JPWO2020067306A1 - Sliding body surface evaluation method and sliding body surface evaluation device - Google Patents

Abstract

Provided are a method for evaluating the surface of a sliding body and an apparatus for evaluating the surface of the sliding body, which can observe a change over time in a deteriorated part of the sliding part of the sliding body.
The first step of irradiating the sliding portion 3a of the formed sliding body 3 that slides with respect to the sliding body 4 with an electromagnetic wave, the second step of detecting the light emission of the sliding portion 3a irradiated with the electromagnetic wave, and the sliding. It includes a third step of deriving a change in the light emitting state in the moving part.

Description

The present invention relates to a surface evaluation method for observing a sliding portion of a sliding body and a surface evaluation device for the sliding body.

In a rotating device such as a crankshaft, a gear, and a pulley, or a reciprocating device such as a piston, there is a sliding portion in which separate members slide with each other to generate friction. Regarding the friction of the sliding portion, particularly in the case of a sliding body formed of silicon carbide, a phenomenon in which the friction coefficient of the sliding portion temporarily increases and then rapidly decreases and stabilizes due to the initial sliding. The so-called "familiar" phenomenon is known. For example, in the case of a sliding body such as a rotary sealing ring or a static sealing ring that constitutes a device for shaft-sealing the rotating shaft of a fluid machine such as a mechanical seal, the friction coefficient of the sliding portion is sufficient due to the "familiarity" phenomenon. If it is not in a lowered state, there is a problem that the sealing performance of the mechanical seal cannot be ensured in addition to the adverse effect on the driving performance of the fluid device. Therefore, observing the sliding portion is useful for evaluating the performance of the mechanical seal, and various methods are used for this observation.

As a method of observing the sliding portion, for example, there is an observation device as shown in Patent Document 1. The observation device of Patent Document 1 includes a holding jig for holding a sliding body as a test piece, a driving means for rotating a light-transmitting sliding body, and sliding between the sliding body and the sliding body. The moving surface is irradiated with light from a light source, and the light reflected from the sliding surface and transmitted through the sliding body is received by a digital camera to obtain an image of the sliding surface.

Japanese Patent No. 5037444 (page 7, Fig. 2)

In Patent Document 1, by using light-transmitting glass for the sliding body, an image of the sliding surface of the rotatingly driven sliding body can be obtained, and the unevenness of the surface of the sliding surface during sliding can be obtained. The oil film can be visually observed. On the other hand, the event that affects the decrease in the coefficient of friction of the sliding part is not limited to the surface shape of the sliding surface and the intervening state of the oil film, but the altered part where the base material is altered by the friction of the sliding part may affect it. Although it is known, the technique of Patent Document 1 is not intended to observe the temporal change of the altered portion of the sliding portion, and is not capable of such observation.

The present invention has been made by paying attention to such a problem, and provides a method for evaluating the surface of a sliding body and an apparatus for evaluating the surface of the sliding body, which can observe a temporal change of a deteriorated portion in the sliding portion of the sliding body. The purpose is to do.

In order to solve the above problems, the surface evaluation method for a sliding body of the present invention is used.
The first step of irradiating the sliding part of the sliding body that slides with respect to the sliding body with electromagnetic waves,
The second step of detecting the light emission of the sliding portion irradiated with the electromagnetic wave, and
The third step of deriving the change in the light emitting state in the sliding portion and
Is included.
According to this, by detecting the light emission of the sliding part and deriving the change of the light emitting state, it is possible to visualize the altered part where the surface of the sliding body is chemically and geometrically altered by friction. It is possible to observe the temporal change of the altered part.

Preferably, the first step comprises scanning the electromagnetic wave over the entire surface of the sliding portion.
According to this, by observing the change in the light emitting state over the entire surface of the sliding portion, it is possible to evaluate the region where the friction is likely to be reduced in the sliding portion.

Preferably, the first step includes a step of irradiating the sliding portion with an electromagnetic wave while rotationally driving the sliding body.
According to this, the entire surface of the sliding portion can be easily observed by rotating the sliding body.

Preferably, the first step includes a step of deriving a light emitting region in the sliding portion.
According to this, it is possible to observe the process in which the friction coefficient of the sliding portion decreases based on the change in the light emitting region.

Preferably, the third step includes a step of excluding a region having a brightness equal to or higher than a predetermined value from the light emitting region.
According to this, it is possible to accurately evaluate the region of the substantially altered portion formed by excluding the influence of the wear powder buried in the pores on the surface of the sliding portion.

Preferably, the first step includes scanning the electromagnetic wave with a confocal scanning microscope.
According to this, the confocal scanning microscope can detect the light emission of the sliding portion, particularly the altered portion, which has low brightness.

Preferably, the first step includes a step of finely moving the focus of the confocal scanning microscope in the depth direction of the sliding portion.
According to this, the sliding portion can be analyzed three-dimensionally, and for example, the light emitting area of the altered portion according to the thickness and depth of the formed altered portion can be observed.

In order to solve the above problems, the surface evaluation device for the sliding body of the present invention is used.
A holding member that holds the sliding body and
A driving means for rotationally driving the sliding body and
An irradiation device that irradiates the sliding portion of the sliding body with electromagnetic waves,
A detection unit that detects the light emission of the sliding portion irradiated with the electromagnetic wave, and a detection unit.
An arithmetic unit that derives a change in the light emitting state in the sliding part from the light emitted detected by the detection unit, and an arithmetic unit.
It has.
According to this, by detecting the light emission of the sliding part and deriving the change of the light emitting state, it is possible to visualize the altered part where the surface of the sliding body is chemically and geometrically altered by friction. It is possible to observe the temporal change of the altered part.

Preferably, a second holding member capable of holding the sliding object sliding with respect to the sliding body is provided.
The sliding body transmits the electromagnetic wave and the light emission, and the irradiation device is arranged at a position where the sliding portion of the sliding body is irradiated with the electromagnetic wave through the sliding body.
According to this, electromagnetic waves are irradiated to the sliding portion of the sliding body through the sliding body, and the light emission of the sliding portion can be detected by passing through the sliding body, so that the sliding body and the sliding portion can be detected. During sliding with a moving body, the process of change of the altered part in the sliding part can be observed.

Preferably, the sliding body is polycrystalline SiC and the sliding body is single crystal SiC.
According to this, it is possible to accurately observe the process of change of the altered portion on the surface of the sliding portion by approximating the physical characteristics with the sliding portion while allowing the sliding object to transmit electromagnetic waves and light emission.

Preferably, water is supplied as a lubricant between the sliding body and the sliding body.
According to this, by using water having a low viscosity as a lubricant for the sliding portion, it is possible to accurately observe the progress of the familiarization phenomenon on the surface of the sliding portion.

It is the schematic which shows the surface evaluation apparatus used in the surface evaluation method of the sliding body in Example 1 of this invention. It is an enlarged sectional view which enlarged the facing end face of a sliding body. It is a graph which shows the behavior of the friction coefficient of a sliding body with respect to a sliding distance. It is a graph which shows the behavior of the arithmetic mean height (Sa) of the sliding part of a sliding body with respect to a sliding distance. It is a graph which shows the behavior of the area of the fluorescent region of the sliding part of the sliding body with respect to the sliding distance. It is an image which shows the fluorescence region of the sliding part of a sliding body. It is an image diagram which shows the state which the focal point of a confocal scanning microscope is slightly moved in the depth direction of a sliding part. It is the schematic which shows the correspondence relationship of the sliding body and the sliding body in Example 2 of this invention. It is the schematic which shows the correspondence relationship of the sliding body and the sliding body in Example 3 of this invention.

The so-called "familiar phenomenon" is known as a phenomenon in which the friction coefficient of the sliding portion temporarily increases due to the initial sliding of the sliding body, and then the friction coefficient rapidly decreases and stabilizes (see FIG. 3). .. It is said that in the familiar process, shearing force, heat, pressure, etc. act on the sliding part, and the altered part formed by chemically and geometrically changing the surface becomes dominant in reducing friction. There is.
As has been known from the past, when observing the sliding parts that developed low wear due to the "familiarity phenomenon", most of them were altered parts in which the base material was altered and became amorphous, and the rest were unaltered groups. It has been confirmed that it is a timber part. It has also been confirmed that pores, which are fine recesses filled with wear powder, are locally present. The inventors succeeded in capturing the light emission of the altered part itself by using a confocal microscope, and the formation state of the altered part at the initial stage of sliding matches the change in friction coefficient and the change in surface roughness in the familiar process. I found out what I was doing. By utilizing this phenomenon, it is possible to accurately grasp the state of the sliding portion of the sliding body, particularly the altered portion, which will be described below as an example.

