JPWO2020241488A1 - - Google Patents

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Publication number
JPWO2020241488A1
JPWO2020241488A1 JP2021522311A JP2021522311A JPWO2020241488A1 JP WO2020241488 A1 JPWO2020241488 A1 JP WO2020241488A1 JP 2021522311 A JP2021522311 A JP 2021522311A JP 2021522311 A JP2021522311 A JP 2021522311A JP WO2020241488 A1 JPWO2020241488 A1 JP WO2020241488A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021522311A
Other languages
Japanese (ja)
Other versions
JP7079042B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Publication of JPWO2020241488A1 publication Critical patent/JPWO2020241488A1/ja
Application granted granted Critical
Publication of JP7079042B2 publication Critical patent/JP7079042B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00—Arrangement of elements for electric heating in or on furnaces
    • F27D11/02—Ohmic resistance heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00—Arrangements of controlling devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens, or the like for the charge within the furnace
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/04—Circulating atmospheres by mechanical means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Furnace Details (AREA)
  • Resistance Heating (AREA)
JP2021522311A 2019-05-31 2020-05-22 加熱装置および加熱方法 Active JP7079042B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019102655 2019-05-31
JP2019102655 2019-05-31
PCT/JP2020/020284 WO2020241488A1 (fr) 2019-05-31 2020-05-22 Dispositif de chauffage et procédé de chauffage

Publications (2)

Publication Number Publication Date
JPWO2020241488A1 true JPWO2020241488A1 (fr) 2020-12-03
JP7079042B2 JP7079042B2 (ja) 2022-06-01

Family

ID=73553752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021522311A Active JP7079042B2 (ja) 2019-05-31 2020-05-22 加熱装置および加熱方法

Country Status (3)

Country Link
JP (1) JP7079042B2 (fr)
TW (1) TWI833958B (fr)
WO (1) WO2020241488A1 (fr)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS488653B1 (fr) * 1969-05-31 1973-03-16
JP3066387U (ja) * 1999-08-05 2000-02-18 昭和鉄工株式会社 多段型ガラス基板焼成炉
JP2003245591A (ja) * 2001-12-03 2003-09-02 Tokyo Ohka Kogyo Co Ltd 被膜形成装置、被膜形成方法および基板用トレイ
JP2005055152A (ja) * 2003-08-07 2005-03-03 Kyushu Nissho:Kk 加熱装置
JP2007173481A (ja) * 2005-12-21 2007-07-05 Kyushu Nissho:Kk 加熱装置
JP2011528501A (ja) * 2008-07-16 2011-11-17 株式会社テラセミコン バッチ式熱処理装置及び該装置に適用されるヒータ
JP6388041B2 (ja) * 2017-01-27 2018-09-12 株式会社九州日昌 加熱装置および加熱方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101347484B1 (ko) * 2009-06-01 2014-01-02 가부시키가이샤 알파테크 가열 수단을 구비한 배관 및 처리 시스템

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS488653B1 (fr) * 1969-05-31 1973-03-16
JP3066387U (ja) * 1999-08-05 2000-02-18 昭和鉄工株式会社 多段型ガラス基板焼成炉
JP2003245591A (ja) * 2001-12-03 2003-09-02 Tokyo Ohka Kogyo Co Ltd 被膜形成装置、被膜形成方法および基板用トレイ
JP2005055152A (ja) * 2003-08-07 2005-03-03 Kyushu Nissho:Kk 加熱装置
JP2007173481A (ja) * 2005-12-21 2007-07-05 Kyushu Nissho:Kk 加熱装置
JP2011528501A (ja) * 2008-07-16 2011-11-17 株式会社テラセミコン バッチ式熱処理装置及び該装置に適用されるヒータ
JP6388041B2 (ja) * 2017-01-27 2018-09-12 株式会社九州日昌 加熱装置および加熱方法

Also Published As

Publication number Publication date
WO2020241488A1 (fr) 2020-12-03
TWI833958B (zh) 2024-03-01
JP7079042B2 (ja) 2022-06-01
TW202111269A (zh) 2021-03-16

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