JP5634161B2 - Ceramic sphere inspection equipment - Google Patents
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Description
本発明は耐摩耗性および耐久性に優れたセラミック球体の表面層の内部状態を検査するのに好適なセラミック球体検査装置に関するものである。 The present invention relates to a ceramic sphere inspection apparatus suitable for inspecting the internal state of the surface layer of a ceramic sphere excellent in wear resistance and durability.
セラミック球体は、鋼等の金属に比べて製造コストが高いものの、高強度で耐摩耗性や剛性に優れているとともに、鋼に比べて比重が小さく、かつ絶縁性で耐食性が高いという特徴を備えている。 Although ceramic spheres are more expensive to manufacture than metals such as steel, they are characterized by high strength, excellent wear resistance and rigidity, low specific gravity compared to steel, and high insulation and corrosion resistance. ing.
これらの特性を利用して、耐摩耗部材として、軸受やボールナット等の摺動装置や、高圧の流体を制御する流体弁の弁体等に使用されることで、軽量化を可能とするとともに、負荷荷重や繰り返し摺動による損傷や摩耗、腐食や電蝕による損傷等が抑制され、性能を長期にわたって維持することが可能となり、構成部品の長寿命化が図れるとともにメンテナンス作業が低減される。 Utilizing these characteristics, it is possible to reduce weight by using it as a wear-resistant member in sliding devices such as bearings and ball nuts, and valve bodies of fluid valves that control high-pressure fluid. In addition, damage and wear due to load load and repeated sliding, damage due to corrosion and electric corrosion, and the like can be suppressed, performance can be maintained over a long period of time, and the life of the components can be extended and maintenance work can be reduced.
特に、風力発電の発電機、空調装置の圧縮機、電気自動車やハイブリッド自動車等の各車両等、電気系統に近接しかつ温度、湿度等の変化が激しい環境で使用される軸受等では、腐食や電蝕による損傷等の影響が極めて大きく、製造コストの低い鋼等の金属に代えて維持コストを低くできるセラミック球体が採用されることも多くなっている。
また、特に高圧下で高速開閉する流体弁では剛性が高く軽量で長寿命の弁体が必須であり、弁体としてセラミック球体を採用するメリットも非常に大きい。
In particular, bearings used in environments such as wind power generators, air conditioner compressors, electric vehicles, hybrid vehicles, and other vehicles that are close to the electrical system and have drastic changes in temperature, humidity, etc. Ceramic spheres that are extremely affected by electric corrosion and that can reduce the maintenance cost instead of metals such as steel, which are low in production cost, are often used.
In particular, a fluid valve that opens and closes at high speed under high pressure requires a highly rigid, lightweight and long-life valve body, and the merit of using a ceramic sphere as the valve body is also very large.
一般的なセラミックは、複数の原材料および焼結助剤を用いて焼結されており、例えば窒化珪素質焼結体の焼結に際しては、原材料である窒化珪素（Ｓｉ３Ｎ４）は、それ自身での固相焼結は起こりづらく、緻密な焼結体が得ることができないため、焼結助剤としてＹ２Ｏ３などの希土類酸化物や、Ａｌ２Ｏ３などの酸化物を混合して成形した後、液相焼結により緻密化し、窒化珪素質焼結体を得ている。 A general ceramic is sintered using a plurality of raw materials and a sintering aid. For example, when a silicon nitride sintered body is sintered, the raw material silicon nitride (Si 3 N 4 ) Since solid-phase sintering by itself is unlikely to occur and a dense sintered body cannot be obtained, a rare earth oxide such as Y 2 O 3 or an oxide such as Al 2 O 3 is mixed as a sintering aid. After being molded, it is densified by liquid phase sintering to obtain a silicon nitride sintered body.
このように、複数の原材料や焼結助剤を用いて焼結した場合、条件によって表面や内部に微小な欠陥が発生しやすく、これらが存在すると、繰り返し荷重による疲労によって表面で剥離を起こす原因となる。
例えば、公知の特許文献１には、転動体表面のキズや亀裂などの欠陥が品質の信頼性の低下を招くため、焼結体の気孔率および粒界相中の最大気孔径について規定することで転がり寿命の優れた窒化珪素質焼結体製耐摩耗性部材が得られることが開示されている。
In this way, when sintering using multiple raw materials and sintering aids, minute defects are likely to occur on the surface and inside depending on the conditions, and if these exist, the cause of peeling on the surface due to fatigue due to repeated loading It becomes.
For example, in the known Patent Document 1, since defects such as scratches and cracks on the surface of the rolling element cause a decrease in quality reliability, the porosity of the sintered body and the maximum pore diameter in the grain boundary phase should be specified. It is disclosed that a wear resistant member made of a silicon nitride sintered body having an excellent rolling life can be obtained.
また、公知の特許文献２には、表面から深さ１ｍｍの範囲にマイクロポア（微小な欠陥に相当する微細気孔）の集合体で構成された白い樹枝状に観察される組織に着目し、該マイクロポアの集合体がある特定の大きさ以下であれば、ボールの全表面積に対して占める面積割合に関係なく、軸受材料として使用する上で支障となる転がり疲労による剥離を生じさせることが開示されている。 Further, in the known patent document 2, paying attention to a structure observed in a white dendritic structure composed of aggregates of micropores (micropores corresponding to minute defects) within a depth of 1 mm from the surface, It is disclosed that if the aggregate of micropores is a certain size or less, peeling due to rolling fatigue, which is a hindrance to use as a bearing material, is caused regardless of the area ratio of the total surface area of the ball. Has been.
さらに、本発明者らは鋭意研究を行った結果、これらの欠陥を可能な限り低減するだけでは、耐摩耗性および耐久性の向上に不十分であることが判明した。 Furthermore, as a result of intensive studies, the present inventors have found that reducing these defects as much as possible is insufficient for improving wear resistance and durability.