The surface evaluation method for the sliding body and the surface evaluation device for the sliding body according to the first embodiment of the present invention will be described with reference to FIGS. 1 to 7.

The inventor conducted an experiment to observe the surface of the sliding body. In the experiment, in order to perform a slip friction test between the end faces of silicon carbide (SiC), which is a ceramic, the surface of a ring-on-ring type thrust friction and wear tester capable of temperature control as shown in FIG. An evaluation device (hereinafter, simply referred to as a testing machine 30) was used. First, the test piece and the testing machine 30 used in the experiment will be described.

The sliding body used as a test piece is formed of an annular sliding body 3 formed of polycrystalline silicon carbide (hereinafter referred to as polycrystalline SiC) and a single crystal silicon carbide (hereinafter referred to as single crystal SiC). An annular sliding body 4 and an annular body 4 were used. The polycrystalline SiC forming the sliding body 3 is of the same quality as that used for the rotary sealing ring or the static sealing ring of the mechanical seal used for the shaft sealing of the fluid device or the like. Although the sliding body 4 has the same hardness and friction coefficient characteristics as polycrystalline SiC, it allows light to pass through the sliding body 4 more easily than polycrystalline SiC in order to transmit laser light 10 as excitation light, which will be described later. Crystalline SiC was used. The sliding body 3 had an outer diameter of 18 mm, an inner diameter of 8 mm, and a thickness of 8 mm, and the sliding body 4 had an outer diameter of 16 mm, an inner diameter of 11 mm, and a thickness of 8 mm.

The testing machine 30 is provided with a housing 2 that is rotatably connected to the base 1 and holds the sliding body 3, and the sliding body 4 is arranged above the sliding body 3 so as to be in contact with the sliding body 3. ing.

The housing 2 has a disk-shaped bottom surface portion 2a provided with a through hole 2b penetrating in the vertical direction at the axial center portion, a cylindrical shaft portion 2c provided on the lower surface portion of the bottom surface portion 2a, and an outer peripheral edge of the bottom surface portion 2a. It is configured to have a cylindrical side surface portion 2d which is provided in the housing and extends upward. The housing 2 is rotatably connected to the base 1 via a bearing 5 arranged on the outer periphery of the shaft portion 2c.

Further, water 8 is housed inside the housing 2 at a water level at which at least the facing end faces of the sliding body 3 and the facing end faces of the sliding body 4 are immersed, and the water that has entered between these end faces is contained between the sliding body 3 and the sliding body 4. It functions as a lubricant when sliding relative to the moving body 4. Although not shown, the water 8 supplied between the end faces of the sliding body 3 and the sliding body 4 is purified water at 25 ° C. and is circulated and supplied at 60 ml / min.

The sliding body 3 is held in the upper end opening of the through hole 2b of the housing 2 with its end face facing upward. The sliding body 4 is arranged above the sliding body 3 so as to be in contact with the sliding body 3 held in the housing 2.

Further, the sliding body 3 and the sliding body 4 are held in a state where a load is applied from above the sliding body 3 by a load motor (not shown). This load is measured by a load cell (not shown) and is equivalent to the urging force of an elastic means such as a spring that brings the rotary sealing ring and the static sealing ring of the mechanical seal used for shaft sealing of a fluid device close to each other.

Further, the sliding body 4 is fixed to the upper end portion of the rotary shaft 6 inserted into the through hole 2b of the housing 2, and the rotary shaft 6 is connected to a rotary drive source 7 such as a motor to form a rotary drive source 7. It can be rotated by driving. Further, the ring-shaped seal 11 located on the outer diameter side of the rotating shaft 6 is used to seal the shaft between the rotating shaft 6 and the through hole 2b.

