JPWO2020126901A5 - - Google Patents

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Publication number
JPWO2020126901A5
JPWO2020126901A5 JP2021535173A JP2021535173A JPWO2020126901A5 JP WO2020126901 A5 JPWO2020126901 A5 JP WO2020126901A5 JP 2021535173 A JP2021535173 A JP 2021535173A JP 2021535173 A JP2021535173 A JP 2021535173A JP WO2020126901 A5 JPWO2020126901 A5 JP WO2020126901A5
Authority
JP
Japan
Prior art keywords
designed
lifting device
state information
acceleration
drive unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021535173A
Other languages
English (en)
Japanese (ja)
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JP2022514747A (ja
Publication date
Priority claimed from DE102018009871.1A external-priority patent/DE102018009871A1/de
Application filed filed Critical
Publication of JP2022514747A publication Critical patent/JP2022514747A/ja
Publication of JPWO2020126901A5 publication Critical patent/JPWO2020126901A5/ja
Pending legal-status Critical Current

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JP2021535173A 2018-12-19 2019-12-13 状態監視を有するピンリフティング装置 Pending JP2022514747A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102018009871.1 2018-12-19
DE102018009871.1A DE102018009871A1 (de) 2018-12-19 2018-12-19 Stifthubvorrichtung mit Zustandsüberwachung
PCT/EP2019/085063 WO2020126901A1 (de) 2018-12-19 2019-12-13 Stifthubvorrichtung mit zustandsüberwachung

Publications (2)

Publication Number Publication Date
JP2022514747A JP2022514747A (ja) 2022-02-15
JPWO2020126901A5 true JPWO2020126901A5 (zh) 2022-10-21

Family

ID=69157768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021535173A Pending JP2022514747A (ja) 2018-12-19 2019-12-13 状態監視を有するピンリフティング装置

Country Status (6)

Country Link
US (1) US20220076987A1 (zh)
JP (1) JP2022514747A (zh)
KR (1) KR20210104075A (zh)
DE (1) DE102018009871A1 (zh)
TW (1) TWI827744B (zh)
WO (1) WO2020126901A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018009630A1 (de) * 2018-12-11 2020-06-18 Vat Holding Ag Stifthubvorrichtung mit Temperatursensor
DE102020120732A1 (de) 2020-08-06 2022-02-10 Vat Holding Ag Stifthubvorrichtung
US20220293452A1 (en) * 2021-03-12 2022-09-15 Applied Materials, Inc. Lift pin mechanism
CN113488404B (zh) * 2021-05-30 2023-01-13 深圳市嘉伟亿科技有限公司 一种硅片激光退火定位设备及其使用方法
CN113488370B (zh) * 2021-07-06 2024-05-31 北京屹唐半导体科技股份有限公司 用于等离子体处理设备的升降销组件

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4382739A (en) * 1980-12-24 1983-05-10 International Business Machines Corporation Light actuating force elevator drive mechanism
JPH05129421A (ja) * 1991-11-07 1993-05-25 Fujitsu Ltd 静電チヤツク
US6205870B1 (en) * 1997-10-10 2001-03-27 Applied Komatsu Technology, Inc. Automated substrate processing systems and methods
US6646857B2 (en) 2001-03-30 2003-11-11 Lam Research Corporation Semiconductor wafer lifting device and methods for implementing the same
US6481723B1 (en) 2001-03-30 2002-11-19 Lam Research Corporation Lift pin impact management
US7292428B2 (en) * 2005-04-26 2007-11-06 Applied Materials, Inc. Electrostatic chuck with smart lift-pin mechanism for a plasma reactor
KR20060125072A (ko) * 2005-06-01 2006-12-06 삼성전자주식회사 반도체 소자 제조용 장비
US7712370B2 (en) * 2006-12-22 2010-05-11 Asm Japan K.K. Method of detecting occurrence of sticking of substrate
TW201005825A (en) * 2008-05-30 2010-02-01 Panasonic Corp Plasma processing apparatus and method
WO2010009050A2 (en) * 2008-07-15 2010-01-21 Applied Materials, Inc. Substrate lift pin sensor
US8313612B2 (en) * 2009-03-24 2012-11-20 Lam Research Corporation Method and apparatus for reduction of voltage potential spike during dechucking
US9108322B2 (en) * 2013-04-29 2015-08-18 Varian Semiconductor Equipment Associates, Inc. Force sensing system for substrate lifting apparatus
EP3361316A1 (de) * 2017-02-14 2018-08-15 VAT Holding AG Pneumatische stifthubvorrichtung und pneumatischer hubzylinder

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