即ち、これらの欠陥は走査電子顕微鏡（ＳＥＭ）で観察可能な欠陥であるが、それ以外にＳＥＭでは観察できず、光学顕微鏡で観察される白色斑点（スノーフレーク）の有無が耐摩耗性および耐久性に非常に大きな影響を及ぼしていることを見出した。 That is, these defects are observable with a scanning electron microscope (SEM), but cannot be observed with other SEMs. The presence or absence of white spots (snowflake) observed with an optical microscope indicates wear resistance and durability. It has been found to have a very big influence on.
このスノーフレーク部分は、図１に示すように、ＳＥＭ観察では全く見られないのに対し、光学顕微鏡では明確に観察される。
このスノーフレークはＳＥＭ観察では見られないことから、特許文献２で開示されているマイクロポアの集合体からなる白い樹枝状のものではなく、スノーフレーク部分は、それ以外の部分と結晶粒界相のわずかな組成の違いがある部分と考えられ、このわずかな組成の違いが耐摩耗性および耐久性に大きく影響している。
As shown in FIG. 1, this snowflake portion is not observed at all by SEM observation, but is clearly observed by an optical microscope.
Since this snowflake is not observed by SEM observation, it is not a white dendritic structure composed of an aggregate of micropores disclosed in Patent Document 2, and the snowflake portion is slightly different from the other portions and the grain boundary phase. This slight difference in composition greatly affects the wear resistance and durability.
また、耐摩耗部材として使用される場合には、部材表面および表面近傍に存在するキズ、亀裂、気孔等の欠陥だけでなく、スノーフレークが耐摩耗性および耐久性に大きく影響を与えるため、表面および表面近傍の欠陥およびスノーフレークの有無が重要であり、焼結助剤組成の限定、かさ密度、平均結晶粒径をある特定の範囲内に調整し、限定した条件で製造することにより、表面から２５０μｍの深さまでの欠陥およびスノーフレークのない組織とすることが可能であることを見出した。 In addition, when used as a wear-resistant member, not only defects such as scratches, cracks, and pores existing near the surface of the member, but also snowflakes greatly affect wear resistance and durability. The presence of defects near the surface and the presence or absence of snowflakes are important. By adjusting the sintering aid composition limitation, bulk density, and average crystal grain size within a certain range and manufacturing under limited conditions, 250 μm from the surface. It has been found that it is possible to achieve a structure free of defects and snowflakes to a depth of.
このような、本発明者が見出した特性を考慮してセラミック球体を製品として検査する場合、表面近傍に存在するキズ、亀裂、気孔等の欠陥だけでなく、スノーフレークがないことを、破壊することなく観察して検査するための手段が必要となる。 When inspecting ceramic spheres as products in consideration of the characteristics found by the present inventors, not only defects such as scratches, cracks and pores existing in the vicinity of the surface, but also the absence of snowflakes are destroyed. A means for observing and inspecting is necessary.
セラミック球体を破壊することなく検査するものとして、例えば特許文献３に示すような、セラミック球体の表面を光学的に観察する装置や、特許文献４に示すような、セラミック球体の表面および表面層の内部を超音波によって観察する装置が公知である。 For inspecting the ceramic sphere without destroying it, for example, an apparatus for optically observing the surface of the ceramic sphere as shown in Patent Document 3, or the surface and surface layer of the ceramic sphere as shown in Patent Document 4 An apparatus for observing the inside by ultrasonic waves is known.
しかしながら、上記の特許文献３のような光学的に観察する装置では、表面からの反射光を検出しているため、表面に現れた欠陥やスノーフレーク等の色調の相違を検出することは可能であるが、表面には現れない表面層の内部の欠陥やスノーフレーク等を観察することができないという問題があった。 However, since the optical observation apparatus as described in Patent Document 3 detects reflected light from the surface, it is possible to detect a difference in color tone such as a defect appearing on the surface or a snowflake. However, there is a problem that defects inside the surface layer that do not appear on the surface, snowflakes, and the like cannot be observed.
また、特許文献４のような超音波によって観察する装置では、超音波の反射が異なるキズ、亀裂、気孔等であれば表面層の内部のものを検出することが可能であるが、前述したような結晶粒界相のわずかな組成の相違に基づき形成されるスノーフレークは超音波の反射による検出が困難であった。 In addition, in an apparatus for observing with ultrasonic waves such as Patent Document 4, it is possible to detect the inside of the surface layer if scratches, cracks, pores, etc., differing in the reflection of the ultrasonic waves. Snowflake formed on the basis of a slight compositional difference in the grain boundary phase was difficult to detect by reflection of ultrasonic waves.
そこで、本発明の目的は、簡単な構成で、セラミック球体を破壊することなく、表面層の内部の欠陥およびスノーフレークの有無を検出するセラミック球体検査装置を提供することにある。 SUMMARY OF THE INVENTION An object of the present invention is to provide a ceramic sphere inspection apparatus that detects a defect inside a surface layer and the presence or absence of a snowflake with a simple configuration without destroying the ceramic sphere.
