JPWO2020241488A1 - - Google Patents
Info
- Publication number
- JPWO2020241488A1 JPWO2020241488A1 JP2021522311A JP2021522311A JPWO2020241488A1 JP WO2020241488 A1 JPWO2020241488 A1 JP WO2020241488A1 JP 2021522311 A JP2021522311 A JP 2021522311A JP 2021522311 A JP2021522311 A JP 2021522311A JP WO2020241488 A1 JPWO2020241488 A1 JP WO2020241488A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D11/00—Arrangement of elements for electric heating in or on furnaces
- F27D11/02—Ohmic resistance heating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D5/00—Supports, screens, or the like for the charge within the furnace
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/04—Circulating atmospheres by mechanical means
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Furnace Details (AREA)
- Resistance Heating (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019102655 | 2019-05-31 | ||
JP2019102655 | 2019-05-31 | ||
PCT/JP2020/020284 WO2020241488A1 (fr) | 2019-05-31 | 2020-05-22 | Dispositif de chauffage et procédé de chauffage |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020241488A1 true JPWO2020241488A1 (fr) | 2020-12-03 |
JP7079042B2 JP7079042B2 (ja) | 2022-06-01 |
Family
ID=73553752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021522311A Active JP7079042B2 (ja) | 2019-05-31 | 2020-05-22 | 加熱装置および加熱方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP7079042B2 (fr) |
TW (1) | TWI833958B (fr) |
WO (1) | WO2020241488A1 (fr) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS488653B1 (fr) * | 1969-05-31 | 1973-03-16 | ||
JP3066387U (ja) * | 1999-08-05 | 2000-02-18 | 昭和鉄工株式会社 | 多段型ガラス基板焼成炉 |
JP2003245591A (ja) * | 2001-12-03 | 2003-09-02 | Tokyo Ohka Kogyo Co Ltd | 被膜形成装置、被膜形成方法および基板用トレイ |
JP2005055152A (ja) * | 2003-08-07 | 2005-03-03 | Kyushu Nissho:Kk | 加熱装置 |
JP2007173481A (ja) * | 2005-12-21 | 2007-07-05 | Kyushu Nissho:Kk | 加熱装置 |
JP2011528501A (ja) * | 2008-07-16 | 2011-11-17 | 株式会社テラセミコン | バッチ式熱処理装置及び該装置に適用されるヒータ |
JP6388041B2 (ja) * | 2017-01-27 | 2018-09-12 | 株式会社九州日昌 | 加熱装置および加熱方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101347484B1 (ko) * | 2009-06-01 | 2014-01-02 | 가부시키가이샤 알파테크 | 가열 수단을 구비한 배관 및 처리 시스템 |
-
2020
- 2020-05-22 JP JP2021522311A patent/JP7079042B2/ja active Active
- 2020-05-22 WO PCT/JP2020/020284 patent/WO2020241488A1/fr active Application Filing
- 2020-05-29 TW TW109118015A patent/TWI833958B/zh active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS488653B1 (fr) * | 1969-05-31 | 1973-03-16 | ||
JP3066387U (ja) * | 1999-08-05 | 2000-02-18 | 昭和鉄工株式会社 | 多段型ガラス基板焼成炉 |
JP2003245591A (ja) * | 2001-12-03 | 2003-09-02 | Tokyo Ohka Kogyo Co Ltd | 被膜形成装置、被膜形成方法および基板用トレイ |
JP2005055152A (ja) * | 2003-08-07 | 2005-03-03 | Kyushu Nissho:Kk | 加熱装置 |
JP2007173481A (ja) * | 2005-12-21 | 2007-07-05 | Kyushu Nissho:Kk | 加熱装置 |
JP2011528501A (ja) * | 2008-07-16 | 2011-11-17 | 株式会社テラセミコン | バッチ式熱処理装置及び該装置に適用されるヒータ |
JP6388041B2 (ja) * | 2017-01-27 | 2018-09-12 | 株式会社九州日昌 | 加熱装置および加熱方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2020241488A1 (fr) | 2020-12-03 |
TWI833958B (zh) | 2024-03-01 |
JP7079042B2 (ja) | 2022-06-01 |
TW202111269A (zh) | 2021-03-16 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20211117 |
|
A871 | Explanation of circumstances concerning accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20211117 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220201 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220302 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220414 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220513 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7079042 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |