JPWO2020217406A1 - - Google Patents

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Publication number
JPWO2020217406A1
JPWO2020217406A1 JP2021515425A JP2021515425A JPWO2020217406A1 JP WO2020217406 A1 JPWO2020217406 A1 JP WO2020217406A1 JP 2021515425 A JP2021515425 A JP 2021515425A JP 2021515425 A JP2021515425 A JP 2021515425A JP WO2020217406 A1 JPWO2020217406 A1 JP WO2020217406A1
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021515425A
Other versions
JP7144603B2 (ja
JPWO2020217406A5 (ja
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Publication of JPWO2020217406A1 publication Critical patent/JPWO2020217406A1/ja
Publication of JPWO2020217406A5 publication Critical patent/JPWO2020217406A5/ja
Application granted granted Critical
Publication of JP7144603B2 publication Critical patent/JP7144603B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/34—Moulds, cores, or mandrels of special material, e.g. destructible materials
    • B28B7/342—Moulds, cores, or mandrels of special material, e.g. destructible materials which are at least partially destroyed, e.g. broken, molten, before demoulding; Moulding surfaces or spaces shaped by, or in, the ground, or sand or soil, whether bound or not; Cores consisting at least mainly of sand or soil, whether bound or not
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00—Producing shaped prefabricated articles from the material
    • B28B1/14—Producing shaped prefabricated articles from the material by simple casting, the material being neither forcibly fed nor positively compacted
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00—Producing shaped prefabricated articles from the material
    • B28B1/30—Producing shaped prefabricated articles from the material by applying the material on to a core or other moulding surface to form a layer thereon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00—Producing shaped prefabricated articles from the material
    • B28B1/48—Producing shaped prefabricated articles from the material by removing material from solid section preforms for forming hollow articles, e.g. by punching or boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B11/00—Apparatus or processes for treating or working the shaped or preshaped articles
    • B28B11/24—Apparatus or processes for treating or working the shaped or preshaped articles for curing, setting or hardening
    • B28B11/243—Setting, e.g. drying, dehydrating or firing ceramic articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/16—Moulds for making shaped articles with cavities or holes open to the surface, e.g. with blind holes
    • B28B7/18—Moulds for making shaped articles with cavities or holes open to the surface, e.g. with blind holes the holes passing completely through the article
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/34—Moulds, cores, or mandrels of special material, e.g. destructible materials
    • B28B7/346—Manufacture of moulds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/34—Moulds, cores, or mandrels of special material, e.g. destructible materials
    • B28B7/348—Moulds, cores, or mandrels of special material, e.g. destructible materials of plastic material or rubber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/624—Sol-gel processing
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
    • C04B35/638—Removal thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/602—Making the green bodies or pre-forms by moulding
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/602—Making the green bodies or pre-forms by moulding
    • C04B2235/6028—Shaping around a core which is removed later

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Dispersion Chemistry (AREA)
  • Moulds, Cores, Or Mandrels (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Filtering Materials (AREA)
  • Materials For Medical Uses (AREA)
  • Ceramic Products (AREA)
JP2021515425A 2019-04-25 2019-04-25 ３次元焼成体の製法 Active JP7144603B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/017718 WO2020217406A1 (ja) 2019-04-25 2019-04-25 ３次元焼成体の製法

Publications (3)

Publication Number Publication Date
JPWO2020217406A1 true JPWO2020217406A1 (ja) 2020-10-29
JPWO2020217406A5 JPWO2020217406A5 (ja) 2022-01-19
JP7144603B2 JP7144603B2 (ja) 2022-09-29

Family

ID=72941142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021515425A Active JP7144603B2 (ja) 2019-04-25 2019-04-25 ３次元焼成体の製法

Country Status (6)