本請求項１に係る発明は、セラミック球体を所定の位置で自転可能に支持する回転支持手段と、セラミック球体の表面に向けて照射光を照射する投光手段と、セラミック球体からの反射光を検査光として検出する受光手段と、該受光手段からの検出出力を受けてセラミック球体の表面層の内部状態を評価する処理手段とを備えたセラミック球体検査装置であって、前記投光手段が、光源と、該光源の光を照射光としてセラミック球体の表面に導く投光部とを有し、前記受光手段が、光量検出部と、前記セラミック球体からの検査光を光量検出部に導く受光部とを有し、前記投光部あるいは受光部の少なくとも一方が、先端にセラミック球体の表面と接触可能な接触面を有し、前記回転支持手段が、間欠的に駆動可能に構成され、前記投光部あるいは受光部の少なくとも一方が、セラミック球体の表面方向に進退可能に構成され、前記投光部あるいは受光部の少なくとも一方の先端の接触面が、前記回転支持手段の駆動停止時にセラミック球体の表面に密着し、前記回転支持手段の駆動時にセラミック球体の表面から離脱するように構成されていることにより、前記課題を解決するものである。 The invention according to claim 1 is a rotary support means for supporting the ceramic sphere so as to be capable of rotating at a predetermined position, a light projecting means for irradiating irradiation light toward the surface of the ceramic sphere, and reflected light from the ceramic sphere. A ceramic sphere inspection apparatus comprising: a light receiving means for detecting as inspection light; and a processing means for receiving a detection output from the light receiving means and evaluating an internal state of the surface layer of the ceramic sphere , wherein the light projecting means comprises: A light source and a light projecting unit that guides the light from the light source to the surface of the ceramic sphere as irradiation light, and the light receiving unit guides the light quantity detection unit and the inspection light from the ceramic sphere to the light quantity detection unit At least one of the light projecting unit or the light receiving unit has a contact surface that can contact the surface of the ceramic sphere at the tip, and the rotation support means is configured to be intermittently driven, and Hikaribe Alternatively, at least one of the light receiving portions is configured to be able to advance and retreat in the surface direction of the ceramic sphere, and the contact surface of at least one tip of the light projecting portion or the light receiving portion is the surface of the ceramic sphere when the rotation support means is stopped. The problem is solved by being configured to be in close contact with and detached from the surface of the ceramic sphere when the rotation support means is driven .
本請求項２に係る発明は、請求項１に記載の構成に加え、前記受光部が、セラミック球体の中心を通る断面の外周円の半円周にわたって複数設けられており、前記回転支持手段が、前記受光部の設けられた外周円に対し直角方向にセラミック球体を自転させるように構成されていることにより、前記課題を解決するものである。 In the invention according to claim 2, in addition to the configuration according to claim 1 , a plurality of the light receiving portions are provided over a semicircular circumference of an outer circumference of a cross section passing through the center of the ceramic sphere, and the rotation support means is The above-mentioned problems are solved by rotating the ceramic sphere in a direction perpendicular to the outer circumferential circle provided with the light receiving portion.
本請求項３に係る発明は、請求項１に記載の構成に加え、前記受光部が、セラミック球体の中心を通る断面の外周円の一部に沿って複数設けられており、前記回転支持手段が、前記受光部の設けられた外周円に対し直角方向にセラミック球体を自転させるとともに、自転で一周したときに前記複数の受光部の幅分だけずれるように、前記受光部の設けられた外周円方向にセラミック球体を回転させるように構成されていることにより、前記課題を解決するものである。 In the invention according to claim 3, in addition to the configuration according to claim 1 , a plurality of the light receiving portions are provided along a part of an outer circumference circle of a cross section passing through the center of the ceramic sphere, and the rotation support means However, the outer circumference provided with the light receiving portion is rotated by rotating the ceramic sphere in a direction perpendicular to the outer circumference circle provided with the light receiving portion, and shifted by the width of the plurality of light receiving portions when rotating once around the rotation. The above-described problem is solved by the configuration in which the ceramic sphere is rotated in the circular direction.
本請求項４に係る発明は、請求項１に記載の構成に加え、前記受光部が、１つのみ設けられており、前記回転支持手段が、所定の方向にセラミック球体を自転させるとともに、該自転方向と直角方向にわずかに回転させるように構成されていることにより、前記課題を解決するものである。 In the invention according to claim 4, in addition to the configuration according to claim 1, only one light receiving portion is provided, and the rotation support means rotates the ceramic sphere in a predetermined direction, and The above-described problem is solved by being configured to rotate slightly in the direction perpendicular to the rotation direction.
本請求項５に係る発明は、請求項２乃至請求項４のいずれかに記載の構成に加え、前記投光部が、前記複数の受光部と同じ個数設けられ、１個ずつそれぞれ隣接するように設けられていることにより、前記課題を解決するものである。 In the invention according to claim 5, in addition to the configuration according to any one of claims 2 to 4, the same number of the light projecting parts as the plurality of light receiving parts are provided, and the light projecting parts are adjacent to each other one by one. The above-mentioned problems are solved by being provided in the above.
本請求項１に係る発明のセラミック球体検査装置によれば、投光部あるいは受光部の少なくとも一方が、先端にセラミック球体の表面と接触可能な接触面を有していることにより、投光部と受光部が近接していても、投光部から照射される照射光のセラミック球体の表面での反射光を、確実に受光部で検出されないようにすることができる。
このことで、受光手段が投光手段から照射される照射光のセラミック球体の表面での反射光を検出しないため、検出される検査光は、セラミック球体の表面層の内部に透過し拡散した照射光の内部からの反射光のみとなり、表面層の内部の欠陥や、結晶粒界相のわずかな組成の相違に基づき形成されるスノーフレークの有無を、セラミック球体を破壊することなく、かつ、表面状態に左右されることなく正確に検出することができる。
According to the ceramic sphere inspection device of the present invention, at least one of the light projecting unit and the light receiving unit has a contact surface that can come into contact with the surface of the ceramic sphere at the tip. Even if the light receiving part is close, the reflected light on the surface of the ceramic sphere of the irradiation light irradiated from the light projecting part can be reliably prevented from being detected by the light receiving part.
In this way, since the light receiving means does not detect the reflected light of the surface of the ceramic sphere of the irradiation light emitted from the light projecting means, the detected inspection light is transmitted through and diffused into the surface layer of the ceramic sphere. Only the reflected light from the inside of the light, surface defects without destroying the ceramic sphere, whether there is a defect inside the surface layer or the presence or absence of snowflakes based on a slight difference in the composition of the grain boundary phase It is possible to detect accurately without being influenced by.
