JPWO2020172244A5 - - Google Patents
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- Publication number
- JPWO2020172244A5 JPWO2020172244A5 JP2021571641A JP2021571641A JPWO2020172244A5 JP WO2020172244 A5 JPWO2020172244 A5 JP WO2020172244A5 JP 2021571641 A JP2021571641 A JP 2021571641A JP 2021571641 A JP2021571641 A JP 2021571641A JP WO2020172244 A5 JPWO2020172244 A5 JP WO2020172244A5
- Authority
- JP
- Japan
- Prior art keywords
- transportable
- wafer
- rack
- vtm
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201962807612P | 2019-02-19 | 2019-02-19 | |
| US62/807,612 | 2019-02-19 | ||
| PCT/US2020/018786 WO2020172244A1 (en) | 2019-02-19 | 2020-02-19 | Automated batch production thin film deposition systems and methods of using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022521860A JP2022521860A (ja) | 2022-04-12 |
| JPWO2020172244A5 true JPWO2020172244A5 (ko) | 2023-02-15 |
Family
ID=72143899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021571641A Pending JP2022521860A (ja) | 2019-02-19 | 2020-02-19 | 自動バッチ生産の薄膜付着システム及びその使用方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20220076976A1 (ko) |
| EP (1) | EP3918106A4 (ko) |
| JP (1) | JP2022521860A (ko) |
| KR (1) | KR20210118950A (ko) |
| CN (1) | CN113474485A (ko) |
| SG (1) | SG11202108920SA (ko) |
| WO (1) | WO2020172244A1 (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102411440B1 (ko) * | 2021-10-21 | 2022-06-22 | 주식회사 기가레인 | 웨이퍼 처리 시스템 및 웨이퍼 처리 방법 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62222625A (ja) * | 1986-03-25 | 1987-09-30 | Shimizu Constr Co Ltd | 半導体製造装置 |
| US5186594A (en) * | 1990-04-19 | 1993-02-16 | Applied Materials, Inc. | Dual cassette load lock |
| US5516732A (en) * | 1992-12-04 | 1996-05-14 | Sony Corporation | Wafer processing machine vacuum front end method and apparatus |
| US6712577B2 (en) * | 1994-04-28 | 2004-03-30 | Semitool, Inc. | Automated semiconductor processing system |
| US20010052392A1 (en) * | 1998-02-25 | 2001-12-20 | Masahiko Nakamura | Multichamber substrate processing apparatus |
| US20020159864A1 (en) * | 2001-04-30 | 2002-10-31 | Applied Materials, Inc. | Triple chamber load lock |
| KR100443121B1 (ko) * | 2001-11-29 | 2004-08-04 | 삼성전자주식회사 | 반도체 공정의 수행 방법 및 반도체 공정 장치 |
| WO2006055984A2 (en) * | 2004-11-22 | 2006-05-26 | Applied Materials, Inc. | Substrate processing apparatus using a batch processing chamber |
| KR100814238B1 (ko) * | 2006-05-03 | 2008-03-17 | 위순임 | 기판 반송 장치 및 이를 이용한 기판 처리 시스템 |
| TWI476855B (zh) * | 2006-05-03 | 2015-03-11 | Gen Co Ltd | 基板傳輸設備、和使用該設備的高速基板處理系統 |
| US7833351B2 (en) * | 2006-06-26 | 2010-11-16 | Applied Materials, Inc. | Batch processing platform for ALD and CVD |
| US7661544B2 (en) * | 2007-02-01 | 2010-02-16 | Tokyo Electron Limited | Semiconductor wafer boat for batch processing |
| US9175388B2 (en) | 2008-11-01 | 2015-11-03 | Ultratech, Inc. | Reaction chamber with removable liner |
| US9328417B2 (en) | 2008-11-01 | 2016-05-03 | Ultratech, Inc. | System and method for thin film deposition |
| JP5274339B2 (ja) * | 2009-03-30 | 2013-08-28 | 大日本スクリーン製造株式会社 | 基板処理装置および基板搬送方法 |
| US9378994B2 (en) * | 2013-03-15 | 2016-06-28 | Applied Materials, Inc. | Multi-position batch load lock apparatus and systems and methods including same |
-
2020
- 2020-02-19 EP EP20759383.1A patent/EP3918106A4/en active Pending
- 2020-02-19 SG SG11202108920SA patent/SG11202108920SA/en unknown
- 2020-02-19 WO PCT/US2020/018786 patent/WO2020172244A1/en unknown
- 2020-02-19 US US17/310,680 patent/US20220076976A1/en active Pending
- 2020-02-19 KR KR1020217029311A patent/KR20210118950A/ko unknown
- 2020-02-19 CN CN202080014430.2A patent/CN113474485A/zh active Pending
- 2020-02-19 JP JP2021571641A patent/JP2022521860A/ja active Pending
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