Country Link
US (1) US20220032501A1 (ja)
JP (1) JP7144603B2 (ja)
KR (1) KR102541744B1 (ja)
CN (1) CN113710444B (ja)
TW (1) TWI807182B (ja)
WO (1) WO2020217406A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7569772B2 (ja) 2021-10-07 2024-10-18 日本碍子株式会社 半導体製造装置用部材
JP2024088883A (ja) 2022-12-21 2024-07-03 日本碍子株式会社 プラグ、プラグ製造方法及び半導体製造装置用部材
CN117754687A (zh) * 2024-01-23 2024-03-26 长春长光精瓷复合材料有限公司 一种具有内部连通结构的陶瓷结构件成型方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07507508A (ja) * 1992-06-05 1995-08-24 マサチユーセツツ・インステイテユート・オブ・テクノロジー 三次元印刷技法
JP2002179468A (ja) * 2000-12-13 2002-06-26 Kikusui Chemical Industries Co Ltd セラミック薄板、セラミック薄板の生成形体の成形方法及び成形装置
JP2010132487A (ja) * 2008-12-04 2010-06-17 Panasonic Corp セラミック多孔体の製造方法
JP2012209499A (ja) * 2011-03-30 2012-10-25 Ngk Insulators Ltd 静電チャックの製法及び静電チャック
WO2014157571A1 (ja) * 2013-03-29 2014-10-02 Toto株式会社 静電チャック
JP2017121806A (ja) * 2016-01-08 2017-07-13 ゼネラル・エレクトリック・カンパニイ ３ｄ印刷プロセスを使用することによって混成セラミック／金属、セラミック／セラミック体を製造するための方法
JP2018020441A (ja) * 2016-08-01 2018-02-08 株式会社オメガ 三次元形状造形物の製造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0813446B2 (ja) * 1990-05-30 1996-02-14 株式会社日立製作所 スリツプキヤステイング法
US6189483B1 (en) * 1997-05-29 2001-02-20 Applied Materials, Inc. Process kit
KR100906346B1 (ko) * 2005-08-17 2009-07-06 주식회사 코미코 세라믹 성형체의 제조방법 및 이를 이용하여 제조된 세라믹성형체
US8336891B2 (en) * 2008-03-11 2012-12-25 Ngk Insulators, Ltd. Electrostatic chuck
JP5331519B2 (ja) * 2008-03-11 2013-10-30 日本碍子株式会社 静電チャック
EP2360291A1 (de) * 2010-02-24 2011-08-24 Singulus Technologies AG Verfahren und Vorrichtung zum schnellen Heizen und Kühlen eines Substrates und sofort anschließender Beschichtung desselben unter Vakuum
KR101167838B1 (ko) * 2010-05-07 2012-07-24 한국기계연구원 탄소몰드를 이용한 금속 함침 주조품의 제조방법
CN102487029B (zh) * 2010-12-02 2014-03-19 北京北方微电子基地设备工艺研究中心有限责任公司 静电卡盘和具有它的等离子体装置
JP5890795B2 (ja) * 2013-03-18 2016-03-22 日本碍子株式会社 半導体製造装置用部材
KR101680334B1 (ko) * 2015-06-15 2016-11-29 주식회사 퓨쳐캐스트 3차원 프린팅 방식을 이용한 금형 제작방법
CN109195776A (zh) * 2016-04-14 2019-01-11 德仕托金属有限公司 具有支撑结构的增材制造
CN108101519A (zh) * 2017-12-19 2018-06-01 西安交通大学 一种用于复杂结构零件定向凝固成形的陶瓷铸型制备方法
CN108649012B (zh) * 2018-05-11 2021-10-01 北京华卓精科科技股份有限公司 新型陶瓷塞及具有该新型陶瓷塞的静电卡盘装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07507508A (ja) * 1992-06-05 1995-08-24 マサチユーセツツ・インステイテユート・オブ・テクノロジー 三次元印刷技法
JP2002179468A (ja) * 2000-12-13 2002-06-26 Kikusui Chemical Industries Co Ltd セラミック薄板、セラミック薄板の生成形体の成形方法及び成形装置
JP2010132487A (ja) * 2008-12-04 2010-06-17 Panasonic Corp セラミック多孔体の製造方法
JP2012209499A (ja) * 2011-03-30 2012-10-25 Ngk Insulators Ltd 静電チャックの製法及び静電チャック
WO2014157571A1 (ja) * 2013-03-29 2014-10-02 Toto株式会社 静電チャック
JP2017121806A (ja) * 2016-01-08 2017-07-13 ゼネラル・エレクトリック・カンパニイ ３ｄ印刷プロセスを使用することによって混成セラミック／金属、セラミック／セラミック体を製造するための方法
JP2018020441A (ja) * 2016-08-01 2018-02-08 株式会社オメガ 三次元形状造形物の製造方法

Also Published As

Publication number Publication date
WO2020217406A1 (ja) 2020-10-29
KR102541744B1 (ko) 2023-06-13
CN113710444A (zh) 2021-11-26
TWI807182B (zh) 2023-07-01
CN113710444B (zh) 2023-06-23
KR20210138086A (ko) 2021-11-18
US20220032501A1 (en) 2022-02-03
JP7144603B2 (ja) 2022-09-29
TW202043174A (zh) 2020-12-01

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