The testing machine 30 includes a confocal scanning microscope 16 (manufactured by Olympus Corporation). The confocal scanning microscope 16 includes a light source 9 that irradiates the laser beam 10, an objective lens 18, a beam splitter 19, a detector 20, and a pinhole 12 that excludes scattered light from fluorescence as light emission incident on the detector 20. Have.

The operation of the confocal scanning microscope 16 will be briefly described. The laser beam 10 emitted from the light source 9 is reflected by the beam splitter 19, passes through the objective lens 18, passes through the sliding body 4, and is irradiated toward the sliding portion 3a of the sliding body 3. The sliding portion 3a refers to a sliding portion 3a which is a sliding portion of the sliding body 3 with the sliding body 4, and as shown in FIG. 7, the altered portion 3p and the non-altered base material portion 3b. Means the surface layer portion of the sliding body 3 including. The fluorescence 17 of the observation target by the laser light 10 and the laser light reflected by the observation target again pass through the sliding body 4 and are collected by the objective lens 18. Of the collected light, the reflected laser light is reflected by the beam splitter 19, and only the fluorescence 17 passes to the detector 20 side. In the fluorescence 17, scattered light is excluded by the pinhole 12 in front of the detector 20, and the fluorescence 17 is incident on the detector 20. In the detector 20, the incident fluorescence 17 is amplified. Although not shown, it is preferable to provide a filter between the beam splitter 19 and the pinhole 12 to block the wavelength of fluorescence emitted by the base material portion 3b.

Further, the beam splitter 19 is driven by a drive mechanism (not shown) to be finely rotated and its reflection angle can be changed, and the irradiation direction of the laser beam 10 can be changed. The sliding body 3 is driven by the laser beam 10. The surface of the sliding portion 3a of the above can be scanned in the radial direction. The detector 20 can convert the incident light into digital data and create a three-dimensional image to be observed.

Further, the testing machine 30 is provided with a housing rotation control means 23 for rotating and stopping the housing at a constant pitch. Specifically, a servomotor 24 is used as the housing rotation control means 23. A gear tooth is provided on the outer periphery of the housing 2, a ratchet mechanism is provided on the base 1 side, and the tooth and the ratchet are meshed with each other. It may be. The confocal scanning microscope 16 includes the entire sliding portion 3a by combining the rotation of the housing 2 by the housing rotation control means 23 and the radial scanning of the laser beam 10 by driving the reflection angle of the beam splitter 19. The surface can be scanned. The image detected by the detector 20 is arithmetically analyzed by an arithmetic unit such as a personal computer (not shown), and the fluorescence region of the sliding portion 3a, the ratio of the area to the entire surface of the sliding portion 3a, and the brightness distribution are evaluated. be able to.

An experiment in which the sliding portion 3a of the sliding body 3 which is the test piece is observed by using the test piece and the testing machine 30 described above will be described.

A sliding friction test between the end faces of the sliding body 3 and the sliding body 4 in water was performed. The frictional force is converted from the friction torque applied to the test piece jig supported by the bearing. In the experiment, the load of the load motor that applies a load between the sliding body 3 and the sliding body 4 was 32N, 53N, 212N. The rotation speeds of the housing were 142 rpm, 284 rpm, 1420 rpm, and 2840 rpm.

The surface roughness of the sliding body 3 in the initial stage before sliding (hereinafter referred to as Ra) was Ra <0.1 and Ra <0.01. As the Ra in the initial stage before the sliding of the sliding body 4, Ra <0.01 was prepared.

The behavior of the friction coefficient of the sliding body 3 (Ra <0.1) when the testing machine 30 is used and the sliding body 3 and the sliding body 4 are slid under the above conditions is as shown in FIG. rice field. As can be seen from FIG. 3, the friction coefficient of the sliding body 3 (Ra <0.1) was maintained at 0.05 or less with a sharp decrease in the friction coefficient after showing a relatively high friction at the initial stage. ..

FIG. 4 shows the result of the arithmetic mean height (Sa) of the sliding portion 3a of the sliding body 3. It was confirmed that an ultra-smooth slip surface was formed by continuing the change in metric order.

