JPWO2020196346A1 - - Google Patents

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Publication number
JPWO2020196346A1
JPWO2020196346A1 JP2021509356A JP2021509356A JPWO2020196346A1 JP WO2020196346 A1 JPWO2020196346 A1 JP WO2020196346A1 JP 2021509356 A JP2021509356 A JP 2021509356A JP 2021509356 A JP2021509356 A JP 2021509356A JP WO2020196346 A1 JPWO2020196346 A1 JP WO2020196346A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021509356A
Other languages
Japanese (ja)
Other versions
JPWO2020196346A5 (enExample
JP7159451B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of JPWO2020196346A1 publication Critical patent/JPWO2020196346A1/ja
Publication of JPWO2020196346A5 publication Critical patent/JPWO2020196346A5/ja
Application granted granted Critical
Publication of JP7159451B2 publication Critical patent/JP7159451B2/ja
Active legal-status Critical Current
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Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
JP2021509356A 2019-03-28 2020-03-19 電磁アクチュエータ Active JP7159451B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019064782 2019-03-28
JP2019064782 2019-03-28
PCT/JP2020/012527 WO2020196346A1 (ja) 2019-03-28 2020-03-19 電磁アクチュエータ

Publications (3)

Publication Number Publication Date
JPWO2020196346A1 true JPWO2020196346A1 (enExample) 2020-10-01
JPWO2020196346A5 JPWO2020196346A5 (enExample) 2022-01-31
JP7159451B2 JP7159451B2 (ja) 2022-10-24

Family

ID=72610963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021509356A Active JP7159451B2 (ja) 2019-03-28 2020-03-19 電磁アクチュエータ

Country Status (2)

Country Link
JP (1) JP7159451B2 (enExample)
WO (1) WO2020196346A1 (enExample)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5330703A (en) * 1976-07-12 1978-03-23 Adorianusu W Ban Jirusu Laminated coillwinding
JPS58182469A (ja) * 1982-04-19 1983-10-25 Iwatsu Electric Co Ltd リニアアクチユエ−タ
JPS6122184U (ja) * 1984-07-11 1986-02-08 旭化成株式会社 リニアアクチユエ−タ用プリントコイル
JPH089622A (ja) * 1994-06-20 1996-01-12 Nippon Thompson Co Ltd リニア電磁アクチュエータ及びこれを具備した駆動ユニット
JP2002125360A (ja) * 2000-10-12 2002-04-26 Hitachi Ltd リニアモータ及びその制御方法
JP2004023960A (ja) * 2002-06-19 2004-01-22 Nikon Corp リニアモータ装置、ステージ装置及び露光装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5330703A (en) * 1976-07-12 1978-03-23 Adorianusu W Ban Jirusu Laminated coillwinding
JPS58182469A (ja) * 1982-04-19 1983-10-25 Iwatsu Electric Co Ltd リニアアクチユエ−タ
JPS6122184U (ja) * 1984-07-11 1986-02-08 旭化成株式会社 リニアアクチユエ−タ用プリントコイル
JPH089622A (ja) * 1994-06-20 1996-01-12 Nippon Thompson Co Ltd リニア電磁アクチュエータ及びこれを具備した駆動ユニット
JP2002125360A (ja) * 2000-10-12 2002-04-26 Hitachi Ltd リニアモータ及びその制御方法
JP2004023960A (ja) * 2002-06-19 2004-01-22 Nikon Corp リニアモータ装置、ステージ装置及び露光装置

Also Published As

Publication number Publication date
WO2020196346A1 (ja) 2020-10-01
JP7159451B2 (ja) 2022-10-24

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