また、セラミック球体の材質や焼結条件に応じて光の透過率が決定されるため、複数箇所を検出した全体的な検査光の多寡を観察することで、セラミック球体の材質や焼結の良否を検査することもできる。
さらに、投光部あるいは受光部の少なくとも一方の先端の接触面が、回転支持手段の駆動停止時にセラミック球体の表面に密着し、回転支持手段の駆動時にセラミック球体の表面から離脱するように構成されていることにより、投光部あるいは受光部の少なくとも一方の先端の接触面が、セラミック球体の表面との摺動で破損したり摩耗したりすることなく、検査精度の維持メンテが容易となる。
Also, since the light transmittance is determined according to the material of the ceramic sphere and the sintering conditions, the quality of the material of the ceramic sphere and the quality of the sintering can be determined by observing the amount of the entire inspection light detected at multiple locations. Can also be inspected.
Further, the contact surface at the tip of at least one of the light projecting unit or the light receiving unit is configured to be in close contact with the surface of the ceramic sphere when the rotation support unit is stopped and to be detached from the surface of the ceramic sphere when the rotation support unit is driven. This facilitates maintenance of inspection accuracy without causing the contact surface at the tip of at least one of the light projecting part or the light receiving part to be damaged or worn by sliding with the surface of the ceramic sphere.
本請求項２に係る構成によれば、セラミック球体を１回転自転させるだけで、セラミック球体の全表面を観察することができ、セラミック球体を効率よく検査することができる。 According to the configuration of the second aspect of the present invention , the entire surface of the ceramic sphere can be observed only by rotating the ceramic sphere once, and the ceramic sphere can be inspected efficiently.
本請求項３に係る構成によれば、投光部および受光部の数を少なくすることができ、装置全体が簡素化され、コストが低減される。 According to the configuration of the third aspect, the number of light projecting units and light receiving units can be reduced, the entire apparatus is simplified, and the cost is reduced.
本請求項４に係る構成によれば、投光部および受光部をそれぞれ１つとすることができ、さらに装置全体が簡素化され、コストが低減されるとともに、複数の投光部および受光部の光量や感度の調整が一切不要となり、検査精度の維持メンテが容易となる。 According to the configuration of the fourth aspect of the present invention , each of the light projecting unit and the light receiving unit can be made one, the entire apparatus is simplified, the cost is reduced, and a plurality of light projecting units and light receiving units are provided. There is no need to adjust the amount of light or sensitivity, and maintenance of inspection accuracy is facilitated.
本請求項５に係る構成によれば、投光部と受光部の位置関係による、検出感度等の調整が不要となり、検査精度の維持メンテが容易となる。 According to the configuration of the fifth aspect, it is not necessary to adjust the detection sensitivity or the like based on the positional relationship between the light projecting unit and the light receiving unit, and maintenance of inspection accuracy is facilitated.
そこで、本発明のセラミック球体検査装置について説明する。
本発明の第１実施例であるセラミック球体検査装置１００は、図２、図３に示すように、被検査体であるセラミック球体Ｓを所定の位置で自転可能に支持する回転支持手段と、セラミック球体Ｓの表面に向けて照射光を照射する投光手段１１０と、セラミック球体Ｓからの反射光を検査光として検出する受光手段１２０と、該受光手段１２０からの検出出力を受けてセラミック球体Ｓの表面層の内部状態を評価する処理手段１４０とを有している。
Therefore, the ceramic sphere inspection apparatus of the present invention will be described.
As shown in FIGS. 2 and 3, the ceramic sphere inspection apparatus 100 according to the first embodiment of the present invention includes a rotation support means for supporting a ceramic sphere S as an object to be inspected so as to be able to rotate at a predetermined position, and a ceramic. The light projecting means 110 that irradiates the surface of the sphere S with the irradiation light, the light receiving means 120 that detects the reflected light from the ceramic sphere S as inspection light, and the ceramic sphere S that receives the detection output from the light receiving means 120. And processing means 140 for evaluating the internal state of the surface layer.
回転支持手段は、１つの駆動ローラ１３１と複数の従動ローラ１３２とからなり、複数の従動ローラ１３２が保持体１３４に回転可能に軸支されている。
保持体１３４は、その揺動軸１３５を中心に揺動支持部１３３に揺動可能に支持されることで、セラミック球体Ｓを１つの駆動ローラ１３１と複数の従動ローラ１３２の間に自転可能に保持するとともに、セラミック球体Ｓを保持から解放可能に構成されている。
The rotation support means includes one drive roller 131 and a plurality of driven rollers 132, and the plurality of driven rollers 132 are rotatably supported by the holding body 134.
The holding body 134 is swingably supported by the swing support part 133 around the swing shaft 135 so that the ceramic sphere S can be rotated between one drive roller 131 and a plurality of driven rollers 132. While holding, the ceramic sphere S is configured to be releasable from holding.
投光手段１１０は、光源１１１と、該光源１１１の光を照射光としてセラミック球体Ｓの表面に導く投光部１１２とを有している。
受光手段１２０は、光量検出部１２１と、セラミック球体Ｓからの検査光を光量検出部１２１に導く受光部１２２とを有している。
投光部１１２と受光部１２２の先端は、セラミック球体Ｓの表面と接触可能な接触面をなしており、保持体１３４に、図示しない進退機構によってセラミック球体Ｓの表面方向に進退可能に保持されている。
The light projecting unit 110 includes a light source 111 and a light projecting unit 112 that guides the light from the light source 111 to the surface of the ceramic sphere S as irradiation light.
The light receiving means 120 includes a light amount detecting unit 121 and a light receiving unit 122 that guides inspection light from the ceramic sphere S to the light amount detecting unit 121.
The tips of the light projecting unit 112 and the light receiving unit 122 form a contact surface that can come into contact with the surface of the ceramic sphere S, and are held by the holding body 134 so as to be able to advance and retract in the surface direction of the ceramic sphere S by an advancing / retreating mechanism (not shown). ing.
