JPWO2020202910A1 - - Google Patents

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Publication number
JPWO2020202910A1
JPWO2020202910A1 JP2021511224A JP2021511224A JPWO2020202910A1 JP WO2020202910 A1 JPWO2020202910 A1 JP WO2020202910A1 JP 2021511224 A JP2021511224 A JP 2021511224A JP 2021511224 A JP2021511224 A JP 2021511224A JP WO2020202910 A1 JPWO2020202910 A1 JP WO2020202910A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021511224A
Other versions
JP7428702B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Publication of JPWO2020202910A1 publication Critical patent/JPWO2020202910A1/ja
Application granted granted Critical
Publication of JP7428702B2 publication Critical patent/JP7428702B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Vibration Prevention Devices (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2021511224A 2019-04-02 2020-02-26 クライオポンプおよび極低温冷凍機防振構造 Active JP7428702B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019070799 2019-04-02
JP2019070799 2019-04-02
PCT/JP2020/007668 WO2020202910A1 (ja) 2019-04-02 2020-02-26 クライオポンプおよび極低温冷凍機防振構造

Publications (2)

Publication Number Publication Date
JPWO2020202910A1 true JPWO2020202910A1 (ja) 2020-10-08
JP7428702B2 JP7428702B2 (ja) 2024-02-06

Family

ID=72667687

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021511224A Active JP7428702B2 (ja) 2019-04-02 2020-02-26 クライオポンプおよび極低温冷凍機防振構造

Country Status (6)

Country Link
US (1) US11619215B2 (ja)
JP (1) JP7428702B2 (ja)
KR (1) KR20210144711A (ja)
CN (1) CN113646532B (ja)
TW (1) TWI733357B (ja)
WO (1) WO2020202910A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2034497B1 (en) * 2023-04-04 2024-03-05 Phe Nx Knowledge B V Vacuum coupling with integrated vibration insulator.

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4363217A (en) * 1981-01-29 1982-12-14 Venuti Guy S Vibration damping apparatus
JPS58183878A (ja) 1982-04-21 1983-10-27 Hitachi Ltd クライオポンプの防振機構
JPS63501519A (ja) * 1985-09-24 1988-06-09 ヘリツクス　テクノロジ−　コ−ポレ−シヨン 振動絶縁装置を備えたクライオポンプ
US4835972A (en) * 1986-03-13 1989-06-06 Helix Technology Corporation Flex-line vibration isolator and cryopump with vibration isolation
US4862697A (en) * 1986-03-13 1989-09-05 Helix Technology Corporation Cryopump with vibration isolation
US5056319A (en) * 1989-03-18 1991-10-15 Leybold Aktiengesellschaft Refrigerator-operated apparatus
JPH0346234A (ja) 1989-07-13 1991-02-27 Sumitomo Electric Ind Ltd 半導体処理用横型炉
JPH041348A (ja) 1990-04-19 1992-01-06 Ohbayashi Corp 遠心力鋳造鋼管
US5490356A (en) * 1993-11-24 1996-02-13 Mm Systems Of Arizona Seismic isolation bearing
JP2004225722A (ja) * 2003-01-20 2004-08-12 Bando Chem Ind Ltd 免震支承体及び該免震支承体の製造方法
JP4322237B2 (ja) 2005-08-31 2009-08-26 勲 齋藤 中実肉厚形態の栄養調整食品の包装方法
WO2009107679A1 (ja) * 2008-02-25 2009-09-03 株式会社ブリヂストン 空気ばね装置
JP5916502B2 (ja) * 2012-04-27 2016-05-11 住友理工株式会社 防振支持構造体
JP6886453B2 (ja) * 2016-02-15 2021-06-16 住友重機械工業株式会社 クライオポンプ及びゲートバルブ
JP6672054B2 (ja) 2016-04-19 2020-03-25 アルバック・クライオ株式会社 クライオポンプ、真空処理装置

Also Published As

Publication number Publication date
KR20210144711A (ko) 2021-11-30
JP7428702B2 (ja) 2024-02-06
TWI733357B (zh) 2021-07-11
US11619215B2 (en) 2023-04-04
TW202037813A (zh) 2020-10-16
US20220018342A1 (en) 2022-01-20
CN113646532B (zh) 2023-04-14
WO2020202910A1 (ja) 2020-10-08
CN113646532A (zh) 2021-11-12

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