JPWO2020131620A5

JPWO2020131620A5 -

Info

Publication number: JPWO2020131620A5
Application number: JP2021533739A
Authority: JP
Publication date: 2022-12-22

Claims

A floating table having a plurality of holes arranged in the transport direction for flowing a gas that floats the substrate above the floating table and allows the substrate to be transported in the transport direction. a floating table having a region, a second region, and a third region, the third region being located between the first region and the second region;
a fluid network that supplies gas to the plurality of holes of the floating table;
configured to control the fluid network to independently control gas flow through holes included in the plurality of holes in the first region located in each of a central zone and an edge zone; a control unit ,
The system, wherein the edge zone corresponds to an edge of the substrate, the central zone corresponds to a central region of the substrate, and the flying height of the edge of the substrate is higher than the flying height of the central region of the substrate. .

2. The system of claim 1, further comprising a printhead assembly mounted above said third region of said floating table.

The edge zone is a first edge zone and the controls are included in the plurality of holes in the first region located in a second edge zone corresponding to an edge of the substrate. further configured to control the fluid network to independently control gas flow through the holes, the central zone between the first edge zone and the second edge zone; 3. The system of claim 2, wherein:

A floating table having a plurality of holes arranged in the transport direction for flowing a gas that floats the substrate above the floating table and allows the substrate to be transported in the transport direction. a floating table having a region, a second region, and a third region, the third region being located between the first region and the second region;
a printhead assembly mounted above the third region of the floating table;
a fluid network that supplies gas to the plurality of holes of the floating table;
a controller operably coupled to the fluid network, the controller comprising:
to independently control gas flow through holes included in said plurality of holes in said first region located in each of a central zone, a first edge zone and a second edge zone; wherein said first edge zone and said second edge zone correspond to opposite edges of said substrate, said central zone corresponds to a central region of said substrate, and said first edge zone A system located between a zone and said second edge zone for independently controlling the flying height of the edge of said substrate .

The fluid network comprises:
a first gas supply manifold fluidly coupled to the holes of the central zone;
a first gas control valve operably coupled to the first gas supply manifold;
a second gas supply manifold fluidly coupled to the holes in the first edge zone and the second edge zone;
a second gas control valve operably coupled to the second gas supply manifold;
The controller adjusts at least one of a pressure or a flow rate of the gas flowing through the holes of the central zone, the first edge zone, and the second edge zone. 5. The system of claim 4, wherein the system is operably coupled to a gas control valve of and said second gas control valve.

further comprising a gas source and a vacuum source fluidly coupled to the plurality of holes via the fluid network, wherein the controller causes a portion of the holes in the third region to be evacuated from the vacuum source; 4. The system of claim 3, further configured to control the fluid network.

The controller controls the flow of gas through holes included in the plurality of holes in the first region located in a non-central zone between the first edge zone and the second edge zone. 4. The system of claim 3, further configured to control the fluid network to independently control the .

The non-central zone is a first non-central zone, and the control is located in a second non-central zone between the first edge zone and the second edge zone. further configured to control the fluid network to independently control the flow of gas through the pores included in the plurality of pores in the region of the central zone and the first non-central zone; 8. The system of claim 7, between said second non-central zone.

Further comprising a gas source and a vacuum source fluidly coupled to the plurality of holes via the fluid network, wherein the controller causes a central portion of the holes in the third region to be evacuated from the vacuum source. 9. The system of claim 8, further configured to control the fluid network.

Further comprising a gas source and a vacuum source fluidly coupled to the plurality of holes via the fluid network, wherein the controller causes a first portion of the holes located in a central region of the third region to be controlled by the vacuum. 5. The fluidic network of claim 4, further configured to control the fluidic network to draw a vacuum from a source and apply pressure to a second portion of the pores distributed in the third region. system.

The controller controls gas flow through holes included in the plurality of holes in the second region located in each of the central zone, the first edge zone and the second edge zone. wherein the first edge zone and the second edge zone correspond to opposite edges of the substrate and the central 5. The system of claim 4, wherein a zone corresponds to a central region of said substrate and is located between said first edge zone and said second edge zone.

The controller controls the flow of gas through holes included in the plurality of holes in the first region located in a non-central zone between the first edge zone and the second edge zone. 5. The system of claim 4, further configured to control the fluid network to independently control the .

The non-central zone is a first non-central zone, and the control is located in a second non-central zone between the first edge zone and the second edge zone. further configured to control the fluid network to independently control the flow of gas through the pores included in the plurality of pores in the region of the central zone and the first non-central zone; 13. The system of claim 12, between said second non-central zone.

a floating table comprising a plurality of holes for flowing gas sufficient to float a substrate above the floating table and to form a gas bearing that allows the substrate to be transported in a transport direction; A float having a first region, a second region and a third region arranged in a transport direction, the third region being located between the first region and the second region a formula table;
a printhead assembly mounted above the third region of the floating table;
a fluid network coupled to supply gas to the plurality of holes of the floating table;
A control configured to independently control the flying height of the edge of the substrate by controlling the fluidic network and independently controlling gas flow through holes included in the plurality of holes. and
The plurality of holes are
said first regions located in each of a central zone, a non-central zone, a first edge zone and a second edge zone, said first edge zone and said second edge zone; correspond to the opposite edges of the substrate, the central zone corresponds to the central region of the substrate and is located between the first edge zone and the second edge zone, and the non- said first region, wherein a central zone is located between said first edge zone and said second edge zone;
said second regions located in each of a central zone, a non-central zone, a first edge zone and a second edge zone, said first edge zone and said second edge zone; correspond to the opposite edges of the substrate, the central zone corresponds to the central region of the substrate and is located between the first edge zone and the second edge zone, and the non- and a central zone located in said second region located between said first edge zone and said second edge zone.

Further comprising a gas source and a vacuum source fluidly coupled to the plurality of holes via the fluid network, wherein the controller causes a first portion of the holes located in a central region of the third region to be controlled by the vacuum. 15. The fluidic network of claim 14, further configured to control the fluidic network to draw a vacuum from a source and apply pressure to a second portion of the pores distributed in the third region. system.

15. The system of claim 1, claim 4 or claim 14, wherein the controller is configured to control a flying height profile of the substrate.