光源１１１は、照射光が表面層の内部まで透過する波長を含み、内部で乱反射、拡散して受光部１２２に到達する光量を有するものであれば良く、最適な波長のみを効率的に出力可能なレーザー光源や、安価で光量の大きなハロゲン光源等、いかなる光源であっても良い。
例えば、前述した、本発明者が見出した窒化珪素焼結体は表面および表面近傍の欠陥およびスノーフレークの有無について観察する場合、ハロゲン光で約２５０μｍまで透過可能であり、５００ｎｍ〜８００ｎｍの波長の光で観察できることから、一般的なハロゲン光源等を採用し、レーザー等のコストの高い光源としたり、複雑な光学システム等を設けなくても良い。
また、投光部１１２と受光部１２２は、接触面以外からの光を遮断可能に構成されていれば良く、例えば光ファイバー等を用いれば良い。
The light source 111 only needs to have a wavelength that includes the wavelength at which the irradiated light is transmitted to the inside of the surface layer, and diffusely reflects and diffuses inside to reach the light receiving unit 122. Only the optimum wavelength can be output efficiently. Any light source such as a simple laser light source or a halogen light source that is inexpensive and has a large amount of light may be used.
For example, when the silicon nitride sintered body found by the present inventor described above is observed for defects on the surface and in the vicinity of the surface and the presence or absence of snowflakes, the silicon nitride sintered body can transmit light up to about 250 μm with halogen light, and has a wavelength of 500 nm to 800 nm. Therefore, it is not necessary to use a general halogen light source or the like, to use a high-cost light source such as a laser, or to provide a complicated optical system.
The light projecting unit 112 and the light receiving unit 122 may be configured to be able to block light from other than the contact surface, and for example, an optical fiber may be used.
駆動ローラ１３１は、間欠的に駆動可能に構成され、投光部１１２と受光部１２２の先端の接触面が駆動ローラ１３１の駆動停止時にセラミック球体Ｓの表面に密着して表面層の内部を光学的に観察し、駆動ローラ１３１の駆動時にセラミック球体Ｓの表面から離脱することを繰り返す。 The driving roller 131 is configured to be intermittently drivable, and the contact surfaces at the tips of the light projecting unit 112 and the light receiving unit 122 are in close contact with the surface of the ceramic sphere S when the driving roller 131 stops driving, and the inside of the surface layer is optically observed. Observation is repeated, and the drive roller 131 is repeatedly detached from the surface of the ceramic sphere S when it is driven.
以上の構成で、セラミック球体Ｓの表面の多数の箇所において、表面からの反射光を検出することなく、表面層の内部に透過し拡散した照射光の内部からの反射光のみを観察することができる。
このことで、表面層の内部の欠陥や結晶粒界相のわずかな組成の相違に基づき形成されるスノーフレークＦを、セラミック球体を破壊することなく、かつ、表面状態に左右されることなく、受光手段が検出する検査光の変化として正確に検出することができるとともに、全体的な検査光の多寡を観察することで、セラミック球体の材質や焼結の良否を検査することもできる。
With the above configuration, it is possible to observe only the reflected light from the inside of the irradiated light that has been transmitted and diffused into the surface layer, without detecting the reflected light from the surface, at many locations on the surface of the ceramic sphere S. it can.
As a result, the snowflake F formed on the basis of defects in the surface layer and slight compositional differences in the grain boundary phase can be received without destroying the ceramic sphere and depending on the surface state. It can be accurately detected as a change in the inspection light detected by the means, and the quality of the ceramic sphere and the quality of the sintering can be inspected by observing the total amount of the inspection light.
なお、本実施例では、投光部１１２と受光部１２２が一体となって、保持体１３４にセラミック球体Ｓの表面方向に進退可能に保持されているが、投光部１１２あるいは受光部１２２のいずれか一方のみが進退可能に保持されも良く、両方をセラミック球体Ｓの表面に接触させた状態で固定されていても良い。 In the present embodiment, the light projecting unit 112 and the light receiving unit 122 are integrated and held by the holding body 134 so as to be able to advance and retreat in the surface direction of the ceramic sphere S. Only one of them may be held so as to be able to advance and retreat, or both may be fixed in a state where they are in contact with the surface of the ceramic sphere S.
また、投光部１１２と受光部１２２の先端の距離が表面からの反射光を検出しない程度に離れていれば、投光部１１２と受光部１２２の両方がセラミック球体Ｓの表面に接触しない位置で固定されていても良い。
投光部１１２と受光部１２２の両方が固定されている場合は、駆動ローラ１３１は間欠駆動でなく連続的に駆動されても良い。
In addition, if the distance between the tip of the light projecting unit 112 and the light receiving unit 122 is far enough not to detect the reflected light from the surface, the position where both the light projecting unit 112 and the light receiving unit 122 do not contact the surface of the ceramic sphere S. It may be fixed with.
When both the light projecting unit 112 and the light receiving unit 122 are fixed, the driving roller 131 may be driven continuously instead of intermittent driving.
また、セラミック球体検査装置１００は、前述した本発明者が見出した窒化珪素焼結体からなる球体だけではなく、他の組成、製造法による窒化珪素焼結体や、例えばアルミナ、ジルコニア、サイアロン等を主成分とするセラミック等、照射光が表面層の内部まで透過する材質からなるものであれば、いかなるセラミック球にも適用可能である。
例えば、ハロゲン光源を照射した場合、アルミナであれば３〜８ｍｍ程度、ジルコニアであれば２〜３ｍｍ程度透過可能な材質が知られており、これらの材質の検査が可能である。
Further, the ceramic sphere inspection apparatus 100 is not limited to the sphere made of the silicon nitride sintered body found by the inventor described above, but also a silicon nitride sintered body by other composition and manufacturing method, such as alumina, zirconia, sialon, etc. Any ceramic sphere can be used as long as it is made of a material that transmits the irradiated light to the inside of the surface layer, such as a ceramic mainly composed of.
