JPWO2020217395A1 - - Google Patents

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Publication number
JPWO2020217395A1
JPWO2020217395A1 JP2021515416A JP2021515416A JPWO2020217395A1 JP WO2020217395 A1 JPWO2020217395 A1 JP WO2020217395A1 JP 2021515416 A JP2021515416 A JP 2021515416A JP 2021515416 A JP2021515416 A JP 2021515416A JP WO2020217395 A1 JPWO2020217395 A1 JP WO2020217395A1
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021515416A
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JP7351335B2 (ja
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Publication of JPWO2020217395A1 publication Critical patent/JPWO2020217395A1/ja
Priority to JP2023096869A priority Critical patent/JP2023115060A/ja
Application granted granted Critical
Publication of JP7351335B2 publication Critical patent/JP7351335B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0657—Stacked arrangements of devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/18—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319—Arrangement of the layer connectors prior to mounting
    • H01L2224/83191—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on the semiconductor or solid-state body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181—Encapsulation
JP2021515416A 2019-04-25 2019-04-25 ドルメン構造を有する半導体装置及びその製造方法、支持片の製造方法、並びに、支持片形成用積層フィルム Active JP7351335B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023096869A JP2023115060A (ja) 2019-04-25 2023-06-13 ドルメン構造を有する半導体装置及びその製造方法、支持片の製造方法、並びに、支持片形成用積層フィルム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/017689 WO2020217395A1 (ja) 2019-04-25 2019-04-25 ドルメン構造を有する半導体装置及びその製造方法、支持片の製造方法、並びに、支持片形成用積層フィルム

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023096869A Division JP2023115060A (ja) 2019-04-25 2023-06-13 ドルメン構造を有する半導体装置及びその製造方法、支持片の製造方法、並びに、支持片形成用積層フィルム

Publications (2)

Publication Number Publication Date
JPWO2020217395A1 true JPWO2020217395A1 (ja) 2020-10-29
JP7351335B2 JP7351335B2 (ja) 2023-09-27

Family

ID=72940650

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2021515416A Active JP7351335B2 (ja) 2019-04-25 2019-04-25 ドルメン構造を有する半導体装置及びその製造方法、支持片の製造方法、並びに、支持片形成用積層フィルム
JP2023096869A Withdrawn JP2023115060A (ja) 2019-04-25 2023-06-13 ドルメン構造を有する半導体装置及びその製造方法、支持片の製造方法、並びに、支持片形成用積層フィルム

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2023096869A Withdrawn JP2023115060A (ja) 2019-04-25 2023-06-13 ドルメン構造を有する半導体装置及びその製造方法、支持片の製造方法、並びに、支持片形成用積層フィルム

Country Status (5)

Country Link
JP (2) JP7351335B2 (ja)
KR (1) KR20210146898A (ja)
CN (1) CN113632225A (ja)
TW (1) TW202107666A (ja)
WO (1) WO2020217395A1 (ja)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002222889A (ja) * 2001-01-24 2002-08-09 Nec Kyushu Ltd 半導体装置及びその製造方法
JP2003124433A (ja) * 2001-08-27 2003-04-25 Samsung Electronics Co Ltd マルチチップパッケージ
JP2006005333A (ja) * 2004-05-20 2006-01-05 Toshiba Corp 積層型電子部品とその製造方法
US20070181990A1 (en) * 2006-02-03 2007-08-09 Siliconware Precision Industries Co., Ltd. Stacked semiconductor structure and fabrication method thereof
US20080029885A1 (en) * 2006-08-07 2008-02-07 Sandisk Il Ltd. Inverted Pyramid Multi-Die Package Reducing Wire Sweep And Weakening Torques
US7859119B1 (en) * 2003-11-10 2010-12-28 Amkor Technology, Inc. Stacked flip chip die assembly
JP2013131557A (ja) * 2011-12-20 2013-07-04 Toshiba Corp 半導体装置およびその製造方法
US20130270717A1 (en) * 2012-04-17 2013-10-17 Samsung Electronics Co., Ltd. Semiconductor package and method of fabricating the same
JP2015176906A (ja) * 2014-03-13 2015-10-05 株式会社東芝 半導体装置および半導体装置の製造方法
JP2017515306A (ja) * 2014-04-29 2017-06-08 マイクロン テクノロジー， インク． 支持部材を有する積層半導体ダイアセンブリと、関連するシステムおよび方法

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002222889A (ja) * 2001-01-24 2002-08-09 Nec Kyushu Ltd 半導体装置及びその製造方法
JP2003124433A (ja) * 2001-08-27 2003-04-25 Samsung Electronics Co Ltd マルチチップパッケージ
US7859119B1 (en) * 2003-11-10 2010-12-28 Amkor Technology, Inc. Stacked flip chip die assembly
JP2006005333A (ja) * 2004-05-20 2006-01-05 Toshiba Corp 積層型電子部品とその製造方法
US20070181990A1 (en) * 2006-02-03 2007-08-09 Siliconware Precision Industries Co., Ltd. Stacked semiconductor structure and fabrication method thereof
US20080029885A1 (en) * 2006-08-07 2008-02-07 Sandisk Il Ltd. Inverted Pyramid Multi-Die Package Reducing Wire Sweep And Weakening Torques
JP2013131557A (ja) * 2011-12-20 2013-07-04 Toshiba Corp 半導体装置およびその製造方法
US20130270717A1 (en) * 2012-04-17 2013-10-17 Samsung Electronics Co., Ltd. Semiconductor package and method of fabricating the same
JP2015176906A (ja) * 2014-03-13 2015-10-05 株式会社東芝 半導体装置および半導体装置の製造方法
JP2017515306A (ja) * 2014-04-29 2017-06-08 マイクロン テクノロジー， インク． 支持部材を有する積層半導体ダイアセンブリと、関連するシステムおよび方法

Also Published As

Publication number Publication date
CN113632225A (zh) 2021-11-09
WO2020217395A1 (ja) 2020-10-29
JP7351335B2 (ja) 2023-09-27
TW202107666A (zh) 2021-02-16
KR20210146898A (ko) 2021-12-06
JP2023115060A (ja) 2023-08-18

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