JPWO2020217734A1 - - Google Patents

Info

Publication number
JPWO2020217734A1
JPWO2020217734A1 JP2021515854A JP2021515854A JPWO2020217734A1 JP WO2020217734 A1 JPWO2020217734 A1 JP WO2020217734A1 JP 2021515854 A JP2021515854 A JP 2021515854A JP 2021515854 A JP2021515854 A JP 2021515854A JP WO2020217734 A1 JPWO2020217734 A1 JP WO2020217734A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021515854A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2020217734A1 publication Critical patent/JPWO2020217734A1/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H10N30/878—Conductive materials the principal material being non-metallic, e.g. oxide or carbon based
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2021515854A 2019-04-24 2020-03-05 Pending JPWO2020217734A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019083070 2019-04-24
PCT/JP2020/009520 WO2020217734A1 (ja) 2019-04-24 2020-03-05 圧電体膜利用装置

Publications (1)

Publication Number Publication Date
JPWO2020217734A1 true JPWO2020217734A1 (ja) 2020-10-29

Family

ID=72942521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021515854A Pending JPWO2020217734A1 (ja) 2019-04-24 2020-03-05

Country Status (5)

Country Link
US (1) US11964483B2 (ja)
EP (1) EP3961734A4 (ja)
JP (1) JPWO2020217734A1 (ja)
CN (1) CN113711371A (ja)
WO (1) WO2020217734A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220371880A1 (en) * 2021-05-19 2022-11-24 Microsoft Technology Licensing, Llc Piezoelectric actuator stack with tapered sidewall

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1887688A4 (en) 2005-06-02 2009-08-05 Murata Manufacturing Co PIEZOELECTRIC RESONATOR AND PIEZOELECTRIC THIN-FILTER FILTER
JP4802714B2 (ja) 2006-01-10 2011-10-26 セイコーエプソン株式会社 バルク音波共振器
JP2007331199A (ja) 2006-06-14 2007-12-27 Canon Inc インクジェットヘッド
JP2008010528A (ja) * 2006-06-28 2008-01-17 Seiko Epson Corp アクチュエータ装置及び液体噴射ヘッド並びに液体噴射装置
JP4844750B2 (ja) * 2007-03-20 2011-12-28 セイコーエプソン株式会社 圧電素子、インクジェット式記録ヘッド、およびインクジェットプリンター
JP2009252757A (ja) * 2008-04-01 2009-10-29 Seiko Epson Corp 圧電素子およびその製造方法、圧電アクチュエータ、並びに、液体噴射ヘッド
JP2010100035A (ja) 2008-09-29 2010-05-06 Seiko Epson Corp 圧電素子、液体噴射ヘッド、及び、液体噴射装置
JP5541450B2 (ja) * 2010-03-16 2014-07-09 セイコーエプソン株式会社 圧電素子の製造方法
JP5743069B2 (ja) * 2011-03-15 2015-07-01 セイコーエプソン株式会社 圧電素子、液体噴射ヘッド、および液体噴射装置
JP2013016738A (ja) 2011-07-06 2013-01-24 Ricoh Co Ltd 強誘電体素子、インクジェット式記録ヘッド及びインクジェット式画像形成装置
JP6008347B2 (ja) 2012-04-05 2016-10-19 ローム株式会社 インクジェットプリントヘッドおよびその製造方法
JP2015074174A (ja) * 2013-10-09 2015-04-20 株式会社リコー 圧電素子、液滴吐出ヘッド、液滴吐出装置、画像形成装置及び圧電素子の製造方法
US10032977B2 (en) 2014-08-05 2018-07-24 Rohm Co., Ltd. Device using a piezoelectric element and method for manufacturing the same
JP6660629B2 (ja) 2014-08-05 2020-03-11 ローム株式会社 圧電素子利用装置およびその製造方法
US10115883B2 (en) * 2014-09-04 2018-10-30 Rohm Co., Ltd. Device using a piezoelectric element and method for manufacturing the same
JP6764557B2 (ja) * 2015-10-16 2020-10-07 ローム株式会社 圧電素子利用装置
JP6737361B2 (ja) 2019-02-22 2020-08-05 株式会社寺岡精工 注文入力端末、オーダリングシステム、注文入力方法、及びプログラム

Also Published As

Publication number Publication date
CN113711371A (zh) 2021-11-26
EP3961734A1 (en) 2022-03-02
WO2020217734A1 (ja) 2020-10-29
EP3961734A4 (en) 2023-06-28
US20220212469A1 (en) 2022-07-07
US11964483B2 (en) 2024-04-23

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