For example, when a halogen light source is irradiated, materials that can transmit about 3 to 8 mm for alumina and about 2 to 3 mm for zirconia are known, and these materials can be inspected.
次に、セラミック球体Ｓの表面全体をくまなく観察するための構成を有する実施例について説明する。
本発明の第２実施例であるセラミック球体検査装置２００は、回転支持手段については第１実施例と同様に、１つの駆動ローラ２３１と複数の従動ローラ２３２とからなり、複数の従動ローラ２３２が保持体２３４に回転可能に軸支されている。
Next, an embodiment having a configuration for observing the entire surface of the ceramic sphere S throughout will be described.
In the ceramic sphere inspection apparatus 200 according to the second embodiment of the present invention, the rotation support means includes one drive roller 231 and a plurality of driven rollers 232 as in the first embodiment, and the plurality of driven rollers 232 include The holder 234 is rotatably supported by the shaft.
そして、投光部２１２と受光部２２２は、図４、図５に示すように、セラミック球体Ｓの中心を通り、かつ、自転方向と直角の断面の外周円の半円周にわたるように複数設けられている。
このことで、セラミック球体Ｓを１回転自転させるだけで、全表面を観察することができ、セラミック球体Ｓを効率よく検査することができる。
As shown in FIGS. 4 and 5, a plurality of light projecting units 212 and light receiving units 222 are provided so as to pass through the center of the ceramic sphere S and to cover the semicircular circumference of the outer circumferential circle having a cross section perpendicular to the rotation direction. It has been.
Thus, the entire surface can be observed only by rotating the ceramic sphere S by one rotation, and the ceramic sphere S can be inspected efficiently.
なお、投光部２１２および受光部２２２は、図示では分かりやすくするために太く描いているが、光ファイバー等の細いものを用いることで、図示以上に多く設けることができる。
また、投光部２１２を受光部２２２よりも少ない数としても良い。
Note that the light projecting unit 212 and the light receiving unit 222 are drawn thick for easy understanding in the drawing, but can be provided more than shown by using a thin one such as an optical fiber.
Further, the number of light projecting units 212 may be smaller than that of the light receiving units 222.
本発明の第３実施例であるセラミック球体検査装置３００は、図６に示すように、回転支持手段は、１つの駆動ローラ３３１と複数の従動ローラ３３２とからなり、複数の従動ローラ３３２は平行な回転軸線Ｃ２周りに回転可能に保持体３３４に軸支されており、駆動ローラ３３１は複数の従動ローラ３３２の回転軸線Ｃ２と所定の角度θだけ傾いた回転軸線Ｃ１周りに回転可能に構成されている。 In the ceramic sphere inspection apparatus 300 according to the third embodiment of the present invention, as shown in FIG. 6, the rotation support means includes one drive roller 331 and a plurality of driven rollers 332, and the plurality of driven rollers 332 are parallel. The drive roller 331 is configured to be rotatable about a rotation axis C1 inclined by a predetermined angle θ with respect to the rotation axis C2 of the plurality of driven rollers 332. ing.
そして、投光部３１２と受光部３２２は、セラミック球体Ｓの中心を通り、かつ、自転方向と直角の断面の外周円に沿って複数設けられている。
駆動ローラ３３１の回転軸線Ｃ１の傾き角度θは、セラミック球体Ｓを自転で一周させたとき、複数の受光部３２２の幅分だけずれるように設定されている。
全表面を観察するためには、セラミック球体Ｓを複数回自転させる必要があるが、第２実施例より少ない数の受光部３２２で全表面を観察することができる。
A plurality of light projecting portions 312 and light receiving portions 322 are provided along the outer circumference of the ceramic sphere S and having a cross section perpendicular to the rotation direction.
The inclination angle θ of the rotation axis C1 of the drive roller 331 is set so as to be shifted by the width of the plurality of light receiving portions 322 when the ceramic sphere S is rotated once.
In order to observe the entire surface, it is necessary to rotate the ceramic sphere S a plurality of times, but the entire surface can be observed with a smaller number of light receiving units 322 than in the second embodiment.
なお、第２実施例と同様に、投光部３１２および受光部３２２は、図示では分かりやすくするために太く描いているが、光ファイバー等の細いものを用いることで、図示以上に多く設けることができる。
また、投光部３１２を受光部３２２よりも少ない数としても良い。
As in the second embodiment, the light projecting unit 312 and the light receiving unit 322 are drawn thick for easy understanding in the drawing, but they can be provided more than shown by using a thin one such as an optical fiber. it can.
Further, the number of light projecting units 312 may be smaller than that of the light receiving units 322.
さらに、図７に示すように、投光部３１２と受光部３２２をそれぞれ１個ずつとし、駆動ローラ３３１の回転軸線Ｃ１の傾き角度θをごくわずかなものとしても良い。
このことで、複数の投光部および受光部の光量や感度を調整する作業が一切不要となり、検査精度の維持メンテが容易となる。
Further, as shown in FIG. 7, one light projecting unit 312 and one light receiving unit 322 may be provided, and the tilt angle θ of the rotation axis C <b> 1 of the drive roller 331 may be very small.
This eliminates the need for adjusting the light quantity and sensitivity of the plurality of light projecting units and light receiving units, and facilitates maintenance of inspection accuracy.
なお、回転支持手段は、上記実施例１乃至実施例３と同様の動作でセラミック球体Ｓを所定の位置で自転可能に支持するものであれば、上記実施例のものに限定されず、いかなる構成であっても良い。 The rotation support means is not limited to that of the above embodiment as long as it supports the ceramic sphere S so as to be capable of rotating at a predetermined position by the same operation as in the first to third embodiments. It may be.