The inventors have found that the altered part where SiC is chemically changed such as amorphization shows fluorescence, and it has been found that the familiar process can be elucidated by observing and evaluating the altered part by the fluorescence phenomenon. explain.

When the sliding portion 3a was observed with the confocal scanning microscope 16, it was confirmed that most of the slip surface that developed low friction was a deteriorated portion, although pores filled with wear powder were locally present. rice field.

In the familiarization process, it is considered that wear accompanied by alteration of SiC and wear debris fill the pores. Then, it was confirmed that the fluorescence region increased when Sa decreased (see FIG. 4) by rapidly forming a smooth slip surface during the familiarization process (see FIG. 5). That is, it was confirmed that from a slip distance of 100 m to 400 m, Sa sharply decreased from 0.05 to 0.01, while the fluorescent region rapidly increased from 20% to 80%. From this, it was found that when Sa decreases, the number of altered parts that chemically change and develop low friction increases rapidly.

FIG. 6A is an image of the surface of the sliding portion 3a having a sliding distance of 98 m with a confocal scanning microscope 16, and the white portion shows the fluorescence region. FIG. 6B also shows a fluorescence region having a slip distance of 200 m. The fluorescent region is the altered portion 3p, and the black portion indicates the unaltered base material portion 3b. From FIGS. 6 and 5, it was confirmed that both Sa and the fluorescent region showed a remarkable change, especially from 98 m to 200 m when the friction coefficient increased, and a significant increase in the fluorescent region was confirmed. In addition, even in the initial stage of familiarity (98 m) and in the region after the development of low friction with a friction coefficient of 0.05 or less, a slight expansion of the fluorescence region can be confirmed, and the chemical change continues from the initial stage of friction to the region after the development of low friction. It became clear that it had occurred. In other words, since most of the slip surface that developed low friction is the altered part, it was suggested that the chemical change of the altered part could be captured with high sensitivity by fluorescence observation.

From the above, the chemical change of SiC due to frictional energy triggers the surface of the SiC to wear smoothly, and the wear debris generated from the altered SiC fills the pores, making it geometrically stable. It was found that a low friction interface was formed when the chemical changes were stable.

Further, since it was found that the wear powder buried in the pores is higher than the emission brightness of the altered portion, a step of excluding a region having a brightness equal to or higher than a predetermined value from the emission area is performed in the arithmetic analysis of the sliding portion 3a by the arithmetic unit. Therefore, the area of the formed altered portion can be reliably evaluated by excluding the influence of the wear powder buried in the pores on the surface of the sliding portion 3a.

In addition, the details of the chemical changes that occurred in the altered part were confirmed by TEM observation and spectroscopic analysis. According to this TEM observation, either a slip surface that has just developed low friction (for example, a slip surface with a slip distance of 519 m) and a slip surface that has been sufficiently slid after the development of low friction (for example, a slip surface with a slip distance of 10 km) However, unlike the SiC of the base material, a nano-interface with a thickness of several nm was formed in which the altered part occupies most of the material. Considering that the wear depth increased by about 30 nm from the slip distance of 519 m to 10 km, it can be estimated that the nanointerface of several nm repeats wear and formation.

In the above experiments, the following conclusions were obtained.
(1) In fluorescence observation, it is possible to detect minute chemical changes in the altered portion when low friction occurs with high sensitivity, and quantitatively evaluate the region in which SiC is altered as the fluorescent region.
(2) Fluorescence exhibited by the altered part in the familiar process in which the wear accompanied by the alteration of the base material SiC and the abrasion powder fill the surface recesses to rapidly form a smooth slip surface and the arithmetic mean height Sa decreases. The area increases.

As described above, the surface evaluation method of the sliding body includes the first step of irradiating the sliding portion 3a of the sliding body 3 with the laser beam 10 between the sliding body 3 formed of SiC and the sliding body 4. It includes a second step of detecting fluorescence which is light emission of the altered portion 3p irradiated with the laser beam 10 and a third step of deriving a change in the light emitting state of the sliding portion 3a. According to this, it is possible to evaluate the progress of the familiar phenomenon from the change in the light emitting state in which the SiC plateau portion is formed, and it is possible to reliably evaluate the decrease in the friction coefficient.

