JPWO2020196346A1 - - Google Patents

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Publication number
JPWO2020196346A1
JPWO2020196346A1 JP2021509356A JP2021509356A JPWO2020196346A1 JP WO2020196346 A1 JPWO2020196346 A1 JP WO2020196346A1 JP 2021509356 A JP2021509356 A JP 2021509356A JP 2021509356 A JP2021509356 A JP 2021509356A JP WO2020196346 A1 JPWO2020196346 A1 JP WO2020196346A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2021509356A
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Japanese (ja)
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JPWO2020196346A5 (enrdf_load_stackoverflow
JP7159451B2 (ja
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Publication of JPWO2020196346A1 publication Critical patent/JPWO2020196346A1/ja
Publication of JPWO2020196346A5 publication Critical patent/JPWO2020196346A5/ja
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Publication of JP7159451B2 publication Critical patent/JP7159451B2/ja
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Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
JP2021509356A 2019-03-28 2020-03-19 電磁アクチュエータ Active JP7159451B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019064782 2019-03-28
JP2019064782 2019-03-28
PCT/JP2020/012527 WO2020196346A1 (ja) 2019-03-28 2020-03-19 電磁アクチュエータ

Publications (3)

Publication Number Publication Date
JPWO2020196346A1 true JPWO2020196346A1 (enrdf_load_stackoverflow) 2020-10-01
JPWO2020196346A5 JPWO2020196346A5 (enrdf_load_stackoverflow) 2022-01-31
JP7159451B2 JP7159451B2 (ja) 2022-10-24

Family

ID=72610963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021509356A Active JP7159451B2 (ja) 2019-03-28 2020-03-19 電磁アクチュエータ

Country Status (2)

Country Link
JP (1) JP7159451B2 (enrdf_load_stackoverflow)
WO (1) WO2020196346A1 (enrdf_load_stackoverflow)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5330703A (en) * 1976-07-12 1978-03-23 Adorianusu W Ban Jirusu Laminated coillwinding
JPS58182469A (ja) * 1982-04-19 1983-10-25 Iwatsu Electric Co Ltd リニアアクチユエ−タ
JPS6122184U (ja) * 1984-07-11 1986-02-08 旭化成株式会社 リニアアクチユエ−タ用プリントコイル
JPH089622A (ja) * 1994-06-20 1996-01-12 Nippon Thompson Co Ltd リニア電磁アクチュエータ及びこれを具備した駆動ユニット
JP2002125360A (ja) * 2000-10-12 2002-04-26 Hitachi Ltd リニアモータ及びその制御方法
JP2004023960A (ja) * 2002-06-19 2004-01-22 Nikon Corp リニアモータ装置、ステージ装置及び露光装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5330703A (en) * 1976-07-12 1978-03-23 Adorianusu W Ban Jirusu Laminated coillwinding
JPS58182469A (ja) * 1982-04-19 1983-10-25 Iwatsu Electric Co Ltd リニアアクチユエ−タ
JPS6122184U (ja) * 1984-07-11 1986-02-08 旭化成株式会社 リニアアクチユエ−タ用プリントコイル
JPH089622A (ja) * 1994-06-20 1996-01-12 Nippon Thompson Co Ltd リニア電磁アクチュエータ及びこれを具備した駆動ユニット
JP2002125360A (ja) * 2000-10-12 2002-04-26 Hitachi Ltd リニアモータ及びその制御方法
JP2004023960A (ja) * 2002-06-19 2004-01-22 Nikon Corp リニアモータ装置、ステージ装置及び露光装置

Also Published As

Publication number Publication date
JP7159451B2 (ja) 2022-10-24
WO2020196346A1 (ja) 2020-10-01

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