例えば、図８に示すように、セラミック球体Ｓを回転可能に支持する従動ローラ４３２のうちの対向する２個を、縦方向に延びる回転軸４３７を持つ円錐台形状のものとしても良い。
この構成で、対向する２個の従動ローラ４３２の回転軸４３７に、それぞれ歯車４３６を偏心量ｒだけ偏心させて取り付け、２個の従動ローラ４３２の回転速度をそれぞれ周期的に変動させることで、セラミック球体Ｓを自転させるとともに捻り運動を加えてセラミック球体Ｓの表面全体をくまなく観察することができる。
For example, as shown in FIG. 8, two opposing rollers 432 that rotatably support the ceramic sphere S may have a truncated cone shape having a rotation shaft 437 extending in the vertical direction.
With this configuration, the gears 436 are attached to the rotation shafts 437 of the two driven rollers 432 facing each other with an eccentric amount r, respectively, and the rotational speeds of the two driven rollers 432 are periodically changed. The entire surface of the ceramic sphere S can be observed throughout by rotating the ceramic sphere S and applying a twisting motion.
また、図９に示すように、駆動ローラ５３１を平行溝５３８とネジ溝５３９を有する軸状に形成し、複数のセラミック球Ｓを連続的に検査できるようにしても良い。
図９に示す実施形態では、軸状の駆動ローラ５３１の約半周にわたって円周方向に延びる複数の平行溝５３８が形成されており、該平行溝５３８に連続して残りの約半周で隣接する平行溝５３８と接続するように延びる複数のネジ溝５３９が形成されている。
Further, as shown in FIG. 9, the driving roller 531 may be formed in a shaft shape having parallel grooves 538 and screw grooves 539 so that a plurality of ceramic balls S can be inspected continuously.
In the embodiment shown in FIG. 9, a plurality of parallel grooves 538 extending in the circumferential direction are formed over about a half circumference of the shaft-like drive roller 531, and the parallel grooves 538 are continuously adjacent to each other in the remaining half circumference. A plurality of screw grooves 539 extending so as to be connected to the groove 538 are formed.
そして、各平行溝５３８に対応してそれぞれ受光部５２２が設けられており、セラミック球Ｓは受光部５２２の位置において、平行溝５３８によって自転し、ネジ溝５３９によって駆動ローラ５３１の軸方向に移動するととともに、自転軸が変更される。
このことで、セラミック球Ｓは、図９における左方向から連続的に導入され、順次右方向の平行溝５３８部分に送られ、それぞれの平行溝５３８に対応した受光部５２２によって、順次自転軸を変更しながら観察され、連続的に全球面が観察される。
A light receiving portion 522 is provided corresponding to each parallel groove 538, and the ceramic sphere S rotates by the parallel groove 538 at the position of the light receiving portion 522, and moves in the axial direction of the driving roller 531 by the screw groove 539. At the same time, the rotation axis is changed.
Thus, the ceramic sphere S is continuously introduced from the left direction in FIG. 9 and sequentially sent to the parallel groove 538 portion in the right direction, and the rotation axis is sequentially changed by the light receiving unit 522 corresponding to each parallel groove 538. The whole sphere is continuously observed while changing.
なお、図８、図９に示すような、回転支持手段の他の実施態様においても、受光部および投光部の個数は１つでも複数でも良く、また、駆動ローラが間欠駆動され、受光部および投光部がセラミック球Ｓの表面方向に進退可能に構成され、駆動ローラの停止時にのみセラミック球Ｓの表面に密着するように構成されても良い。 In other embodiments of the rotation support means as shown in FIGS. 8 and 9, the number of the light receiving parts and the light projecting parts may be one or plural, and the driving roller is intermittently driven, and the light receiving part. The light projecting portion may be configured to be able to advance and retract in the surface direction of the ceramic sphere S, and may be configured to be in close contact with the surface of the ceramic sphere S only when the driving roller is stopped.
１００、２００、３００ ・・・セラミック球体検査装置
１１０ ・・・投光手段
１１１ ・・・ハロゲン光源
１１２、２１２、３１２ ・・・投光部
１２０ ・・・受光手段
１２１ ・・・光量検出部
１２２、２２２、３２２ 、５２２ ・・・受光部
１３１、２３１、３３１、４３１、５３１ ・・・駆動ローラ
１３２、２３２、３３２、４３２ ・・・従動ローラ
１３３ ・・・揺動支持部
１３４ ・・・保持体
１３５ ・・・揺動軸
４３６ ・・・歯車
４３７ ・・・回転軸
５３８ ・・・平行溝
５３９ ・・・ネジ溝
Ｓ ・・・セラミック球体
Ｆ ・・・スノーフレークＦ
DESCRIPTION OF SYMBOLS 100, 200, 300 ... Ceramic sphere inspection apparatus 110 ... Light projection means 111 ... Halogen light source 112, 212, 312 ... Light projection part 120 ... Light reception means 121 ... Light quantity detection part 122 , 222, 322, 522... Light receiving portions 131, 231, 331, 431, 531,..., Driving rollers 132, 232, 332, 432, driven rollers 133, swing support portions 134, holding Body 135 ・ ・ ・ Oscillating shaft
436 ... Gear
437... Rotating shaft
538 ... Parallel grooves
539 ・ ・ ・ Screw groove S ・ ・ ・ Ceramic sphere F ・ ・ ・ Snowflake F
Claims (5)
前記投光手段が、光源と、該光源の光を照射光としてセラミック球体の表面に導く投光部とを有し、
前記受光手段が、光量検出部と、前記セラミック球体からの検査光を光量検出部に導く受光部とを有し、
前記投光部あるいは受光部の少なくとも一方が、先端にセラミック球体の表面と接触可能な接触面を有し、
前記回転支持手段が、間欠的に駆動可能に構成され、
前記投光部あるいは受光部の少なくとも一方が、セラミック球体の表面方向に進退可能に構成され、
前記投光部あるいは受光部の少なくとも一方の先端の接触面が、前記回転支持手段の駆動停止時にセラミック球体の表面に密着し、前記回転支持手段の駆動時にセラミック球体の表面から離脱するように構成されていることを特徴とするセラミック球体検査装置。 Rotation support means for supporting the ceramic sphere so as to be able to rotate at a predetermined position, light projecting means for irradiating irradiation light toward the surface of the ceramic sphere, light receiving means for detecting reflected light from the ceramic sphere as inspection light, A ceramic sphere inspection device comprising processing means for receiving the detection output from the light receiving means and evaluating the internal state of the surface layer of the ceramic sphere ,
Before Kitoko means has a light source and a light projecting portion for guiding the surface of the ceramic spheres light of the light source as the irradiation light,
The light receiving means includes a light amount detecting unit and a light receiving unit that guides inspection light from the ceramic sphere to the light amount detecting unit,
At least one of the light projecting part or the light receiving part has a contact surface that can contact the surface of the ceramic sphere at the tip,
The rotation support means is configured to be intermittently drivable,
At least one of the light projecting unit or the light receiving unit is configured to be able to advance and retreat in the surface direction of the ceramic sphere,
The contact surface at the tip of at least one of the light projecting unit or the light receiving unit is configured to be in close contact with the surface of the ceramic sphere when the rotation support unit is stopped and to be detached from the surface of the ceramic sphere when the rotation support unit is driven. Ceramic sphere inspection apparatus characterized by being made .