Further, by scanning the entire surface of the sliding portion 3a with the laser beam 10 and calculating the light emitting area over the entire surface of the sliding portion 3a, a region or the like in the sliding portion 3a where friction is likely to be reduced can be obtained. Can be evaluated. For example, it can be evaluated that the "familiarity phenomenon" is remarkable in a specific region in the radial direction.

Further, by using a confocal scanning microscope for observing the sliding portion 3a, it is possible to reliably detect the light emission of the sliding portion 3a having low brightness.

Further, water is supplied as a lubricant between the sliding body 3 and the sliding body 4. According to this, by using water having a low viscosity as a lubricant for the sliding portion, it is possible to accurately observe the progress of the familiarization phenomenon on the surface of the sliding portion 3a.

The testing machine 30 may include a driving device (not shown) capable of finely moving the height position of the objective lens 18 of the confocal scanning microscope 16 in the vertical (Z-axis) direction. According to this, as shown in FIG. 7, the sliding portion 3a is three-dimensionally analyzed and formed by slightly moving the focal point of the confocal scanning microscope 16 in the depth direction of the sliding portion 3a. The thickness of the altered portion 3p can be observed. Further, by observing the fluorescence region for each depth, the formation region of the altered portion 3p for each depth can be observed. Here, since the altered portion 3p of the sliding portion 3a has a thickness of about several μm, these observations are significant.

In the above embodiment, for convenience of explanation, the test piece to be observed with the confocal scanning microscope 16 as the test piece arranged on the lower side is referred to as the sliding body 3, and the test piece arranged on the upper side as the sliding partner thereof is used as the sliding body 3. Although described as a sliding body, the observation target is not distinguished by the terms sliding body and sliding body, and the observation target may be a sliding portion of the sliding body arranged on the upper side.

Next, the surface evaluation method for the sliding body and the surface evaluation device for the sliding body according to the second embodiment will be described with reference to FIG. It should be noted that the description of the same configuration as that of the above embodiment and the overlapping configuration will be omitted.

In FIG. 8, the sliding body is a rod-shaped member 33 instead of a cylindrical member. In this case, the sliding portion of the sliding body 4 is the observation target.

Next, the surface evaluation method for the sliding body and the surface evaluation device for the sliding body according to the third embodiment will be described with reference to FIG. It should be noted that the description of the same configuration as that of the above embodiment and the overlapping configuration will be omitted.

In FIG. 9A, the sliding body 40 is formed in a cylindrical shape by polycrystalline SiC, which is difficult for laser light to pass through. In this case, after performing a sliding friction experiment between the sliding body 3 and the sliding body 40, the sliding body 40 is removed, and the sliding portion of the sliding body 3 is removed using the confocal scanning microscope 16 of the testing machine 30. Observe 3a. According to this configuration, the sliding body 3 and the sliding body 40 are made of the same materials as the rotary sealing ring and the static sealing ring of the mechanical seal actually used, and an accurate observation result of the sliding portion can be obtained. Can be done.

Further, FIG. 9B is a modification of FIG. 9A, in which the sliding body 41 is replaced with a cylindrical member to be a rod-shaped member. In this case, the sliding portion 3a of the sliding body 3 is observed using the confocal scanning microscope 16 at a position where the sliding body 3 and the sliding body 41 do not overlap, without removing the sliding body 41. be able to.

Although examples of the present invention have been described above with reference to the drawings, the specific configuration is not limited to these examples, and any changes or additions within the scope of the gist of the present invention are included in the present invention. Is done.

For example, the testing machine used for the surface evaluation method of the sliding body is not limited to the configuration of the testing machine 30 described above.

Further, the sliding body may be made of another material that transmits light, such as glass, instead of the single crystal SiC. At this time, those having similar physical characteristics to the sliding body are preferable.

Further, the light source for irradiating the sliding portion 3a with electromagnetic waves may be, for example, a lamp other than the laser light source, and may be not limited to visible light but also electromagnetic waves of invisible light such as ultraviolet rays and infrared rays.

