24 브룩스 오토메이션 인코퍼레이티드 빠른 교환 로봇을 가진 컴팩트 기판 운송 시스템
WO2008144670A1 (en) * 2007-05-18 2008-11-27 Brooks Automation, Inc. Load lock fast pump vent
JP6178791B2 (ja) * 2011-09-02 2017-08-09 ブルックス オートメーション インコーポレイテッド ロボット移送装置の時間最適軌道
JP6582676B2 (ja) * 2015-07-24 2019-10-02 東京エレクトロン株式会社 ロードロック装置、及び基板処理システム

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