前記回転支持手段が、前記受光部の設けられた外周円に対し直角方向にセラミック球体を自転させるように構成されていることを特徴とする請求項１に記載のセラミック球体検査装置。 A plurality of the light receiving portions are provided over the semicircular circumference of the outer circumference of the cross section passing through the center of the ceramic sphere,
2. The ceramic sphere inspection apparatus according to claim 1, wherein the rotation support means is configured to rotate the ceramic sphere in a direction perpendicular to an outer peripheral circle provided with the light receiving portion.
前記回転支持手段が、前記受光部の設けられた外周円に対し直角方向にセラミック球体を自転させるとともに、
自転で一周したときに前記複数の受光部の幅分だけずれるように、前記受光部の設けられた外周円方向にセラミック球体を回転させるように構成されていることを特徴とする請求項１に記載のセラミック球体検査装置。 A plurality of the light receiving portions are provided along a part of the outer circumference of a cross section passing through the center of the ceramic sphere,
The rotation support means rotates the ceramic sphere in a direction perpendicular to the outer circumference circle provided with the light receiving portion, and
As it shifted by the width of the plurality of light receiving portions when round in rotation, to claim 1, characterized in that it is configured to rotate the ceramic sphere outer circumference direction provided with the light receiving portion The ceramic sphere inspection device described.
前記回転支持手段が、所定の方向にセラミック球体を自転させるとともに、該自転方向と直角方向にわずかに回転させるように構成されていることを特徴とする請求項１に記載のセラミック球体検査装置。 Only one light receiving unit is provided,
The ceramic sphere inspection apparatus according to claim 1, wherein the rotation support means is configured to rotate the ceramic sphere in a predetermined direction and slightly rotate the sphere in a direction perpendicular to the rotation direction.
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| JP2010178772A JP5634161B2 (en) | 2010-08-09 | 2010-08-09 | Ceramic sphere inspection equipment |
| CN201410165457.8A CN103954635B (en) | 2010-01-07 | 2010-11-11 | Spheres of ceramic checks device |
| EP10842139.7A EP2522644B1 (en) | 2010-01-07 | 2010-11-11 | Sintered silicon nitride ceramic |
| PCT/JP2010/070083 WO2011083624A1 (en) | 2010-01-07 | 2010-11-11 | Sinterd ceramic, ceramic sphere, and device for inspecting ceramic sphere |
| CN201080060739.1A CN102918006B (en) | 2010-01-07 | 2010-11-11 | Ceramic sintered bodies, spheres of ceramic and spheres of ceramic inspection units |
| EP16161589.3A EP3056895B1 (en) | 2010-01-07 | 2010-11-11 | Device for inspecting ceramic sphere |
| US13/520,956 US9719942B2 (en) | 2010-01-07 | 2010-11-11 | Sintered ceramic and ceramic sphere |
| TW100100456A TWI493176B (en) | 2010-01-07 | 2011-01-06 | Ceramics, ceramic ball, and inspection device for ceramic ball |
| US14/458,420 US9316599B2 (en) | 2010-01-07 | 2014-08-13 | Device for inspecting ceramic sphere |
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| EP3279644A4 (en) * | 2015-03-30 | 2018-08-22 | NTN Corporation | Rotation method, inspection method, bearing manufacturing method, bearing, rotation device, and inspection device |
| JP2016188834A (en) * | 2015-03-30 | 2016-11-04 | Ntn株式会社 | Rotation method, inspection method, method of manufacturing bearing, and bearing |
| JP2016188835A (en) * | 2015-03-30 | 2016-11-04 | Ntn株式会社 | Rotation device and inspection device |
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| JPS6461653A (en) * | 1987-09-01 | 1989-03-08 | Aoki Tetsuo | Method and device for detecting crack of translucent body |
| JPH0416751A (en) * | 1990-05-11 | 1992-01-21 | Advantest Corp | Method for inspecting ceramic |
| JPH0763539A (en) * | 1993-06-18 | 1995-03-10 | Daio Koukiyuu Seizo Kk | Surface inspecting device for spherical material |
| JPH06329472A (en) * | 1993-05-21 | 1994-11-29 | Ube Ind Ltd | Sintered silicon nitride |
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| JP2004093441A (en) * | 2002-09-02 | 2004-03-25 | Nissan Arc Ltd | Method and apparatus for detecting ceramic surface layer zone defect and attachment for detecting ceramic surface layer zone defect |
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