Further, as the microscope for observing the sliding portion 3a, a microscope other than the above-mentioned confocal scanning microscope may be used.

Further, an amorphous part in which the crystal structure is altered from the substrate has been described as an example of the altered portion 31p in which the substrate has been altered, but the altered portion may be a portion whose material properties have been altered by chemical, mechanical, thermal, etc. For example, an altered portion that has been altered by oxidation can be mentioned.

The sliding body 3 may be made of a material other than ceramics, but ceramics such as _{SiC and Al 2} O _{3 are preferable.}

Further, the lubricant supplied between the end faces of the sliding body 3 and the sliding body 4 is not limited to water, and may be, for example, a gas, a solvent, or oil.

Further, in FIG. 1 in the above embodiment, the water contained in the housing 2 is arranged only on the outer diameter side of the sliding body 3 and the sliding body 4, but the present invention is not limited to this, and the sliding body 3 and the sliding body 3 and the sliding body 4 are covered. It may be arranged on the inner diameter side of the moving body 4 or on both sides of the outer diameter side and the inner diameter side. In addition, different kinds of lubricants may be arranged on the outer diameter side and the inner diameter side.

Further, the change in the light emitting state may be one or both of the light emitting area and the brightness, and may be a light emitting state other than the light emitting area and the brightness.

1 Base 2 Housing 2a Bottom part 2b Through hole 2c Shaft part 2d Side part 3 Sliding body 3a Sliding part 3b Base material part 3p Altered part 4 Sliding body 5 Bearing 6 Rotating shaft 7 Rotating drive source 8 Water 9 Light source 10 Laser light 11 Seal 12 Pinhole 16 Confocal scanning microscope 17 Fluorescence 18 Objective lens 19 Beam splitter 20 Detector 23 Housing rotation control means 24 Servo motor 30 Testing machine

Claims (11)

The first step of irradiating the sliding part of the sliding body that slides with respect to the sliding body with electromagnetic waves,
The second step of detecting the light emission of the sliding portion irradiated with the electromagnetic wave, and
The third step of deriving the change in the light emitting state in the sliding portion and
A method for evaluating the surface of a sliding body, which comprises. The surface evaluation method for a sliding body according to claim 1, wherein the first step includes a step of scanning the electromagnetic wave over the entire surface of the sliding portion. The surface evaluation method for a sliding body according to claim 2, wherein the first step includes a step of irradiating the sliding portion with an electromagnetic wave while rotationally driving the sliding body. The method for evaluating the surface of a sliding body according to any one of claims 1 to 3, wherein the first step includes a step of deriving a light emitting region in the sliding portion. The surface evaluation method for a sliding body according to claim 4, wherein the third step includes a step of excluding a region having a brightness equal to or higher than a predetermined value from the light emitting region. The method for evaluating the surface of a sliding body according to any one of claims 1 to 5, wherein the first step includes a step of scanning the electromagnetic wave with a confocal scanning microscope. The surface evaluation method for a sliding body according to claim 6, wherein the first step includes a step of finely moving the focus of the confocal scanning microscope in the depth direction of the sliding portion. A holding member that holds the sliding body and
A driving means for rotationally driving the sliding body and
An irradiation device that irradiates the sliding portion of the sliding body with electromagnetic waves,
A detection unit that detects the light emission of the sliding portion irradiated with the electromagnetic wave, and a detection unit.
An arithmetic unit that derives a change in the light emitting state in the sliding part from the light emitted detected by the detection unit, and an arithmetic unit.
A surface evaluation device for a sliding body, which comprises. A second holding member capable of holding a sliding body that slides with respect to the sliding body is provided.
The sliding body transmits the electromagnetic wave and the light emission, and the irradiation device is arranged at a position where the sliding portion of the sliding body is irradiated with the electromagnetic wave through the sliding body. The surface evaluation device for a sliding body according to claim 8. The surface evaluation device for a sliding body according to claim 9, wherein the sliding body is polycrystalline SiC, and the sliding body is single crystal SiC. The surface evaluation device for a sliding body according to claim 9 or 10, wherein water is supplied as a lubricant between the sliding body and the sliding body.

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